Micro/Nano-Machining Research and Education Center, Tohoku University

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Facilities2F

table of contents

2F

You can check the corresponding device by clicking the number in the image.

2F
1 Network analyzer 2 Probe station 3 Impedance analyzer 4 Laser doppler vibrometer 5 LSI tester 6 UV exposure 7 Flip chip bonder #2 8 Wire bonder #1 9 Dicer 10 Fume hood 11 Refractive index meter 12 Fume hood 13 Electroplating #1, #2 14 Spin coater 1 Wafer bonding inspector 2 Ion milling SEM sample maker 3 Polishing SEM sample maker 4 Tension and compression fatigue tester 5 Isotropic Si etcher 6 Sputter machine for Pb based complex oxide 7 Plasma diamond CVD 8 Ultraviolet spectroscopic ellipsometer 9 ALD 10 14GHz network analyzer 11 Thermal Decomposition Spectroscopy, TDS 1 High resolution SEM 2 FIB 3 Thermal electron SEM 5 Rapid cooling vacuum heater 6 Ion coater 7 TG/DTA 1 YAG laser 2 VIM, Fluorescence microscope 3 Parylene evaporator 4 Fume hood 5 PLD 6 Hall effect measurement system 7 MBE 8 Thin film characterization system 9 PL measurement system
2F

Assembly test room

Optical measurement room

Analysis room

Laser fabrication room