Facilities

table of contents

• Floor map
• Common equipment

Floor map

• 1F Cleanroom
• 2F
• 3F
• Nanomachining Facility

Research Building/Quantum Science and Energy Engineering- 2F student experiment room – XRD

Common equipment

• 
  Lithography/exposure/drawing equipment
• 
  Film formation/deposition
• 
  Film processing/etching
• 
  Synthesis, heat treatment, doping
• 
  Surface treatment
• 
  Cutting, polishing, bonding
• 
  Shape/morphology observation, analysis
• 
  Sample preparation equipment
• 
  Electrical measurement
• 
  Mechanical measurement
• 
  Others