{"id":139,"date":"2022-01-12T10:51:04","date_gmt":"2022-01-12T01:51:04","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=139"},"modified":"2026-01-20T14:17:26","modified_gmt":"2026-01-20T05:17:26","slug":"equipment05","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05","title":{"rendered":"\u8868\u9762\u51e6\u7406"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u8868\u9762\u51e6\u7406<\/h2>\n\n\n\n<h3 id=\"equipment05-01\">UV exposure<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/06-1.jpg\" alt=\"UV exposure\" class=\"wp-image-799\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Samco (UV-T)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>UV + O<sub>3<\/sub>\u306b\u3088\u308b\u6709\u6a5f\u7269\u9664\u53bb\u3001UV + N<sub>2<\/sub>\u306b\u3088\u308bUV\u30ad\u30e5\u30a2<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u5149\u6e90\uff1a\u4f4e\u5727\u6c34\u9280\u30e9\u30f3\u30d7\uff08253.7, 184.9 nm)\u3001\u30b9\u30c6\u30fc\u30b8\u6e29\u5ea6\u8a2d\u5b9a\u7bc4\u56f2\uff1aRT\u2013300 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>O<sub>3<\/sub>, O<sub>2<\/sub>, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u2300200 mm\u3001\u539a\u307f2 mm\u4ee5\u4e0b<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment05-02\">Two-fluid cleaner<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/05-2.jpg\" alt=\"Two-fluid cleaner\" class=\"wp-image-808\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a2\u30af\u30c6\u30b9 \uff08ADE-3000S\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u6c34\u307e\u305f\u306f\u6709\u6a5f\u6eb6\u5a92\uff08IPA\u7b49\uff09\u306b\u3088\u308b\u4e8c\u6d41\u4f53\u5674\u9727\u6d17\u6d44\u88c5\u7f6e<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30a6\u30a7\u30cf\u56de\u8ee2\u6570\uff1a0\u20133000 rpm\u3001\u30a6\u30a7\u30cf\u63fa\u52d5\u89d2\u5ea6\uff1a0\u201340\u00b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm or 4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment05-03\">HDMS treatment system<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/10-2.jpg\" alt=\"HDMS treatment system\" class=\"wp-image-815\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u8868\u9762\u306bOFPR\u7b49\u306e\u30ec\u30b8\u30b9\u30c8\u3092\u5857\u5e03\u3059\u308b\u969b\u306b\u3001OAP\u6ef4\u4e0b\u3088\u308a\u3082\u9069\u5207\u306a\u8868\u9762\u51e6\u7406\u304c\u3067\u304d\u308b\u3002\u786b\u9178\u904e\u6c34\u6d17\u6d44\u4ee5\u964d\u306e\u4e00\u9023\u51e6\u7406\u3092\u5927\u6c17\u306b\u89e6\u308c\u305a\u306b\u6271\u3048\u308b\u305f\u3081\u3001\u30ec\u30b8\u30b9\u30c8\u5857\u5e03\u4e0d\u826f\u306e\u53ef\u80fd\u6027\u304c\u5c0f\u3055\u304f\u306a\u308b\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm\u20134 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment05-04\">Supercritical CO<sub>2<\/sub> drier<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/22.jpg\" alt=\"Supercritical CO2 drier\" class=\"wp-image-819\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/22.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/22-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>SC Fluids (CPD1100)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u8d85\u81e8\u754c\u3092\u7528\u3044\u305fMEMS\u30c7\u30d0\u30a4\u30b9\u306e\u4e7e\u71e5<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59274 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no30\">Excimer exposure<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/excimer-exposure.jpg\" alt=\"Excimer exposure\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\uff08\u682a\uff09\u30a8\u30e0\u30fb\u30c7\u30a3\u30fb\u30b3\u30e0<br>\n\uff08MEIRA-M-1-330\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u5fae\u7d30\u6709\u6a5f\u7269\u306e\u6d17\u6d44\u30fb\u5206\u89e3<br>\n\u89aa\u6c34\u6027\u6539\u8cea\u30fb\u5bc6\u7740\u6027\u6539\u5584<br>\n\u7a92\u5316\u819c\u30fb\u9178\u5316\u819c\u306e\u751f\u6210<br>\n\u5857\u6599\u306e\u30de\u30c3\u30c8\u51e6\u7406\uff08\u786c\u5316\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u6ce2\u9577:172nm 1\u706f\uff6550mW\/\u33a0\u4ed5\u69d8<br>\n\u30b9\u30c6\u30fc\u30b8\u642c\u9001\u7167\u5c04\u5f0f<br>\n\u7a92\u7d20\u30fbCDA\u5c0e\u5165\u53ef<br>\n\u7167\u5c04\u8ddd\u96e2\uff1a2\uff5e23mm\u307e\u3067<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927300mm\u25a1<br>\n\u57fa\u677f\u539a\u307f\u306f23mm\u307e\u3067\u51e6\u7406\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u8a66\u6599\u642c\u9001\u30b9\u30c6\u30fc\u30b8\u306b\u3088\u308a\u3001\u6700\u5927300mm\u25a1\u307e\u3067\u5747\u4e00\u306b\u7167\u5c04\u304c\u53ef\u80fd<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u8868\u9762\u51e6\u7406 UV exp [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":15,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"og:description\" content=\"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u8868\u9762\u51e6\u7406 UV exp [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\" \/>\n<meta property=\"og:site_name\" content=\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:17:26+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"3\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\",\"name\":\"\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\"},\"datePublished\":\"2022-01-12T01:51:04+00:00\",\"dateModified\":\"2026-01-20T05:17:26+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u30db\u30fc\u30e0\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Facilities\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Surface treatment\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/\",\"name\":\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"description\":\"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05","og_locale":"ja_JP","og_type":"article","og_title":"\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","og_description":"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u8868\u9762\u51e6\u7406 UV exp [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05","og_site_name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","article_modified_time":"2026-01-20T05:17:26+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"3\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05","url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05","name":"\u8868\u9762\u51e6\u7406 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website"},"datePublished":"2022-01-12T01:51:04+00:00","dateModified":"2026-01-20T05:17:26+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u30db\u30fc\u30e0","item":"https:\/\/web.tohoku.ac.jp\/mnc"},{"@type":"ListItem","position":2,"name":"Facilities","item":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities"},{"@type":"ListItem","position":3,"name":"Surface treatment"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website","url":"https:\/\/web.tohoku.ac.jp\/mnc\/","name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","description":"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/139"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/comments?post=139"}],"version-history":[{"count":34,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/139\/revisions"}],"predecessor-version":[{"id":2376,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/139\/revisions\/2376"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/media?parent=139"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}