Judgment of conduction type, evaluation of carrier density, evaluation of mobility
Sample size
□8 mm
Application example
Measurement of mobility and carrier density of GaN and Si
Main specifications
Measurable in a vacuum environment, stage Temperature: Maximum 400 K (Liquid nitrogen can be cooled by adiabatic expansion)
Remarks
LSI tester
Manufacturer name (model)
Advantest (T6573)
Application
Device for testing LSI
Sample size
Refer to wafer probe station
Applicable
Example: Functional test of self-made LSI, FV curve
Main specifications
Basic test rate: Maximum 125 MHz test cycle, Terminal: 512 pins, Test putter length: Maximum 16 MBit
Other
Basically, performance board for each measurement Prepare (purchase) and use (interface board with tester pin). If there are few terminals, there is a shared board. Not supported by the manufacturer
Remarks
14GHz network analyzer
Manufacturer name (model)
Keysight (E5071C)
Application
Resonant impedance characteristics, filter frequency characteristics, time domain characteristics, VSRW, etc.
Sample size
Probe measurement: 20 mm □ to ⌀4 inch, size does not matter for measurements other than prober
Application example
SAW device , BAR device resonator and filter impedance, filter characteristics, time domain characteristics, etc.
Main specifications
Upper limit 14 GHz
Others
Since the impedance is a comparison from 50 Ω, it is not possible to measure extremely small or large impedance values. There will be an error.
Remarks
Impedance analyzer
Manufacturer name (model)
HP (4194A)
Application
Impedance and phase measurement at each frequency (100 kHz–40 MHz) is possible. It is also possible to measure the equivalent circuit.
Sample size
As large as a commercially available electronic component
Application example
Measurement of resonance frequency of piezoelectric material, equivalent circuit measurement
Main specifications
Measurement is performed by connecting the measurement target to the positive and negative electrodes of the device.
Remarks
Impedance/material analyzer
Manufacturer name (model)
Agilent (E4991A)
Use
1 MHz–3 GHz impedance measurement
Sample size
Size as large as commercially available electronic parts
Tohoku University
