Micro/Nano-Machining Research and Education Center, Tohoku University

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FacilitiesElectrical measurement

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Electrical measurement

Four-probe resistivity measurement system

Four-probe resistivity measurement system
Manufacturer name (model)KYOWARIKEN (K-705RS)
ApplicationElectrical resistance measurement of conductive thin film
Sample sizeMaximum ⌀4 inch
Application exampleMetal spattered on insulating film Sheet resistance measurement of thin film
Main specificationsMeasurement mode: Resistance (Ω), Sheet resistance (Ω/□), Resistance (Ω∙cm)
Remarks

Hall effect measurement system

Hall effect measurement system
Manufacturer name (model)Self-made
ApplicationJudgment of conduction type, evaluation of carrier density, evaluation of mobility
Sample size□8 mm
Application exampleMeasurement of mobility and carrier density of GaN and Si
Main specificationsMeasurable in a vacuum environment, stage Temperature: Maximum 400 K (Liquid nitrogen can be cooled by adiabatic expansion)
Remarks

LSI tester

LSI tester
Manufacturer name (model)Advantest (T6573)
ApplicationDevice for testing LSI
Sample sizeRefer to wafer probe station
ApplicableExample: Functional test of self-made LSI, FV curve
Main specificationsBasic test rate: Maximum 125 MHz test cycle, Terminal: 512 pins, Test putter length: Maximum 16 MBit
OtherBasically, performance board for each measurement Prepare (purchase) and use (interface board with tester pin). If there are few terminals, there is a shared board. Not supported by the manufacturer
Remarks

14GHz network analyzer

14GHz network analyzer
Manufacturer name (model)Keysight (E5071C)
ApplicationResonant impedance characteristics, filter frequency characteristics, time domain characteristics, VSRW, etc.
Sample sizeProbe measurement: 20 mm □ to ⌀4 inch, size does not matter for measurements other than prober
Application exampleSAW device , BAR device resonator and filter impedance, filter characteristics, time domain characteristics, etc.
Main specificationsUpper limit 14 GHz
OthersSince the impedance is a comparison from 50 Ω, it is not possible to measure extremely small or large impedance values. There will be an error.
Remarks

Impedance analyzer

Impedance analyzer
Manufacturer name (model)HP (4194A)
ApplicationImpedance and phase measurement at each frequency (100 kHz–40 MHz) is possible. It is also possible to measure the equivalent circuit.
Sample sizeAs large as a commercially available electronic component
Application exampleMeasurement of resonance frequency of piezoelectric material, equivalent circuit measurement
Main specificationsMeasurement is performed by connecting the measurement target to the positive and negative electrodes of the device.
Remarks

Impedance/material analyzer

Impedance/material analyzer
Manufacturer name (model)Agilent (E4991A)
Use1 MHz–3 GHz impedance measurement
Sample sizeSize as large as commercially available electronic parts
Remarks

Wire bonder #1

Wire bonder #1
ManufacturerName (model)West Bond (MODEL 7700C)
Sample sizeAbout 2 inch
Remarks

Wire bonder #2

Wire bonder #2
Manufacturer name (model)TPT (HB16)
Maximum generated force (load)110 g
Thin film temperature250 ℃
Sample sizeApproximately 2 inch
Remarks