Smart System Super Integration Research Center, Tohoku University

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FacilitiesNanomachining Facility

table of contents

Nanomachining Facility

You can check the corresponding device by clicking the number in the image.

Nano-Machining building
1 Plasma CNT-CVD 2 UHV-STM & AFM 3 ESCA 4 SPM (Shimazu, 9500J2) 5 Olympus SPM 6 Micro vibration measurement system 10 Simple photo-mask maker(MM605AT) 11 2inch RF magnetron sputter(Ulvac)
Nano-Machining building