- table of contents
Film processing/etching
See the Remarks section of each facilitiy regarding availability for off-campus users.
Asher for general use
Manufacturer name (model) | Self-made |
Sample size | Maximum 4 inch |
Process gas | CF4, O2 |
Others | |
Remarks | |
ICP-RIE #1
Manufacturer name (model) | SPP Technologies (MUC21)
|
Application | Gate electrode formation |
Process gas | SF6, C4F8, HBr, Cl2, Ar, O2 |
Materials that can be introduced | Si, SiO2, resist |
Sample size | Maximum ⌀2 inch
|
Etching rate | 150 nm/min (Poly-Si) |
Selection ratio | 10 |
Others (plasmaExcitation method, power supply output, etc.) | Plasma excitation method: induction coupling type
|
Remarks | Available for off-campus users |
ICP-RIE #2
Manufacturer name (model) | Sumitomo Precision Products (MUC-21 ASE-SRE)
|
Use | High aspect ratio Si etching |
Process gas | SF6, C4F8, O2 |
Materials that can be introduced | Si, SiO2, positive resist |
Sample size | Maximum ⌀4 inch |
Etching rate | 1.5–7.5 μm/min (Si)
|
Selection ratio | 50–250 (photoresist)
|
Others (plasma excitation method, power output, etc.) | Plasma excitation method: induction coupling type, ICP power: maximum 1000 W, bias power: maximum 100 W
|
Remarks | |
ICP-RIE #3
Manufacturer name (model) ) | ANELVA (L-201D-L) |
Use | Al, W, SiO2 cleavage |
Process gas | BCl3, Cl2, O2, Ar, H2, CF4 |
Induction materials | Al, W, Si, SiO2, resist |
Sample size | ⌀2 inch |
Etching rate | 100 nm/min (SiO2) |
Selection ratio | 1:5 |
Others (plasma excitation method, power supply output, etc.) | Plasma excitation method: CCP
|
Remarks | |
FAB
Manufacturer name (model) | Ebara (FAB-60 ML type) |
Use | High-precision vertical machining with high-speed atomic rays |
Process gas | SF6, O2, CHF3 |
Materials that can be introduced | Metal, Si, etc. |
サSample size | □20 mm |
Etching rate | 34 nm/min (Si) |
Selection ratio | 1:1.5 (photoresist) |
Remarks | Available for off-campus users |
CCP-RIE #1
Manufacturer name(Model) | ANELVA (L-201D-L) |
Use | Metal and dielectric material photoresist |
Process gas | SF6, CF4, Ar, O2, CHF3 |
Workable materials | No limitation |
Sample size | Maximum ⌀3 inch |
Etching rate | 70 nm/min (SiO2), 10 nm/min (Pt) |
Selection ratio | 1:2–3 (photoresist: SiO2) |
Others (plasma excitation method, power supply output, etc.) | Plasma excitation Method: CCP (parallel flat plate)
|
Remarks | Available for off-campus users |
CCP-RIE #2
Manufacturer name (model) | ANELVA (L-201D-L) |
Application | Sample etching of semiconductors, Plasma, etc. |
Process gas | Ar, N2, O2, Cl2, BCl3 |
Materials that can be introduced | Samples of semiconductors, Plasma, etc. |
Sample size | 3 inch |
Others | RF < 100 W |
Remarks | Available for off-campus users |
CCP-RIE #3
Manufacturer name (model) | ANELVA (L-201D-L) |
Use | Al, W, SiO2 cleavage |
Process gas | BCl3, Cl2, O2, Ar, H2, CF4 |
Induction materials | Al, W, Si, SiO2, resist |
Sample size | ⌀2 inch
|
Etching rate | 100 nm/min (SiO2) |
Selection ratio | 1:5
|
Others (plasma excitation method, power supply output, etc.) | Plasma excitation method: CCP
|
Remarks | Available for off-campus users |
Ion beam milling
Manufacturer name (model) | Hakuto Co., Ltd. (IBE-KDC 75) |
Application | Microfabrication of materials (Pt, etc.) that cannot be handled by RIE equipment
|
Microfabrication of materials (Pt, etc.) that cannot be handled by RIE equipment
| Ar
|
Sample size | 20 mm, 3 inch, 4 inch |
Materials that can be introduced | Other than harmful substances (Pb, As, etc.), other than low vapor pressure substances (Zn, etc.)
|
Etching rate | Pt 30 nm/min
|
Others (plasma excitation method, power supply output, etc.) | Kaufman type plasma generator
|
Remarks | |
Dual frequency RIE
Manufacturer name (model) | ANELVA (L-211D) |
Use | For source / drain contact etching |
Process gas | C4F8, Ar, O2 |
SampleSize | ⌀2 inch |
Workable material | Si substrate |
Etching rate | 300 nm/min
|
Selection ratio | 1:10 |
Others (plasma excitation method, power supply output, etc.) | Dual frequency excitation
|
Remarks | Available for off-campus users |
SiN etcher
Manufacturer name (Manufacturer name) Model) | Samco (RIE-10NR) |
Use | For SiN etching of LOCOS |
Process gas | CF4, H2, O2, SF6 |
Sample size | ⌀2 inch |
Workable material | Si substrate |
Etching rate | 100 nm/min |
Selection ratio |
1:10 |
Others (plasma excitation method, power supply output, etc.) | Parallel plate type
|
Remarks | Available for off-campus users |
O2 asher
Manufacturer name (model) | Mori Engineering (SFA-600)
|
Use | Resist removal |
Process gas | O2 |
Materials that can be introduced | Si substrate
|
Sample size | ⌀2 inch |
Etching rate | 200 nm/min |
Selection ratio | Unknown
|
Others (plasma excitation method, power supply output, etc.) | Downflow type |
Remarks | |
Magnetic ICP-RIE
Manufacturer name (model) | ULVAC (NE-550) |
Use | Al wiring formation
|
Process gas | Cl2, BCl3, O2, CF4, SF6 |
Workable materials | Si substrate |
Sample size | ⌀2 inch |
Etching rate | 300 nm/min |
Selection ratio | Unknown
|
Others (plasma excitation method, power supply output, etc.) | Inducing magnetic field ICP
|
Remarks | Available for off-campus users |
Isotropic Si etcher
Manufacturer name (model) | Self-made |
Applications | Si selective etching |
Process gas | XeF2 |
Workable materials | Si, SiO2, positive resist, metal |
Sample size | □20 mm
|
Etching rate | Varies depending on the area of the material to be processed |
Selection ratio | 10000 (SiO2) |
Remarks | Available for off-campus users |
YAG laser
Manufacturer name (model) | NEC (Nd:YAG Laser SL 115G)
|
Features/Applications | Dry Process & local processing, separation of manufactured devices, cutting of stainless steel, SMA, etc. and selective removal of coatings on welded metal wires, PZT laser-assisted etching
|
Laser specifications (oscillator, wavelength, output, etc.) | Nd:YAG laser (Q switch used, wavelength: 1064 nm, output: 100 W)
|
Processing size | 50 × 50 mm |
Processing object | Silicon, glass, stainless steel, SMA, PZT, etc. (Consultation required)
|
Other | Processing accuracy: 30–approximately 40 μm, current range: 24–26 A (silicon), 40–42 A (glass)
|
Remarks | Available for off-campus users |