設備・装置3F

3階実験室

• 1Grinding machine
• 2Polishing machine
• 3Flip chip bonder #1
• 4Bonding tester
• 6Laser dicer
• 7 IR inspection camera
• 8 Tension and compression fatigue tester
• 9 Contact angle meter(DMe201)
• 10 Microscope(KH-7700)
• 11 Table top SEM(JCM-500)
• 12 Gas Chromatograph#1(GC-14B)
• 13 Gas Chromatograph#2(GC-2014AF)
• 14 Vibration Testing Machine(SW2015)
• 15 Double-Scan High Accuracy Laser Profiler(LT-9500)
• 16 Laser Displacement Sensor#1(LK-G5000V)
• 17 Laser Displacement Sensor#2(LK-G5000)
• 18 Network Analyzer(E5071C)
• 19 3D printer(X-Max 3D)

電気計測器

• Probe station
• Impedance/material analyzer
• Impedance analyzer
• x Signal generator(FSU)
• x Spectrum analyzer（ZNB 8）
• x Impedance analyzer(ZGA5920)
• x Impedance analyzer(HP4194A)

電気実験室

• 1 Drill press
• 2 Circuit board plotter
• 3 Lathe
• 4 Milling machine
• 5 3D Milling Machine(MDX-50)
• 6 3D Milling Machine(MDX-20)