Available equipments at constant temperature and humidity room
(1st floor of Research Building, Department of Mechanical Engineering)
You can see overviews of the equipments by clicking each topic.
Scanning Probe Microscope SPA300 / SPI3700（SII Nanotechnology Inc.）▼
Scan range: 20 µm × 20 µm (in standard mode)
Resolution: ～ 4-5 nm
Sample size: Φ15 mm (Max.)
Type of SPM: AFM / DFM
Optional scanner: 150 µm × 150 µm
SII Nanotechnology Inc.
3D Profile Measuring Microscope VK-9500 GII（Keyence Corporation）▼
Principle: Confocal method
Light source: Halogen lamp (Violet laser 408 nm)
Zoom ratio: x200～x18000
Sample size: Φ318 mm, Height 28 mm
Lateral resolution:0.01 µm
Transverse resolution:0.01 µm
Camera resolution: 1024×768 pixels
KEYENCE CORPORATION
SPM Caliber（Veeco Instruments Inc.）▼
Scan range: XY 90 µm（Closed-loop）
Z 10 µm
Type of SPM: Tapping-AFM Phase imaging
Contact-AFM Force modulation
Sample size: Φ50 mm
Less than thick of 5 mm（When using standard scanner）
Optical sensor to control the probe is assembled with the scanner.
Please get ready appropriate base in advance if you want to measure samples more than thick of 5 mm.
Veeco Instruments
（Under maintenance）Low Vacuum SEM JSM-6460LV（JEOL Ltd.）▼
Accelerating voltage: 0.3 kV～30 kV
Resolution: 3.0 nm (@ 30 kV), 4.0 nm (@ 30 kV, low
vacuum mode, Low vacuum ressure: 1～270 Pa)
Image mode: Secondary-electron image
(Compositional image, Topographic image, 3D image）
Sample size: Φ200 mm×Height 80 mm
JOEL Ltd.
Surface Profiler NewView100（Zygo Corporation）▼
Principle: Scanning White-Light interferometry
Methodbsevation method: Real-time video monitoring
Size of CCD: 320×240 pixels
Lateral resolution: 0.1 nm
Transverse resolution: 0.46 ～ 4.87 µm （Depending on the objective lens）
Maximum step height: 100 µm
Zygo Corporation
Fizeau interferometer GPI XP（Zygo Corporation）▼
Principle: Phase-Shifting Interferometry Method
Camera resolution: 320 × 240 pixels
Light source: He-Ne laser(Wavelength: 632.8 nm)
Zygo Corporation
(Under
maintenance)Surface Profilers(AMETEK Co.,Ltd)▼
(Under
maintenance) On-machine measurement instrument
/ Ultra-Precision Aspheric
Turing Machine (Toshiba Machine Co.,Ltd)▼
Control axes: 4 (X,Y,Z and C)
Positioning resolution: X，Y，Z 1 nm， C 0.0001°
Area of vacuum chuck surface: Φ100 mm
TOSHIBA MACHINE CO.,LTD
Please contact following address if you wmat to use above equipments．
6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miygi, 980-8579, JAPAN
Research Building 423 (4th floor)
Research Center for Precision Nanosystems Department of Nanomechanics
Nano-Metrology and Control Laboratory (Gao & Shimizu Laboratory)
| TEL：+81-22-795-
6950
(AP : Yuki Shimizu） |