Department of Finemechanics, School of Engineering, Tohoku University

Precision Nanometrology Laboratory Research Center for Precision Nanosystems

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Achievements

      Review article

      • W. Gao, S.W. Kim, H. Bosse, H. Haitjema, Y.L. Chen, X.D. Lu, W. Knapp, A. Weckenmann, W.T. Estler, H. Kunzmann
        Measurement technologies for precision positioning,
        CIRP Annals-Manufacturing Technology, Vol. 64, (2015), pp. 773-796.
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                                      Peer-reviewed journal papers

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                                                                                            International conference proceedings

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                                                                                                                                              Proceedings of domestic meetings

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