国際会議:33rd International Microprocesses and Nanotechnology Conference (MNC 2020)
Yuya Naito, Atsuki Kosugi, Ying Huang, Yuma Takida, Hiroaki Minamide, Kazuhiro
Hane, and Yoshiaki Kanamori
Title: Fabrication of antireflection subwavelength gratings on a silicon
prism for improvement of THz light extraction efficiencies