タイトル: Wavelength calibration using MEMS-enabled double filter configuration
for air gap sensing in the tunable Fabry–Pérot filter
著者: Pratyasha Sahani, Shiori Nabana, Taiyu Okatani, Naoki Inomata, and
Yoshiaki Kanamori
掲載誌: AIP Advances, Vol. 14, No.7, (2024) 075006
DOI: 10.1063/5.0214684
URL: https://doi.org/10.1063/5.0214684