Micro/Nano-Machining Research and Education Center, Tohoku University

HOMENews(日本語) MNC特別セミナー「Toward High-Performance MEMS Accelerometer: AnalyticalModel for Low Frequency Vibration Rectification Error」

(日本語) MNC特別セミナー「Toward High-Performance MEMS Accelerometer: AnalyticalModel for Low Frequency Vibration Rectification Error」

2024/09/13

Sorry, this entry is only available in Japanese.

Seminar on Dicing by DISCO Cor...