Smart System Super Integration Research Center, Tohoku University

Effective April 1, 2026, the Micro/Nano-Machining Research and Education Center (MNC) has been renamed the Smart System Super Integration Research Center (SIRC).

Request to Update the Center Name in the Acknowledgments

Machine out of service（2026.9.14）

・CCP-RIE#3
・RF magnetron sputter (ANELVA#2)
・CCP-RIE#1 
・XRD＃2 
・Spray Coater
・High-temp RF magnetron sputter(SSP3000)
・Wafer Bonder (EVG540)
・SiN etcher