Smart System Super Integration Research Center, Tohoku University

Effective April 1, 2026, the Micro/Nano-Machining Research and Education Center (MNC) has been renamed the Smart System Super Integration Research Center (SIRC).

Machine out of service（2026.3.31）

・CCP-RIE#3
・RF magnetron sputter (ANELVA#1)
・CCP-RIE#1 
・XRD＃2
・Dicer 
・Parylene evaporator