Micro/Nano-Machining Research and Education Center, Tohoku University

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FacilitiesNanomachining Facility

table of contents

Nanomachining Facility

You can check the corresponding device by clicking the number in the image.

Nano-Machining building
1 Plasma CNT-CVD 2 UHV-STM & AFM 3 XPS 4 Shimazu SPM 5 Olympus SPM 6 Micro vibration measurement system 7 Ushio projection aligner 8 Laser lithography system #2 9 Pattern generator 10 Simple photo-mask maker 11 ULVAC 2 inch sputter
Nano-Machining building