Micro/Nano-Machining Research and Education Center, Tohoku University
- table of contents
Electrical measurement
4-probe resistivity meter
| Manufacturer name (model) | KYOWARIKEN (K-705RS) |
| Application | Electrical resistance measurement of conductive thin film |
| Sample size | Maximum ⌀4 inch |
| Application example | Metal spattered on insulating film Sheet resistance measurement of thin film |
| Main specifications | Measurement mode: Resistance (Ω), Sheet resistance (Ω/□), Resistance (Ω∙cm)
|
| Remarks | |
Hall effect measurement
| Manufacturer name (model) | Self-made
|
| Application | Judgment of conduction type, evaluation of carrier density, evaluation of mobility
|
| Sample size | □8 mm
|
| Application example | Measurement of mobility and carrier density of GaN and Si |
| Main specifications | Measurable in a vacuum environment, stage Temperature: Maximum 400 K (Liquid nitrogen can be cooled by adiabatic expansion)
|
| Remarks | |
14GHZ Network Analyzer(E5063A)
| Manufacturer name (model) | Keysight (E5071C)
|
| Application | Resonant impedance characteristics, filter frequency characteristics, time domain characteristics, VSRW, etc.
|
| Sample size | Probe measurement: 20 mm □ to ⌀4 inch, size does not matter for measurements other than prober
|
| Application example | SAW device , BAR device resonator and filter impedance, filter characteristics, time domain characteristics, etc.
|
| Main specifications | Upper limit 14 GHz |
| Others | Since the impedance is a comparison from 50 Ω, it is not possible to measure extremely small or large impedance values. There will be an error. |
| Remarks | |
Impedance analyzer(HP4194A)
| Manufacturer name (model) | HP (4194A) |
| Application | Impedance and phase measurement at each frequency (100 kHz–40 MHz) is possible. It is also possible to measure the equivalent circuit.
|
| Sample size | As large as a commercially available electronic component
|
| Application example | Measurement of resonance frequency of piezoelectric material, equivalent circuit measurement
|
| Main specifications | Measurement is performed by connecting the measurement target to the positive and negative electrodes of the device. |
| Remarks | |
Impedance/Material Analyzer(E4991A)
| Manufacturer name (model) | Agilent (E4991A) |
| Use | 1 MHz–3 GHz impedance measurement |
| Sample size | Size as large as commercially available electronic parts
|
| Remarks | |
Wire bonder#1(L026-343)
| ManufacturerName (model) | West Bond (MODEL 7700C)
|
| Sample size | About 2 inch |
| Remarks | |
Wire bonder#2(HB16)
| Manufacturer name (model) | TPT (HB16)
|
| Maximum generated force (load) | 110 g |
| Thin film temperature | 250 ℃
|
| Sample size | Approximately 2 inch |
| Remarks | |
Network Analyzer(E5071C)
| Manufacturer name (model) | Agilent Technologies E5071C |
| Application | Frequency scanning |
| Application example | Resonators evaluation |
| Main specifications | 9kHz – 4.5GHz |
| Others | |
| Remarks | |
Signal generator(FSU)
| Manufacturer name (model) | rohde & schwarz(FSU) |
| Application | Spectrum analyzer |
| Main specifications | 20Hz – 8GHz |
| Others | |
| Remarks | |
Spectrum analyzer(ZNB 8)
| Manufacturer name (model) | rohde & schwarz（ZNB 8） |
| Application | Network analyzer |
| Main specifications | 9kHz – 8.5GHz |
| Others | |
| Remarks | |
Impedance analyzer(ZGA5920)
| Manufacturer name (model) | NF – ZGA5920 |
| Application | Impedance measurement |
| Application example | impedance measurement |
| Main specifications | 1mHz – 10MHz |
| Others | |
| Remarks | |
Tohoku University
