Micro/Nano-Machining Research and Education Center, Tohoku University
- table of contents
Electrical measurement
Four-probe resistivity measurement system
| Manufacturer name (model) | KYOWARIKEN (K-705RS) |
| Application | Electrical resistance measurement of conductive thin film |
| Sample size | Maximum ⌀4 inch |
| Application example | Metal spattered on insulating film Sheet resistance measurement of thin film |
| Main specifications | Measurement mode: Resistance (Ω), Sheet resistance (Ω/□), Resistance (Ω∙cm)
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| Remarks | |
Hall effect measurement system
| Manufacturer name (model) | Self-made
|
| Application | Judgment of conduction type, evaluation of carrier density, evaluation of mobility
|
| Sample size | □8 mm
|
| Application example | Measurement of mobility and carrier density of GaN and Si |
| Main specifications | Measurable in a vacuum environment, stage Temperature: Maximum 400 K (Liquid nitrogen can be cooled by adiabatic expansion)
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| Remarks | |
14GHz network analyzer
| Manufacturer name (model) | Keysight (E5071C)
|
| Application | Resonant impedance characteristics, filter frequency characteristics, time domain characteristics, VSRW, etc.
|
| Sample size | Probe measurement: 20 mm □ to ⌀4 inch, size does not matter for measurements other than prober
|
| Application example | SAW device , BAR device resonator and filter impedance, filter characteristics, time domain characteristics, etc.
|
| Main specifications | Upper limit 14 GHz |
| Others | Since the impedance is a comparison from 50 Ω, it is not possible to measure extremely small or large impedance values. There will be an error. |
| Remarks | |
Impedance analyzer
| Manufacturer name (model) | HP (4194A) |
| Application | Impedance and phase measurement at each frequency (100 kHz–40 MHz) is possible. It is also possible to measure the equivalent circuit.
|
| Sample size | As large as a commercially available electronic component
|
| Application example | Measurement of resonance frequency of piezoelectric material, equivalent circuit measurement
|
| Main specifications | Measurement is performed by connecting the measurement target to the positive and negative electrodes of the device. |
| Remarks | |
Impedance/material analyzer
| Manufacturer name (model) | Agilent (E4991A) |
| Use | 1 MHz–3 GHz impedance measurement |
| Sample size | Size as large as commercially available electronic parts
|
| Remarks | |
Wire bonder #1
| ManufacturerName (model) | West Bond (MODEL 7700C)
|
| Sample size | About 2 inch |
| Remarks | |
Wire bonder #2
| Manufacturer name (model) | TPT (HB16)
|
| Maximum generated force (load) | 110 g |
| Thin film temperature | 250 ℃
|
| Sample size | Approximately 2 inch |
| Remarks | |
Tohoku University
