Micro/Nano-Machining Research and Education Center, Tohoku University

HOMEFacilitiesSynthesis, heat treatment, doping

FacilitiesSynthesis, heat treatment, doping

table of contents

Synthesis, heat treatment, doping

High-temp Oven

High-temp Oven
Manufacturer name (model)ADVANTEC (DRD360DA)
OtherTemperature range 50℃–650℃
Remarks

Ion implantation

Ion implantation
Manufacturer name (model) ULVAC (IMX-3500)
Application (ApplicationFeatures)Injection of semiconductor dopant
Main specificationsIon species: B, P, As, Injection energy: 5–150 keV
Sample sizeMaximum ⌀8 inch
Others
Remarks