Title: Flexible Fishbone Waveguides Made of Single-Crystal Silicon for Terahertz-Wave Path Switching
Authors: Kohei Chiba and Yoshiaki Kanamori
Journal: Journal of Microelectromechanical Systems, (2026) 1-11, Early Access.
URL：https://doi.org/10.1109/JMEMS.2026.3710220
Published: 14 July, 2026