Conference presentation:The 12th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2026)
Authors: Kohei Chiba, Yoshiaki Kanamori
Title: Silicon Subwavelength Grating Waveguides with High Flexibility and
Low Bending Loss toward Terahertz Photonic Integrated Circuits
Speaker: Kohei Chiba
Presentation Date: June 22, 2026
Authors: Taro Ikeda, Yoshiaki Kanamori
Title: Tailoring hard mask selection for precise nanofabrication of electrostatic
comb-drive diamond actuators
Speaker: Taro Ikeda
Presentation Date: June 23, 2026