Title: Terahertz Optical Switches with Movable Silicon Waveguides Monolithically Fabricated on High-Resistivity Single-Crystal Silicon Substrates
Authors: Kohei Chiba and Yoshiaki Kanamori
Journal: IEEE Transactions on Terahertz Science and Technology, (2026) 1-14, Early Access.
URL：https://doi.org/10.1109/TTHZ.2026.3683533
Published: 16 April, 2026