Title: Design and Fabrication of Capacitive Mems Actuator Array on Spoof-Surface-Plasmon-Polariton Waveguide for Active Microwave Modulation
Authors: Van Minh Nguyen and Yoshiaki Kanamori
Journal: Advanced Photonics Research, Vol. 7, No.1 (2026) e202500228.
URL: https://doi.org/10.1002/adpr.202500228
Published: 5 January, 2026