Title: Design and fabrication of freestanding ultra-nanocrystalline diamond nanostructures applying to nano-electromechanical actuators
Authors: Taro Ikeda and Yoshiaki Kanamori
Journal: Diamond and Related Materials, Vol. 158, (2025) 112617.
URL: https://doi.org/10.1016/j.diamond.2025.112617
Published: 8 July, 2025