Yuya Naito, Atsuki Kosugi, Ying Huang, Yuma Takida, Hiroaki Minamide, Kazuhiro
Hane, and Yoshiaki Kanamori
Title: Fabrication of antireflection subwavelength gratings on a silicon
prism for improvement of THz light extraction efficiencies
Nanosystems, Department of Robotics, School of Engineering, Tohoku University
Yuya Naito, Atsuki Kosugi, Ying Huang, Yuma Takida, Hiroaki Minamide, Kazuhiro
Hane, and Yoshiaki Kanamori
Title: Fabrication of antireflection subwavelength gratings on a silicon
prism for improvement of THz light extraction efficiencies