Ying Huang, Taiyu Okatani, Naoki Inomata, and Yoshiaki Kanamori,
"Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip,"
Optics Express, vol.31, no.18, pp. 29744-29754 (2023).

http://opg.optica.org/OE/abstract.cfm?uri=OE-31-18-29744