Kohei Chiba, Taiyu Okatani, Naoki Inomata, and Yoshiaki Kanamori,
"Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3–0.5 THz frequency band,"
Optics Express, vol.31, no.17, pp. 27147–27160 (2023).
https://doi.org/10.1364/OE.492942