A paper was published in Journal of Vacuum Science & Technology B.

Taiyu Okatani, Yuichi Sato, Kaoru Imai, Kazuhiro Hane, and Yoshiaki Kanamori,
"Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment,"
Journal of Vacuum Science & Technology B, vol. 39, Article number: 030602 (2021).

https://doi.org/10.1116/6.0000971

2021年04月23日