Ying Huang, Atsuki Kosugi, Yuya Naito, Yuma Takida, Hiroaki Minamide, Kazuhiro Hane and Yoshiaki Kanamori,
"Improvement in THz light extraction efficiencies with antireflection subwavelength gratings on a silicon prism,"
Japanese Journal of Applied Physics, vol. 60, no. SC, Article number: SCCL04 (2021).

https://doi.org/10.35848/1347-4065/abe995