東北大学Tohoku University
Mechanics ofMaterials System
Tohmyoh Lab
Japanese
© 2019-Tohmyoh Laboratory
Holiday Inn Singapore Atrium(Singapore), 2/27~28/2025
「Acoustic resonant imaging technique for characterization of photoresist properties depending on hard bake temperature」
Hyelin Kim, Hironori Tohmyoh
No. B3.2