東北大学Tohoku University
Mechanics ofMaterials System
Tohmyoh Lab
Japanese
© 2019-Tohmyoh Laboratory
Toyama International Conference Center(Toyama-shi),11/13~15/2023
「Effect of baking conditions on acoustic properties of photoresist film」
Hyelin Kim, Hironori Tohmyoh
No. 2P2-1