{"id":566,"date":"2022-01-21T10:55:11","date_gmt":"2022-01-21T01:55:11","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=566"},"modified":"2026-01-20T14:27:19","modified_gmt":"2026-01-20T05:27:19","slug":"nano","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/nano","title":{"rendered":"\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/sirc\/facilities\/floor1f\">1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/a><\/li><li><a href=\"\/sirc\/facilities\/floor2f\">2F<\/a><\/li><li><a href=\"\/sirc\/facilities\/floor3f\">3F<\/a><\/li><li><a href=\"\/sirc\/facilities\/nano\">\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df<\/h2>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\">\n<p class=\"pc-block\">\u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<div class=\"wp-block-image pc-block\">\n<form class=\"tooltips\" name=\"form1\">\n<input type=\"text\" name=\"field1\">\n<\/form>\n<figure class=\"aligncenter size-full\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map4-ja.png\" alt=\"\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df\" usemap=\"#ImageMap\"><\/figure>\n<map name=\"ImageMap\">\n\t<area shape=\"rect\" coords=\"701,373,782,453\" href=\"\/sirc\/facilities\/equipment02#equipment02-07\" alt=\"1 Plasma CNT-CVD\" onmouseover=\"disp(' Plasma CNT-CVD ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"484,156,644,252\" href=\"\/sirc\/facilities\/equipment07#equipment07-17\" alt=\"2 UHV-STM &amp; 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AFM<\/a><\/li>\n\t<li><span>3<\/span><a href=\"\/sirc\/facilities\/equipment07#equipment07-06\">ESCA<\/a><\/li>\n\t<li><span>4<\/span><a href=\"\/sirc\/facilities\/equipment07#equipment07-16\">SPM (Shimazu, 9500J2)<\/a><\/li>\n\t<li><span>5<\/span><a href=\"\/sirc\/facilities\/equipment07#equipment07-15\">Olympus SPM<\/a><\/li>\n\t<li><span>6<\/span><a href=\"\/sirc\/facilities\/equipment10#equipment10-04\">Micro vibration measurement system<\/a><\/li>\n\t<li><span>10<\/span><a href=\"\/sirc\/facilities\/equipment01#equipment01-04\">Simple photo-mask maker(MM605AT)<\/a><\/li>\n\t<li><span>11<\/span><a href=\"\/sirc\/facilities\/equipment02#equipment02-29\">2inch RF magnetron sputter(Ulvac)<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 2F 3F \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df \u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 1Plasma CNT-CVD 2UHV-STM &amp; AFM 3ES [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/nano\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"og:description\" content=\"\u76ee\u6b21 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 2F 3F \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df \u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 1Plasma CNT-CVD 2UHV-STM &amp; 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