{"id":14,"date":"2021-12-17T16:16:28","date_gmt":"2021-12-17T07:16:28","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=14"},"modified":"2026-04-01T09:41:00","modified_gmt":"2026-04-01T00:41:00","slug":"results","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/results","title":{"rendered":"\u5229\u7528\u4e8b\u4f8b\u30fb\u7814\u7a76\u6210\u679c"},"content":{"rendered":"

\u6210\u679c\u767a\u8868\u6642\u306e\u304a\u9858\u3044<\/h2>\n\n\n\n

\u6210\u679c\u767a\u8868\u306e\u969b\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u4f8b\u6587\u3092\u53c2\u8003\u306b\u3001\u8b1d\u8f9e\u3092\u8a18\u8f09\u3057\u3066\u3044\u305f\u3060\u304d\u307e\u3059\u3088\u3046\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002<\/p>\n\n\n\n

(\u4f8b) A part of this study was performed at the Micro\/Nano-machining Research Education Center (SIRC) of Tohoku University.<\/p>\n\n\n\n

\u96fb\u5b50\u30b9\u30d4\u30f3\u78c1\u6c17\u5171\u9cf4\u529b\u9855\u5fae\u93e1\u3092\u7528\u3044\u305f3\u6b21\u5143\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0<\/h2>\n\n\n\n
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\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\u306e\u5fae\u5c0f\u8a66\u6599\u306b\u5bfe\u3057\u3066\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u5206\u89e3\u80fd\u3067\u96fb\u5b50\u30b9\u30d4\u30f3\uff08\u30e9\u30b8\u30ab\u30eb\uff09\u306e\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u3092\u53ef\u80fd\u306b\u3059\u308b\u8d85\u5c0f\u578b3D
MRI\u6280\u8853\u3092\u958b\u767a\u3057\u305f\u3002\u3053\u308c\u307e\u3067\u306e\u78c1\u6c17\u5171\u9cf4\u529b\u9855\u5fae\u93e1\u306b\u304a\u3051\u308b\u9577\u6642\u9593\u306e\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u554f\u984c\u3092\u89e3\u6c7a\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u9ad8\u611f\u5ea6\u3068\u5e83\u7bc4\u56f2\u306a\u8a08\u6e2c\u3092\u4e21\u7acb\u3059\u308b\u8d85\u5c0f\u578b3D MRI\u306e\u958b\u767a\u306b\u3064\u306a\u304c\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u308b\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nEB \u63cf\u753b\u88c5\u7f6e\u3001FAB\u3001Mask aligner (SUSS)\u3001ICP-RIE #2<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nMasaya Toda and Takahito Ono, \u201cThree-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature,\u201d Journal of Magnetic Resonance 330, 107045 (2021).
\nhttps:\/\/doi.org\/10.1016\/j.jmr.2021.107045<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u958b\u53e3\u3068\u5fae\u7c92\u5b50\u6355\u6349\u69cb\u9020\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u6d41\u8def\u306e\u8a55\u4fa1<\/h2>\n\n\n\n
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\u6db2\u4f53\u4e2d\u306e\u5fae\u5c0f\u4f53\u3092\u96fb\u5b50\u9855\u5fae\u93e1\u3067\u89b3\u5bdf\u3067\u304d\u308b\u3088\u3046\u3001\u8584\u3044Si\u7a93\u3092\u6301\u3064\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30f3\u30cd\u30eb\u3092\u4f5c\u88fd\u3057\u305f\u3082\u306e\u3067\u3042\u308b\u3002\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30cd\u30eb\u5185\u90e8\u306b\u30dd\u30fc\u30eb\u72b6\u306e\u5fae\u5c0f\u4f53\u30c8\u30e9\u30c3\u30d7\u69cb\u9020\u3092\u8a2d\u3051\u3066\u304a\u308a\u3001\u9175\u6bcd\u7d30\u80de\u3084\u30e9\u30c6\u30c3\u30af\u30b9\u7c92\u5b50\u306e\u89b3\u5bdf\u306b\u6210\u529f\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nMask aligner (SUSS)\u3001CCP-RIE #1\u3001RF magnetron sputter (Shibaura) #2\u3001\u96fb\u89e3\u3081\u3063\u304d\u88c5\u7f6e\u3001\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u30df\u30ea\u30f3\u30b0\u88c5\u7f6e\u3001ICP-RIE #2\u3001\u71b1\u96fb\u5b50SEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nMasaya Toda, Hideki Hayashi, Nguyen van Toan, Naoki Inomata, and Takahito Ono, \u201cEvaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures,\u201d Journal of Microelectromechanical Systems 30(4), 560\u2013568 (2021).
\nhttps:\/\/ieeexplore.ieee.org\/document\/9431372<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u9ad8\u6027\u80fd\u30b9\u30fc\u30d1\u30fc\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u305f\u3081\u306e\u96fb\u92f3\u9178\u5316\u30de\u30f3\u30ac\u30f3\u3092\u6709\u3059\u308b\u5782\u76f4\u914d\u5411\u30b0\u30e9\u30d5\u30a7\u30f3<\/h2>\n\n\n\n
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SiO2\u4fdd\u8b77\u819c\u3092\u65bd\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u3001\u5782\u76f4\u914d\u5411\u30b0\u30e9\u30d5\u30a7\u30f3\uff08VG\uff09\u3068MnO2\u304b\u3089\u306a\u308b\u30b9\u30fc\u30d1\u30fc\u30ad\u30e3\u30d1\u30b7\u30bf\u96fb\u6975\u3092\u5408\u6210\u3057\u305f\u3002VG\/SiO2\/Si\u3068MnO2\/VG\u9593\u306e\u5f37\u3044\u7d50\u5408\u306b\u3088\u308a\u3001\u521d\u671f\u72b6\u614b\u306b\u5bfe\u3059\u308b5000\u30b5\u30a4\u30af\u30eb\u5f8c\u306e\u30ad\u30e3\u30d1\u30b7\u30bf\u6027\u80fd\u306f99.29 %\u3067\u3042\u308a\u3001\u512a\u308c\u305f\u5b89\u5b9a\u6027\u3092\u793a\u3057\u3066\u3044\u308b\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\n\u30d7\u30e9\u30ba\u30de\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9CVD<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nHongtao Sui, Nguyen Van Toan, and Takahito Ono, \u201cVertically-oriented graphene electrodeposited with MnO2 on native SiO2\/Si for high-performance supercapacitor electrodes,\u201d Journal of Electroanalytical Chemistry 895, 115507 (2021).
\nhttps:\/\/doi.org\/10.1016\/j.jelechem.2021.115507<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u30d1\u30ea\u30ec\u30f3\u30b9\u30d7\u30ea\u30f3\u30b0\u3068\u57cb\u8fbc\u307f\u78c1\u77f3\u3092\u7528\u3044\u305f\u78c1\u6c17\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf<\/h2>\n\n\n\n
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\u5c0f\u578b\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u306f\u30b9\u30de\u30db\u306e\u624b\u30d6\u30ec\u9632\u6b62\u306b\u6709\u671b\u3067\u3042\u308b\u304c\u3001\u5909\u4f4d\u304c\u5c0f\u3055\u3044\u3068\u3044\u3046\u8ab2\u984c\u304c\u3042\u308b\u3002\u305d\u3053\u3067\u3001\u525b\u6027\u306e\u4f4e\u3044\u30d1\u30ea\u30ec\u30f3\u30b9\u30d7\u30ea\u30f3\u30b0\u3068\u78c1\u77f3\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u5927\u5909\u4f4d\u53ef\u80fd\u306a\u78c1\u6c17\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u4f5c\u88fd\u3057\u305f\u3002\u4f5c\u88fd\u3057\u305f\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u306f\u5909\u4f4d200 \u00b5m\u3092\u5b9f\u73fe\u3067\u304d\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\n\u829d\u6d66\u30b9\u30d1\u30c3\u30bf\u3001\u30d1\u30ea\u30ec\u30f3\u30b3\u30fc\u30bf\u3001ICP-RIE #3<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nHuayu Wang, Masashi Matsuura, Shusuke Yamada, Satoshi Sugimoto and Shuji Tanaka, \u201cTemperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator,\u201d J. Micromech. Microeng. (2021) 075002 (10pp), May. 2021, pp. 1\u201310.
\nhttps:\/\/doi.org\/10.1088\/1361-6439\/abfeb3<\/a>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

MEMS\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u3092\u7528\u3044\u305f\u30c6\u30e9\u30d8\u30eb\u30c4\u5e2f\u30c1\u30e5\u30fc\u30ca\u30d6\u30eb\u30d5\u30a3\u30eb\u30bf<\/h2>\n\n\n\n
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\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u306e\u69cb\u6210\u8981\u7d20\u3092\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u306b\u3088\u308a\u53ef\u5909\u3068\u3059\u308b\u3053\u3068\u3067\u3001\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u306e\u793a\u3059\u7279\u7570\u306a\u5149\u5b66\u7279\u6027\u3068\u52d5\u7684\u306a\u30c1\u30e5\u30fc\u30ca\u30d3\u30ea\u30c6\u30a3\u3092\u4e21\u7acb\u3057\u305f\u300cMEMS\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u300d\u3092\u5b9f\u73fe\u3067\u304d\u308b\u3002\u30c6\u30e9\u30d8\u30eb\u30c4\u5e2f\u3067\u5fdc\u7b54\u3059\u308b\u96fb\u78c1\u8a98\u8d77\u900f\u660e\u5316\uff08EIT: Electromagnetically Induced Transparency\uff09\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u7d44\u307f\u8fbc\u307f\u3001EIT\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u3092\u69cb\u6210\u3059\u308b\u53cc\u6975\u5b50\u3068\u56db\u91cd\u6975\u5b50\u306e\u9593\u306e\u30ae\u30e3\u30c3\u30d7\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u3001\u900f\u904e\u7387\u53ef\u5909\u30c1\u30e5\u30fc\u30ca\u30d6\u30eb\u30d5\u30a3\u30eb\u30bf\u3092\u958b\u767a\u3057\u305f\u3002\u6b21\u4e16\u4ee3\u7121\u7dda\u901a\u4fe1\uff08Beyond 5G\/6G\uff09\u3092\u62c5\u3046\u30c6\u30e9\u30d8\u30eb\u30c4\u6ce2\u5236\u5fa1\u3078\u306e\u5fdc\u7528\u304c\u671f\u5f85\u3055\u308c\u308b\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\n\u30ec\u30fc\u30b6\u63cf\u753b\u88c5\u7f6e\u3001Mask aligner (SUSS)\u3001RF magnetron sputter (Shibaura)\u3001ICP-RIE<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nY. Huang, K. Nakamura, Y. Takida, H. Minamide, K. Hane, and Y. Kanamori, \u201cActively tunable THz filter based on an electromagnetically induced transparency analog hybridized with a MEMS metamaterial,\u201d Scientific Reports 10, 20807 (2020).
\nhttps:\/\/doi.org\/10.1038\/s41598-020-77922-1<\/a>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u53ef\u52d5\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u3092\u7528\u3044\u305f\u5149\u5b66\u529b\u899a\u30bb\u30f3\u30b5<\/h2>\n\n\n\n
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\u91d1\u5c5e\u2013\u8a98\u96fb\u4f53\u2013\u91d1\u5c5e\uff08MIM: Metal\u2013Insulator\u2013Metal\uff09\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u3092\u69cb\u6210\u3059\u308b\u8a98\u96fb\u4f53\u5c64\u3092\u30a8\u30a2\u30ae\u30e3\u30c3\u30d7\u3068\u3059\u308b\u3068\u3001\u529b\u306b\u3088\u3063\u3066\u8a98\u96fb\u4f53\u5c64\u306e\u539a\u307f\u304c\u5909\u5316\u3059\u308b\u300c\u53ef\u52d5\u30e1\u30bf\u30de\u30c6\u30ea\u30a2\u30eb\u300d\u3092\u69cb\u6210\u3067\u304d\u308b\u3002\u53cd\u5c04\u30b9\u30da\u30af\u30c8\u30eb\u306b\u898b\u3089\u308c\u308b\u5171\u9cf4\u30d4\u30fc\u30af\u30b7\u30d5\u30c8\u3092\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u3067\u3001\u30c0\u30a4\u30a2\u30d5\u30e9\u30e0\u4e0a\u306b\u52a0\u308f\u308b\u529b\u3092\u8a08\u6e2c\u53ef\u80fd\u306a\u5149\u5b66\u529b\u899a\u30bb\u30f3\u30b5\u3092\u958b\u767a\u3057\u305f\u3002\u3053\u306e\u30bb\u30f3\u30b5\u306f\u5f93\u6765\u306e\u30d5\u30a1\u30d6\u30ea\u30fb\u30da\u30ed\u30fc\u5e72\u6e09\u5f0f\u306e\u5149\u5b66\u529b\u899a\u30bb\u30f3\u30b5\u3088\u308a\u3082\u9ad8\u611f\u5ea6\u306a\u30bb\u30f3\u30b5\u3092\u5b9f\u73fe\u3067\u304d\u308b\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nEB \u63cf\u753b\u88c5\u7f6e\u3001EB\u84b8\u7740\u3001\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u30df\u30ea\u30f3\u30b0\u3001\u9ad8\u5206\u89e3\u80fdSEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\n\nT. Okatani, S. Sekiguchi, K. Hane, and Y. Kanamori, \u201cSurface-plasmon-coupled optical force sensors based on metal\u2013insulator\u2013metal metamaterials with movable air gap,\u201d Scientific Reports 10, 14807 (2020).
\nhttps:\/\/doi.org\/10.1038\/s41598-020-71825-x<\/a>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u5148\u7aef\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306b\u3088\u308b\u9ad8\u96c6\u7a4d\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30fb\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306e\u958b\u767a<\/h2>\n\n\n\n
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\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3001\u96c6\u7a4d\u5ea6\u3001\u67d4\u8edf\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u3001\u5727\u7e2e\u6210\u578b\u3092\u57fa\u76e4\u3068\u3059\u308b\u30d5\u30a1\u30f3\u30a2\u30a6\u30c8\u30a6\u30a8\u30cf\u30ec\u30d9\u30eb\u30d1\u30c3\u30b1\u30fc\u30b8\uff08FOWLP\uff09\u6280\u8853\u3092\u7528\u3044\u3001\u7570\u7a2e\u30c7\u30d0\u30a4\u30b9\u306e\u30c1\u30c3\u30d7\u30ec\u30c3\u30c8\u3092\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u306b\u5185\u8535\u3057\u305f\u30d8\u30c6\u30ed\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u95a2\u3059\u308b\u7814\u7a76\u306b\u53d6\u308a\u7d44\u3093\u3060\u3002\u672c\u7814\u7a76\u3067\u306f\u3001\u5149\u96fb\u5f0f\u5bb9\u7a4d\u8108\u6ce2(PPG)\u306b\u3088\u308bSpO2\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3092\u76ee\u7684\u3068\u3057\u3066\u3001\u5fae\u5c0f\u306a\u30c1\u30c3\u30d7\u306e\u9ad8\u7cbe\u5ea6\u30a2\u30bb\u30f3\u30d6\u30ea\u3092\u5b9f\u73fe\u3057\u3001\u03bcLED\u3068\u99c6\u52d5\u56de\u8def\u3001\u30d5\u30a9\u30c8\u30c0\u30a4\u30aa\u30fc\u30c9\u306a\u3069\u3092PDMS\u306b\u96c6\u7a4d\u3059\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nMask aligner (SUSS)\u3001\u30d1\u30ea\u30ec\u30f3\u84b8\u7740\u88c5\u7f6e\u3001\u30ec\u30fc\u30b6\u63cf\u753b\u88c5\u7f6e\u3001\u9ad8\u5206\u89e3\u80fd SEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nT. Fukushima, Y. Susumago, Z. Qian, C. Shima, B. Du, N. Takahashi, S. Nagata, T. Odashima, H. Kino, and T. Tanaka, \u201cSignificant Die-Shift Reduction and \u03bc LED Integration Based on Die-First Fan-Out Wafer-Level Packaging for Flexible Hybrid Electronics,\u201d IEEE Trans. Components, Packag. Manuf. Technol., vol. 10, no. 8, pp. 1419\u20131422, Aug. 2020.
\nhttps:\/\/doi.org\/10.1109\/TCPMT.2020.3009640<\/a>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u30b9\u30d1\u30a4\u30ad\u30f3\u30b0\u30cb\u30e5\u30fc\u30e9\u30eb\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u306b\u5411\u3051\u305f\u795e\u7d4c\u6a5f\u80fd\u3092\u518d\u73fe\u3059\u308b\u534a\u5c0e\u4f53\u30e1\u30e2\u30ea\u306e\u958b\u767a<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

\u30b9\u30d1\u30a4\u30ad\u30f3\u30b0\u30cb\u30e5\u30fc\u30e9\u30eb\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u3092\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u4e0a\u3067\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u306f\u795e\u7d4c\u7d30\u80de\u6a5f\u80fd\u3092\u518d\u73fe\u53ef\u80fd\u306a\u7d20\u5b50\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u672c\u7814\u7a76\u3067\u306f\u5927\u5bb9\u91cf\u3068\u4f4e\u96fb\u5727\u52d5\u4f5c\u306e\u4e21\u7acb\u3092\u53ef\u80fd\u3068\u3059\u308b\u4e0d\u63ee\u767a\u6027\u30c8\u30f3\u30cd\u30ebFET\u30e1\u30e2\u30ea\u3092\u4f5c\u88fd\u3057\u3001\u795e\u7d4c\u7d30\u80de\u6a5f\u80fd\u306e\u4e00\u3064\u3067\u3042\u308b\u30b9\u30d1\u30a4\u30af\u30bf\u30a4\u30df\u30f3\u30b0\u4f9d\u5b58\u53ef\u5851\u6027\u3092\u518d\u73fe\u53ef\u80fd\u3067\u3042\u308b\u3053\u3068\u3092\u793a\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nEB \u63cf\u753b\u88c5\u7f6e\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3001ICP-RIE #1\u3001JEOL-SEM\u3001\u71b1\u9178\u5316\u7089\u3001\u6c34\u7d20\u30a2\u30cb\u30fc\u30eb\u7089\u3001LP-CVD\u3001\u30d7\u30e9\u30ba\u30de SiN-CVD\u3001RTA #1\u3001\u4e8c\u5468\u6ce2\u52b1\u8d77 RIE\u3001\u4ed6<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nH. Kino, T. Fukushima, and T. Tanaka, \u201cGeneration of STDP With Non-Volatile Tunnel-FET Memory for Large-Scale and Low-Power Spiking Neural Networks,\u201d IEEE J. Electron Devices Soc., vol. 8, no. July, pp. 1266\u20131271, Mar. 2020.
\nhttps:\/\/doi.org\/10.1109\/JEDS.2020.3025336<\/a>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u30d7\u30e9\u30ba\u30e2\u30cb\u30c3\u30af\u30ab\u30e9\u30fc\u30d5\u30a3\u30eb\u30bf\u3092\u7528\u3044\u305f\u5c0f\u578b\u5206\u5149\u5668<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

\u91d1\u5c5e\u30ca\u30ce\u69cb\u9020\u3092\u5229\u7528\u3057\u305f\u300c\u30d7\u30e9\u30ba\u30e2\u30cb\u30c3\u30af\u30ab\u30e9\u30fc\u30d5\u30a3\u30eb\u30bf\u300d\u306f\u3001\u69d8\u3005\u306a\u8272\u7279\u6027\u306e\u30d5\u30a3\u30eb\u30bf\u3092\u50c5\u304b\u6570\u5341\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u539a\u3055\u3067\u4e00\u62ec\u5f62\u6210\u3067\u304d\u308b\u306a\u3069\u3001\u8272\u7d20\u5438\u53ce\u3092\u7528\u3044\u305f\u5f93\u6765\u306e\u30ab\u30e9\u30fc\u30d5\u30a3\u30eb\u30bf\u306b\u306f\u7121\u3044\u69d8\u3005\u306a\u5229\u70b9\u3092\u6709\u3059\u308b\u3002\u30d7\u30e9\u30ba\u30e2\u30cb\u30c3\u30af\u30ab\u30e9\u30fc\u30d5\u30a3\u30eb\u30bf\u3092\u30d5\u30a9\u30c8\u30c0\u30a4\u30aa\u30fc\u30c9\u30a2\u30ec\u30a4\u4e0a\u306b\u4f5c\u88fd\u3059\u308b\u3053\u3068\u3067\u3001\u5f93\u6765\u306e\u5206\u5149\u5668\u3088\u308a\u6841\u9055\u3044\u306b\u5c0f\u3055\u304f\u3001\u6307\u5148\u306b\u4e57\u308b\u307b\u3069\u306e\u5927\u304d\u3055\u306e\u5c0f\u578b\u5206\u5149\u5668\u3092\u958b\u767a\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\n\u30ec\u30fc\u30b6\u63cf\u753b\u88c5\u7f6e\u3001EB \u63cf\u753b\u88c5\u7f6e\u3001Mask aligner (SUSS)\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3001RTA\u3001TEOS CVD\u3001RF magnetron sputter\u3001EB\u84b8\u7740\u3001FAB\u3001\u9ad8\u5206\u89e3\u80fdSEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nY. Kanamori, D. Ema, and K. Hane, \u201cMiniature spectroscopes with two-dimensional guided-mode resonant metal grating filters integrated on a photodiode array,\u201d Materials 11, 1924 (2018).
\nhttps:\/\/doi.org\/10.3390\/ma11101924<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u5358\u4e00\u7d30\u80de\u306e\u71b1\u8a08\u6e2c\u306b\u5411\u3051\u305f\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c1\u30c3\u30d7\u5185\u3067\u306e\u771f\u7a7a\u5c01\u6b62\u5171\u632f\u5b50\u3092\u7528\u3044\u305f\u8d85\u9ad8\u611f\u5ea6\u6e29\u5ea6\u30bb\u30f3\u30b5<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

\u30ac\u30e9\u30b9\u88fd\u306e\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c1\u30c3\u30d7\u5185\u306b\u3001\u6d41\u8def\u306e\u307f\u3067\u306a\u304f\u3001Si\u88fd\u306e\u30de\u30a4\u30af\u30ed\u6a5f\u68b0\u632f\u52d5\u5b50(\u5171\u632f\u6e29\u5ea6\u30bb\u30f3\u30b5)\u3092\u4f5c\u308a\u8fbc\u307f\uff0c\u6eb6\u6db2\u4e2d\u306e\u5fae\u5c0f\u4f53\u306e\u6e29\u5ea6\u8a08\u6e2c\u3092\u884c\u3046\u30c7\u30d0\u30a4\u30b9\u3067\u3042\u308b\u3002\u5171\u632f\u6e29\u5ea6\u30bb\u30f3\u30b5\u5074\u306e\u30ad\u30e3\u30d3\u30c6\u30a3\u306f\u6d41\u8def\u3068\u5e72\u6e09\u3059\u308b\u3053\u3068\u306a\u304f\u771f\u7a7a\u5f15\u304d\u3082\u53ef\u80fd\u3067\u3042\u308b\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nMask aligner (SUSS)\u3001ICP-RIE #2\u3001\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u30a2\u30ca\u30e9\u30a4\u30b6<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nNaoki Inomata, Masaya Toda, and Takahito Ono, \u201cHighly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells,\u201d Lab on a Chip 16, 3597\u20133603 (2016).
\nhttps:\/\/doi.org\/10.1039\/C6LC00949B<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

MEMS\u99c6\u52d5\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u3092\u7528\u3044\u305f\u5149\u30b9\u30a4\u30c3\u30c1<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

\u300c\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u300d\u306f\u6b21\u4e16\u4ee3\u5149\u901a\u4fe1\u3092\u62c5\u3046\u5149\u56de\u8def\u306e\u8981\u7d20\u6280\u8853\u3067\u3042\u308b\u3002\u30b7\u30ea\u30b3\u30f3\u5c0e\u6ce2\u8def\u3092\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u306b\u3088\u3063\u3066\u99c6\u52d5\u3057\u3001\u30de\u30a4\u30af\u30ed\u30c7\u30a3\u30b9\u30af\u5171\u632f\u5668\u3068\u306e\u5149\u7d50\u5408\u52b9\u7387\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u3001\u5149\u901a\u4fe1\u7d4c\u8def\u3092\u5207\u308a\u66ff\u3048\u308b\u5149\u30b9\u30a4\u30c3\u30c1\u3092\u958b\u767a\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nEB \u63cf\u753b\u88c5\u7f6e\u3001FAB\u3001\u9ad8\u5206\u89e3\u80fdSEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nY. Kanamori, Y. Sato, and K. Hane, \u201cFabrication of silicon microdisk resonators with movable waveguides for Control of Power Coupling Ratio,\u201d Japanese Journal of Applied Physics 52, 06GL19 (2013).
\nhttps:\/\/doi.org\/10.7567\/JJAP.52.06GL19<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

STT-MRAM\u30c1\u30c3\u30d7\u306e\u4e09\u6b21\u5143\u7a4d\u5c64<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

STT-MRAM\u30b9\u30d4\u30f3\u6ce8\u5165\u78c1\u5316\u53cd\u8ee2\uff08spin transfer torque\uff1aSTT\uff09\u3068\u547c\u3076\u30c7\u30fc\u30bf\u66f8\u304d\u63db\u3048\u6280\u8853\u3092\u7528\u3044\u305f\u78c1\u6c17\u62b5\u6297\u5909\u5316\u578b\u30e1\u30e2\u30ea\u3067\u3042\u308b\u304c\u3001\u8010\u71b1\u6027\u304c\u4f4e\u3044\u3068\u3044\u3046\u8ab2\u984c\u304c\u3042\u308b\u3002\u672c\u7814\u7a76\u3067\u306f\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u71b1\u8ca0\u8377\u3092\u6291\u5236\u3059\u308b\u3053\u3068\u3067Si\u8cab\u901a\u914d\u7dda(Through Si Via: TSV)\u3092\u7528\u3044\u305fSTT-MRAM\u3092\u6709\u3059\u308b\u96c6\u7a4d\u56de\u8def\u30c1\u30c3\u30d7\u306e\u4e09\u6b21\u5143\u7a4d\u5c64\u5316\u306b\u6210\u529f\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\n\u30d7\u30e9\u30ba\u30de\/\u30aa\u30be\u30f3TEOS CVD\u3001EVG Bonder\u3001JEOL-SEM\u3001ICP-RIE #2<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nT. Tanaka, H. Kino, R. Nakazawa, K. Kiyoyama, H. Ohno, and M. Koyanagi, \u201cUltrafast parallel reconfiguration of 3D-stacked reconfigurable spin logic chip with on-chip SPRAM (SPin-transfer torque RAM),\u201d in 2012 Symposium on VLSI Technology (VLSIT), Jun. 2012, pp. 169\u2013170.
\nhttps:\/\/doi.org\/10.1109\/VLSIT.2012.6242515<\/a><\/td>\n<\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n

\u30d5\u30a9\u30c8\u30cb\u30c3\u30af\u7d50\u6676\u3092\u7528\u3044\u305f\u5149\u901a\u4fe1\u7528\u53cd\u5c04\u7387\u53ef\u5909\u30d5\u30a3\u30eb\u30bf<\/h2>\n\n\n\n
\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

\u300c\u30d5\u30a9\u30c8\u30cb\u30c3\u30af\u7d50\u6676\u300d\u306f\u5149\u6ce2\u9577\u7a0b\u5ea6\u306e\u5fae\u7d30\u5468\u671f\u69cb\u9020\u3067\u3001\u5149\u3092\u906e\u65ad\u30fb\u9589\u3058\u8fbc\u3081\u308b\u6a5f\u80fd\u3092\u6301\u3064\u3002\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3067\u30d5\u30a9\u30c8\u30cb\u30c3\u30af\u7d50\u6676\u3092\u9ad8\u7cbe\u5ea6\u306b\u4f4d\u7f6e\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u3001\u30ca\u30ce\u5149\u5171\u632f\u5668\u306e\u5149\u7d50\u5408\u52b9\u7387\u3092\u5236\u5fa1\u3057\u3001\u5149\u906e\u65ad\u7279\u6027\u3092\u5236\u5fa1\u3059\u308b\u53cd\u5c04\u7387\u53ef\u5909\u30d5\u30a3\u30eb\u30bf\u3092\u958b\u767a\u3057\u305f\u3002<\/p>\n\n\n\n\n\n\n
\u5229\u7528\u88c5\u7f6e<\/th>\nEB \u63cf\u753b\u88c5\u7f6e\u3001RF magnetron sputter (Shibaura)\u3001FAB\u3001\u9ad8\u5206\u89e3\u80fdSEM<\/td>\n<\/tr>\n
\u8ad6\u6587<\/th>\nY. Kanamori, T. Kitani, and K. Hane, \u201cControl of guided resonance in a photonic crystal slab using microelectromechanical actuators,\u201d Applied Physics Letters 90, 031911 (2007).
\nhttps:\/\/doi.org\/10.1063\/1.2431452<\/a><\/td>\n<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"

\u6210\u679c\u767a\u8868\u6642\u306e\u304a\u9858\u3044 \u6210\u679c\u767a\u8868\u306e\u969b\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u4f8b\u6587\u3092\u53c2\u8003\u306b\u3001\u8b1d\u8f9e\u3092\u8a18\u8f09\u3057\u3066\u3044\u305f\u3060\u304d\u307e\u3059\u3088\u3046\u304a\u9858\u3044\u3044\u305f\u3057\u307e\u3059\u3002 (\u4f8b) A part of this study was performed at the Micro\/Nano […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"\n\u5229\u7528\u4e8b\u4f8b\u30fb\u7814\u7a76\u6210\u679c | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/sirc\/results\" \/>\n<meta property=\"og:locale\" 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