{"id":562,"date":"2022-01-21T10:53:53","date_gmt":"2022-01-21T01:53:53","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=562"},"modified":"2026-02-17T10:15:40","modified_gmt":"2026-02-17T01:15:40","slug":"floor3f","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/floor3f","title":{"rendered":"3F"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"\/sirc\/facilities\/floor1f\">1F Cleanroom<\/a><\/li><li><a href=\"\/sirc\/facilities\/floor2f\">2F<\/a><\/li><li><a href=\"\/sirc\/facilities\/floor3f\">3F<\/a><\/li><li><a href=\"\/sirc\/facilities\/nano\">Nanomachining Facility<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>3F<\/h2>\n\n\n\n<p class=\"pc-block\">You can check the corresponding device by clicking the number in the image.<\/p>\n<div class=\"wp-block-image pc-block\">\n<form name=\"form1\" class=\"tooltips\">\n<input type=\"text\" name=\"field1\">\n<\/form>\n<figure class=\"aligncenter size-full\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map3-en.png\" alt=\"3F\" usemap=\"#ImageMap\"><\/figure>\n<map name=\"ImageMap\">\n\t<area shape=\"rect\" coords=\"7,17,35,71\" href=\"\/sirc\/facilities\/equipment06#equipment06-10\" alt=\"1 Grinding machine(NVG-200A)\" onmouseover=\"disp('Grinding machine')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"69,5,102,73\" href=\"\/sirc\/facilities\/equipment06#equipment06-09\" alt=\"2 Polishing machine(1PM52)\" onmouseover=\"disp('Polishing machine')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"133,7,185,34\" href=\"\/sirc\/facilities\/equipment06#equipment06-03\" alt=\"3 Flip chip bonder #1\" onmouseover=\"disp('Flip chip bonder #1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"161,186,194,227\" href=\"\/sirc\/facilities\/equipment10#equipment10-08\" alt=\"4 Bonding tester\" onmouseover=\"disp('Bonding tester')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"48,315,91,382\" href=\"\/sirc\/facilities\/equipment06#equipment06-07\" alt=\"6 Laser dicer\" onmouseover=\"disp('Laser dicer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"113,64,153,104\" href=\"\/sirc\/facilities\/equipment07#equipment07-04\" alt=\"7 IR inspection camera\" onmouseover=\"disp('IR inspection camera')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"161,146,194,187\" href=\"\/sirc\/facilities\/equipment10#equipment10-07\" alt=\"8 Tension and compression fatigue tester\" onmouseover=\"disp('Tension and compression fatigue tester')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"65,159,107,186\" href=\"\/sirc\/facilities\/equipment07#experiment_no9\" alt=\"9 Contact angle meter(DMe201)\" onmouseover=\"disp('Contact angle meter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"66,187,105,215\" href=\"\/sirc\/facilities\/equipment07#experiment_no10\" alt=\"10 Microscope(KH-7700)\" onmouseover=\"disp('Microscope')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"67,214,105,245\" href=\"\/sirc\/facilities\/equipment07#experiment_no11\" alt=\"11 Table top SEM(JCM-500)\" onmouseover=\"disp('Table top SEM')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"160,226,194,255\" href=\"\/sirc\/facilities\/equipment07#experiment_no12\" alt=\"12 Gas Chromatograph#1(GC-14B)\" onmouseover=\"disp('Gas Chromatograph#1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"162,256,194,284\" href=\"\/sirc\/facilities\/equipment07#experiment_no13\" alt=\"13 Gas Chromatograph#2(GC-2014AF)\" onmouseover=\"disp('Gas Chromatograph#2 ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"7,148,42,179\" href=\"\/sirc\/facilities\/equipment10#experiment_no14\" alt=\"14 Vibration Testing Machine(SW2015)\" onmouseover=\"disp('Vibration Testing Machine')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"8,220,44,253\" href=\"\/sirc\/facilities\/equipment10#experiment_no15\" alt=\"15 Double-Scan High Accuracy Laser Profiler(LT-9500)\" onmouseover=\"disp('Double-Scan High Accuracy Laser Profile')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"7,251,43,284\" href=\"\/sirc\/facilities\/equipment10#experiment_no16\" alt=\"16 Laser Displacement Sensor#1(LK-G5000V)\" onmouseover=\"disp('Laser Displacement Sensor#1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"7,283,44,310\" href=\"\/sirc\/facilities\/equipment10#experiment_no17\" alt=\"17 Laser Displacement Sensor#2(LK-G5000)\" onmouseover=\"disp('Laser Displacement Sensor#2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"66,245,106,274\" href=\"\/sirc\/facilities\/equipment09#experiment_no18\" alt=\"18 Network Analyzer(E5071C)\" onmouseover=\"disp('Network Analyzer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"106,160,147,187\" href=\"\/sirc\/facilities\/equipment11#experiment_no19\" alt=\"19 3D printer(X-Max 3D)\" onmouseover=\"disp('3D printer')\" onmouseout=\"disp('')\" class=\"target\">\n\n\t<area shape=\"rect\" coords=\"179,505,210,541\" href=\"\/sirc\/facilities\/equipment11#equipment11-02\" alt=\"1 Drill press\" onmouseover=\"disp('Drill press')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"102,575,136,613\" href=\"\/sirc\/facilities\/equipment11#equipment11-04\" alt=\"2 Circuit board plotter\" onmouseover=\"disp('Circuit board plotter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"140,576,169,614\" href=\"\/sirc\/facilities\/equipment11#equipment11-01\" alt=\"3 Lathe\" onmouseover=\"disp('Lathe')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"179,575,211,613\" href=\"\/sirc\/facilities\/equipment11#equipment11-03\" alt=\"4 Milling machine\" onmouseover=\"disp('Milling machine')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"145,484,172,515\" href=\"\/sirc\/facilities\/equipment11#electrical_no5\" alt=\"5 3D Milling Machine(MDX-50)\" onmouseover=\"disp('3D Milling Machine(MDX-50)')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"144,515,172,543\" href=\"\/sirc\/facilities\/equipment11#electrical_no6\" alt=\"6 3D Milling Machine(MDX-20)\" onmouseover=\"disp('3D Milling Machine(MDX-20)')\" onmouseout=\"disp('')\" class=\"target\">\n<\/map>\n<\/div>\n<div class=\"wp-block-image sp-block\">\n<figure class=\"aligncenter size-full\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map3-en.png\" alt=\"3F\"><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\">\n<h4>3F experiment room<\/h4>\n\n\n\n<ul class=\"nolist bg-yellow\">\n\t<li><span>1<\/span><a href=\"\/sirc\/en\/facilities\/equipment06#equipment06-10\">Grinding machine<\/a><\/li>\n\t<li><span>2<\/span><a href=\"\/sirc\/en\/facilities\/equipment06#equipment06-09\">Polishing machine<\/a><\/li>\n\t<li><span>3<\/span><a href=\"\/sirc\/en\/facilities\/equipment06#equipment06-03\">Flip chip bonder #1<\/a><\/li>\n\t<li><span>4<\/span><a href=\"\/sirc\/en\/facilities\/equipment10#equipment10-08\">Bonding tester<\/a><\/li>\n\t<li><span>6<\/span><a href=\"\/sirc\/en\/facilities\/equipment06#equipment06-07\">Laser dicer<\/a><\/li>\n\t<li><span>7<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#equipment07-04\">IR inspection camera<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/sirc\/en\/facilities\/equipment10#equipment10-07\">Tension and compression fatigue tester<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#experiment_no9\">Contact angle meter(DMe201)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#experiment_no10\">Microscope(KH-7700)<\/a><\/li>\n\t<li><span>11<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#experiment_no11\">Table top SEM(JCM-500)<\/a><\/li>\n\t<li><span>12<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#experiment_no12\">Gas Chromatograph#1(GC-14B)<\/a><\/li>\n\t<li><span>13<\/span> <a href=\"\/sirc\/en\/facilities\/equipment07#experiment_no13\">Gas Chromatograph#2(GC-2014AF)<\/a><\/li>\n\t<li><span>14<\/span> <a href=\"\/sirc\/en\/facilities\/equipment10#experiment_no14\">Vibration Testing Machine(SW2015)<\/a><\/li>\n\t<li><span>15<\/span> <a href=\"\/sirc\/en\/facilities\/equipment10#experiment_no15\">Double-Scan High Accuracy Laser Profiler(LT-9500)<\/a><\/li>\n\t<li><span>16<\/span> <a href=\"\/sirc\/en\/facilities\/equipment10#experiment_no16\">Laser Displacement Sensor#1(LK-G5000V)<\/a><\/li>\n\t<li><span>17<\/span> <a href=\"\/sirc\/en\/facilities\/equipment10#experiment_no17\">Laser Displacement Sensor#2(LK-G5000)<\/a><\/li>\n\t<li><span>18<\/span> <a href=\"\/sirc\/en\/facilities\/equipment09#experiment_no18\">Network Analyzer(E5071C)<\/a><\/li>\n\t<li><span>19<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#experiment_no19\">3D printer(X-Max 3D)<\/a><\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<h4>Electrical experiment room<\/h4>\n\n\n\n<ul class=\"nolist bg-blue\">\n\t<li><span>1<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#equipment11-02\">Drill press<\/a><\/li>\n\t<li><span>2<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#equipment11-04\">Circuit board plotter<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#equipment11-01\">Lathe<\/a><\/li>\n\t<li><span>4<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#equipment11-03\">Milling machine<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#electrical_no5\">3D Milling Machine(MDX-50)<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/sirc\/en\/facilities\/equipment11#electrical_no6\">3D Milling Machine(MDX-20)<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents 1F Cleanroom 2F 3F Nanomachining Facility 3F You can check the corresponding device by click [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>3F | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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