{"id":151,"date":"2022-01-12T10:53:52","date_gmt":"2022-01-12T01:53:52","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=151"},"modified":"2026-01-20T14:00:54","modified_gmt":"2026-01-20T05:00:54","slug":"equipment10","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment10","title":{"rendered":"Mechanical measurement"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment01\">Lithography\/exposure\/drawing equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment02\">Film formation\/deposition<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment03\">Film processing\/etching<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment04\">Synthesis, heat treatment, doping<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment05\">Surface treatment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment06\">Bonding, polishing, packaging<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment07\">Shape\/morphology observation, analysis<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment08\">Sample preparation equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment09\">Electrical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment10\">Mechanical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment11\">Others<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Mechanical measurement<\/h2>\n\n\n\n<h3 id=\"equipment10-01\">Thin film characterization system<\/h3>\n\n\n\n<div class=\"wp-container-33 wp-block-columns\">\n<div class=\"wp-container-31 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt.jpg\" alt=\"Thin film characterization systemt\" class=\"wp-image-2195\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-32 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Elionix (ENT-5)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Purpose<\/th><td>Measurement of hardness, elastic modulus, and other properties of thin films, extreme surfaces, and micro-regions<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>\u03c650 \u00d7 t3.5mm or smaller<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Hardness measurement of thin films<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main Specifications<\/th><td>High-load unit: 5\u00b5N &#8211; 2N, Low-load unit: 0.5\u00b5N &#8211; 10mN, Indenter: Berkovich(\u03b1 =65.03\u00b0)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-02\">High-frequency laser doppler vibrometer<\/h3>\n\n\n\n<div class=\"wp-container-36 wp-block-columns\">\n<div class=\"wp-container-34 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-4.jpg\" alt=\"High-frequency laser doppler vibrometer\" class=\"wp-image-868\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-35 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Polytech (UHF-120)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Several 100 MHz-plane vibration measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4 inch (preferably about \u25a120 mm)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measurement of surface acoustic waves excited by SAW elements.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Measurement range: 2\u20131200 MHz (preferably 50\u2013800 MHz), Planar resolution: 1 <span class=\"unit_micro\">\u03bc<\/span>m\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Wear safety glasses when using laser (532 nm, 5 mW, Class 3R)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-03\">Microsystem Analyzer(MSA-500,MSA-400)<\/h3>\n\n\n\n<div class=\"wp-container-39 wp-block-columns\">\n<div class=\"wp-container-37 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/05-4.jpg\" alt=\"Microsystem Analyzer(MSA-500,MSA-400)\" class=\"wp-image-875\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/05-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/05-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-38 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Polytec (MSA-400, MSA-500)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>In-plane vibration measurement, out-of-plane vibration measurement, surface shape measurement\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>By objective lens.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Resonance frequency measurement of out-of-plane vibration, vibration observation of in-plane vibration, surface shape observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Laser Doppler vibrometer, stroboscope video microscope, white light interference meter\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-04\">Micro vibration measurement system<\/h3>\n\n\n\n<div class=\"wp-container-42 wp-block-columns\">\n<div class=\"wp-container-40 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"Micro vibration measurement system\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-41 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>ManufacturerName (model)<\/th><td>Neoarc (MLD-350)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Simultaneous out-of-plane vibration measurement at two points, maximum 1.5 MHz\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum 20 mm (depending on objective angle and objective lens)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Out-of-plane vibration 2 Difference measurement in point simultaneous measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Laser Doppler vibrometer\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-07\">Tension and compression fatigue tester<\/h3>\n\n\n\n<div class=\"wp-container-45 wp-block-columns\">\n<div class=\"wp-container-43 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/04-7.jpg\" alt=\"Tension and compression fatigue tester\" class=\"wp-image-892\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/04-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/04-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-44 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Zwick (Zwickline Z0.5TN)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application (features)<\/th><td>Compressive tensile test\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum 85 \u00d7 50 mm\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Acquisition of stress strain curve.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Maximum load: 500 N, Speed: 0.5 <span class=\"unit_micro\">\u03bc<\/span>m\/min\u20132000 mm\/min, Resolution: 0.083 <span class=\"unit_micro\">\u03bc<\/span>m, Position accuracy: \u00b1 2 <span class=\"unit_micro\">\u03bc<\/span>m, Measurement accuracy: 2 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-08\">Bonding tester<\/h3>\n\n\n\n<div class=\"wp-container-48 wp-block-columns\">\n<div class=\"wp-container-46 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-8.jpg\" alt=\"Bonding tester\" class=\"wp-image-901\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-8.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-8-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-47 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name(Model)<\/th><td>RHESCA (PTR-1101)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>For evaluation of bonding force failure of wafer bonding\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>The bonding area is preferably 5 mm<sup>2<\/sup>&nbsp;or less (maximum share weight 100 kg)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Bonding area 1 mm<sup>2<\/sup>&nbsp;of Au-Au thermocompression bonding joint and Si-Si direct joint in.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Sensor weight range: Share: 100 gf\u2013100 kgf, Pull push: 20 gf\u201320 kgf\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no14\">Vibration Testing Machine(SW2015)<\/h3>\n\n\n\n<div class=\"wp-container-51 wp-block-columns\">\n<div class=\"wp-container-49 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/floor_img\/sw2015.jpg\" alt=\"Vibration Testing Machine(SW2015)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-50 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name(Model)<\/th><td>ASAHI SEISAKUSYO &#8211; SW2015<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Generate vibartion (Sine wave, random wave)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>5 &#8211; 20kHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>&lt; 1 Kg<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Energy harvester test<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no15\">Double-Scan High Accuracy Laser Profiler(LT-9500)<\/h3>\n\n\n\n<div class=\"wp-container-54 wp-block-columns\">\n<div class=\"wp-container-52 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/floor_img\/lt-9500.jpg\" alt=\"Double-Scan High Accuracy Laser Profiler(LT-9500)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-53 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name(Model)<\/th><td>Keyence LT-9500 LT-9010<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Wafer warpage measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>&lt; 300 \u00b5m warpage<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Residue stress measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no16\">Laser Displacement Sensor#1(LK-G5000V)<\/h3>\n\n\n\n<div class=\"wp-container-57 wp-block-columns\">\n<div class=\"wp-container-55 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/floor_img\/lk-g5000v.jpg\" alt=\"Laser Displacement Sensor#1(LK-G5000V)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-56 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name(Model)<\/th><td>Keyence_LK-G5000V<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Vibration Energy harvesters evaluation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Vibration range: 1nm &#8211; 1mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Output power measurement, vibration displacement measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no17\">Laser Displacement Sensor#2(LK-G5000)<\/h3>\n\n\n\n<div class=\"wp-container-60 wp-block-columns\">\n<div class=\"wp-container-58 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/floor_img\/lk-g5000.jpg\" alt=\"Laser Displacement Sensor#2(LK-G5000)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-59 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name(Model)<\/th><td>Keyence_LK-G5000<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Vibration Energy harvesters evaluation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Vibration range: 1nm &#8211; 1mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Output power measurement, vibration displacement measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":20,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Mechanical measurement | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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