{"id":148,"date":"2022-01-12T10:53:08","date_gmt":"2022-01-12T01:53:08","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=148"},"modified":"2026-02-17T10:17:59","modified_gmt":"2026-02-17T01:17:59","slug":"equipment09","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment09","title":{"rendered":"Electrical measurement"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment01\">Lithography\/exposure\/drawing equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment02\">Film formation\/deposition<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment03\">Film processing\/etching<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment04\">Synthesis, heat treatment, doping<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment05\">Surface treatment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment06\">Bonding, polishing, packaging<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment07\">Shape\/morphology observation, analysis<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment08\">Sample preparation equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment09\">Electrical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment10\">Mechanical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/sirc\/facilities\/equipment11\">Others<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Electrical measurement<\/h2>\n\n\n\n<h3 id=\"equipment09-01\">4-probe resistivity meter<\/h3>\n\n\n\n<div class=\"wp-container-30 wp-block-columns\">\n<div class=\"wp-container-28 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-6.jpg\" alt=\"4-probe resistivity meter\" class=\"wp-image-882\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-6.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/07-6-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-29 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>KYOWARIKEN (K-705RS)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Electrical resistance measurement of conductive thin film<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23004 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Metal spattered on insulating film Sheet resistance measurement of thin film<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Measurement mode: Resistance (\u03a9), Sheet resistance (\u03a9\/\u25a1), Resistance (\u03a9\u2219cm)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment09-02\">Hall effect measurement<\/h3>\n\n\n\n<div class=\"wp-container-33 wp-block-columns\">\n<div class=\"wp-container-31 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/06-5.jpg\" alt=\"Hall effect measurement\" class=\"wp-image-885\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/06-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/06-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-32 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Self-made\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Judgment of conduction type, evaluation of carrier density, evaluation of mobility\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>\u25a18 mm\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measurement of mobility and carrier density of GaN and Si<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Measurable in a vacuum environment, stage Temperature: Maximum 400 K (Liquid nitrogen can be cooled by adiabatic expansion)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment09-04\">14GHZ Network Analyzer(E5063A)<\/h3>\n\n\n\n<div class=\"wp-container-36 wp-block-columns\">\n<div class=\"wp-container-34 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/10-5.jpg\" alt=\"14GHZ Network Analyzer(E5063A)\" class=\"wp-image-889\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/10-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/10-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-35 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Keysight (E5071C)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Resonant impedance characteristics, filter frequency characteristics, time domain characteristics, VSRW, etc.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Probe measurement: 20 mm \u25a1 to \u23004 inch, size does not matter for measurements other than prober\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>SAW device , BAR device resonator and filter impedance, filter characteristics, time domain characteristics, etc.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Upper limit 14 GHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Since the impedance is a comparison from 50 \u03a9, it is not possible to measure extremely small or large impedance values. There will be an error.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment09-09\">Wire bonder#1(L026-343)<\/h3>\n\n\n\n<div class=\"wp-container-39 wp-block-columns\">\n<div class=\"wp-container-37 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-6.jpg\" alt=\"Wire bonder#1(L026-343)\" class=\"wp-image-895\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-6.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/08-6-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-38 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>ManufacturerName (model)<\/th><td>West Bond (MODEL 7700C)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>About 2 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment09-10\">Wire bonder#2(HB16)<\/h3>\n\n\n\n<div class=\"wp-container-42 wp-block-columns\">\n<div class=\"wp-container-40 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/12-2.jpg\" alt=\"Wire bonder#2(HB16)\" class=\"wp-image-900\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/12-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/12-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-41 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>TPT (HB16)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Maximum generated force (load)<\/th><td>110 g<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Thin film temperature<\/th><td>250 \u2103\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Approximately 2 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no18\">Network Analyzer(E5071C)<\/h3>\n\n\n\n<div class=\"wp-container-45 wp-block-columns\">\n<div class=\"wp-container-43 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/floor_img\/e5071c.jpg\" alt=\"Network Analyzer(E5071C)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-44 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Agilent Technologies E5071C<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Frequency scanning<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Resonators evaluation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>9kHz &#8211; 4.5GHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"FSU\">Signal generator(FSU)<\/h3>\n\n\n\n<div class=\"wp-container-48 wp-block-columns\">\n<div class=\"wp-container-46 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"Signal generator(FSU)\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-47 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>rohde &amp; schwarz(FSU)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Spectrum analyzer<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>20Hz &#8211; 8GHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"FSU\">Spectrum analyzer(ZNB 8)<\/h3>\n\n\n\n<div class=\"wp-container-51 wp-block-columns\">\n<div class=\"wp-container-49 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"Spectrum analyzer(ZNB 8)\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-50 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>rohde &amp; schwarz\uff08ZNB 8\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Network analyzer<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>9kHz &#8211; 8.5GHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"ZGA5920\">Impedance analyzer(ZGA5920)<\/h3>\n\n\n\n<div class=\"wp-container-54 wp-block-columns\">\n<div class=\"wp-container-52 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"Impedance analyzer(ZGA5920)\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-53 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>NF &#8211; ZGA5920<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Impedance measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>impedance measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>1mHz &#8211; 10MHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":19,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Electrical measurement | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment09\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Electrical measurement | Facilities | Tohoku University Smart System Super Integration Research Center\" \/>\n<meta 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