{"id":136,"date":"2022-01-12T10:44:42","date_gmt":"2022-01-12T01:44:42","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=136"},"modified":"2026-01-20T14:19:01","modified_gmt":"2026-01-20T05:19:01","slug":"equipment04","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04","title":{"rendered":"Synthesis, heat treatment, doping"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"\/sirc\/facilities\/equipment01\">Lithography\/exposure\/drawing equipment<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment02\">Film formation\/deposition<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment03\">Film processing\/etching<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment04\">Synthesis, heat treatment, doping<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment05\">Surface treatment<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment06\">Bonding, polishing, packaging<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment07\">Shape\/morphology observation, analysis<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment08\">Sample preparation equipment<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment09\">Electrical measurement<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment10\">Mechanical measurement<\/a><\/li><li><a href=\"\/sirc\/facilities\/equipment11\">Others<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Synthesis, heat treatment, doping<\/h2>\n\n\n\n<h3 id=\"equipment04-04\">High-temp Oven<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/sirc\/wp-content\/uploads\/2024\/01\/equipment04-04.jpg\" alt=\"High-temp Oven\" class=\"wp-image-1917\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2024\/01\/equipment04-04.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2024\/01\/equipment04-04-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>ADVANTEC (DRD360DA)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Other<\/th><td>Temperature range 50\u2103\u2013650\u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment04-01\">Ion implantation<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/sirc\/wp-content\/uploads\/2022\/02\/28.jpg\" alt=\"Ion implantation\" class=\"wp-image-776\" srcset=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/28.jpg 480w, https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/02\/28-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)\n<\/th><td>ULVAC (IMX-3500)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application (ApplicationFeatures)<\/th><td>Injection of semiconductor dopant<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Ion species: B, P, As, Injection energy: 5\u2013150 keV\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23008 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":14,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"og:description\" content=\"table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04\" \/>\n<meta property=\"og:site_name\" content=\"Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:19:01+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04\",\"url\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04\",\"name\":\"Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/#website\"},\"datePublished\":\"2022-01-12T01:44:42+00:00\",\"dateModified\":\"2026-01-20T05:19:01+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"HOME\",\"item\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u8a2d\u5099\u30fb\u88c5\u7f6e\",\"item\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/\",\"name\":\"Tohoku University Smart System Super Integration Research Center\",\"description\":\"Venture Business Laboratory (VBL), the predecessor of Smart System Super Integration Research Center (SIRC), was established by a fund for creative research projects in the FY 1995 Supplementary Budget of the Japanese government.\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/sirc\/en\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04","og_locale":"en_US","og_type":"article","og_title":"Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center","og_description":"table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04","og_site_name":"Tohoku University Smart System Super Integration Research Center","article_modified_time":"2026-01-20T05:19:01+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/sirc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04","url":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04","name":"Synthesis, heat treatment, doping | Facilities | Tohoku University Smart System Super Integration Research Center","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/#website"},"datePublished":"2022-01-12T01:44:42+00:00","dateModified":"2026-01-20T05:19:01+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities\/equipment04#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"HOME","item":"https:\/\/web.tohoku.ac.jp\/sirc\/en"},{"@type":"ListItem","position":2,"name":"\u8a2d\u5099\u30fb\u88c5\u7f6e","item":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities"},{"@type":"ListItem","position":3,"name":"\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/#website","url":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/","name":"Tohoku University Smart System Super Integration Research Center","description":"Venture Business Laboratory (VBL), the predecessor of Smart System Super Integration Research Center (SIRC), was established by a fund for creative research projects in the FY 1995 Supplementary Budget of the Japanese government.","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/pages\/136"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/comments?post=136"}],"version-history":[{"count":44,"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/pages\/136\/revisions"}],"predecessor-version":[{"id":2378,"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/pages\/136\/revisions\/2378"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/wp-json\/wp\/v2\/media?parent=136"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}