{"id":12,"date":"2021-12-17T16:16:13","date_gmt":"2021-12-17T07:16:13","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=12"},"modified":"2026-01-20T14:34:55","modified_gmt":"2026-01-20T05:34:55","slug":"facilities","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/sirc\/en\/facilities","title":{"rendered":"Facilities"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul>\n\t\t<li><a href=\"#link01\">Floor map<\/a><\/li>\n\t\t<li><a href=\"#link02\">Common equipment<\/a><\/li>\n\t<\/ul><\/dd>\n<\/dl>\n\n\n\n<h2 id=\"link01\">Floor map<\/h2>\n<ul class=\"floor_list\">\n\t<li><a href=\"\/sirc\/facilities\/floor1f\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map1-en.png\" alt=\"\"><span>1F Cleanroom<\/span><\/a><\/li>\n\t<li><a href=\"\/sirc\/facilities\/floor2f\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map2-en.png\" alt=\"\"><span>2F<\/span><\/a><\/li>\n\t<li><a href=\"\/sirc\/facilities\/floor3f\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map3-en.png\" alt=\"\"><span>3F<\/span><\/a><\/li>\n\t<li><a href=\"\/sirc\/facilities\/nano\"><img src=\"\/sirc\/wp-content\/uploads\/2026\/01\/building-map4-en.png\" alt=\"\"><span>Nanomachining Facility<\/span><\/a><\/li>\n<\/ul>\n<p><a href=\"\/sirc\/facilities\/equipment07#equipment07-14\">Research Building\/Quantum Science and Energy Engineering- 2F student experiment room &#8211; XRD#1(D8 ADVANCE)<\/a><\/p>\n\n\n\n<h2 id=\"link02\">Common equipment<\/h2>\n<ul class=\"equipment_list\">\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment01\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/02-2-310x310.jpg\" alt=\"\"><\/div>Lithography\/exposure\/drawing equipment<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment02\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/11-1-310x310.jpg\" alt=\"\"><\/div>Film formation\/deposition<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment03\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/12-3-310x310.jpg\" alt=\"\"><\/div>Film processing\/etching<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment04\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/28-310x310.jpg\" alt=\"\"><\/div>Synthesis, heat treatment, doping<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment05\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/06-1-310x310.jpg\" alt=\"\"><\/div>Surface treatment<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment06\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/21-310x310.jpg\" alt=\"\"><\/div>Bonding, polishing, packaging<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment07\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/01-1-310x310.jpg\" alt=\"\"><\/div>Shape\/morphology observation, analysis<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment08\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/02-7-310x310.jpg\" alt=\"\"><\/div>Sample preparation equipment<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment09\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/07-6-310x310.jpg\" alt=\"\"><\/div>Electrical measurement<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment10\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/08-5-310x310.jpg\" alt=\"\"><\/div>Mechanical measurement<\/a><\/li>\n\t<li><a href=\"\/sirc\/en\/facilities\/equipment11\"><div><img src=\"\/sirc\/wp-content\/uploads\/2022\/02\/03-10-310x310.jpg\" alt=\"\"><\/div> Others <\/a><\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>table of contents Floor map Common equipment Floor map 1F Cleanroom 2F 3F Nanomachining Facility Research Buil [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This 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