{"id":93,"date":"2022-01-07T11:08:49","date_gmt":"2022-01-07T02:08:49","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=93"},"modified":"2026-01-20T14:23:47","modified_gmt":"2026-01-20T05:23:47","slug":"equipment01","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment01","title":{"rendered":"\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/h2>\n\n\n\n<h3 id=\"equipment01-01\">EB Lithograpy<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/02-2.jpg\" alt=\"EB Lithograpy\" class=\"wp-image-812\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u7a2e\u985e<\/th><td>EB\u63cf\u753b<\/td>\n\t<\/tr><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u65e5\u672c\u96fb\u5b50\uff08JBX-6300SK\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5149\u6e90<\/th><td>EB<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>50 nm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch, \u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment01-02\">Laser Lithography System #1<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/07.jpg\" alt=\"Laser Lithography System #1\" class=\"wp-image-771\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u7a2e\u985e<\/th><td>\u30ec\u30fc\u30b6\u63cf\u753b<\/td>\n\t<\/tr><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30cf\u30a4\u30c7\u30eb\u30d9\u30eb\u30b0\uff08DWL2000SD\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5149\u6e90<\/th><td>\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\uff08405 nm\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>0.6 <span class=\"unit_micro\">\u03bc<\/span>m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u25a19 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30de\u30a4\u30af\u30ed\u30de\u30b7\u30cb\u30f3\u30b0\u68df\u306b\u8a2d\u7f6e\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment01-04\">Simple photo-mask maker(MM605AT)<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/10-1.jpg\" alt=\"Simple photo-mask maker(MM605AT)\" class=\"wp-image-796\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u7a2e\u985e<\/th><td>1\/5\u7e2e\u5c0f\u9732\u5149\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u4f5c\u88fd\u6a5f\uff08OHP\u30de\u30b9\u30af\u539f\u7248\uff09\n<\/td>\n\t<\/tr><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30ca\u30ce\u30c6\u30c3\u30af\uff08MM605\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5149\u6e90<\/th><td>\u86cd\u5149\u706f\uff0830 W \u00d7 3\u672c\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>L\/S = 200 <span class=\"unit_micro\">\u03bc<\/span>m\u7a0b\u5ea6<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u64ae\u50cf\u5bf8\u6cd5\uff1a59.4 \u00d7 59.4 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30de\u30b9\u30af\uff1a\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8\u3067OHP\u30de\u30b9\u30af\u539f\u7248\u4f5c\u88fd\uff0f\u30a8\u30de\u30eb\u30b8\u30e7\u30f3\u30de\u30b9\u30af\u3001\u500d\u7387\uff1a0.2\u500d\u3001\u8996\u91ce\u5bf8\u6cd5\uff1a297 \u00d7 297 mm\u3001\u9732\u5149\u30bf\u30a4\u30de\uff1a99.9 s (0.1 s)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment01-06\">Mask aligner(SUSS, MA6\/BA6)#1,#2<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/08-1-1.jpg\" alt=\"Mask aligner(SUSS, MA6\/BA6)#1,#2\" class=\"wp-image-802\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-1-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-1-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u7a2e\u985e<\/th><td>\u30de\u30b9\u30af\u30a2\u30e9\u30a4\u30ca<\/td>\n\t<\/tr><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>SUSS microtec (MA6)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5149\u6e90<\/th><td>\u6c34\u9280\u30e9\u30f3\u30d7<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>1\u20132 <span class=\"unit_micro\">\u03bc<\/span>m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59276 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30de\u30b9\u30af\u30b5\u30a4\u30ba<\/th><td>2\u20137 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment01-07\">EVG Mask aligner<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/01-4.jpg\" alt=\"EVG Mask aligner\" class=\"wp-image-809\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u7a2e\u985e<\/th><td>\u30de\u30b9\u30af\u30a2\u30e9\u30a4\u30ca<\/td>\n\t<\/tr><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EV\u30b0\u30eb\u30fc\u30d7\uff08EVG620\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5149\u6e90<\/th><td>\u6c34\u9280\u30e9\u30f3\u30d7<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>1\u20132 <span class=\"unit_micro\">\u03bc<\/span>m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm\u20136 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30de\u30b9\u30af\u30b5\u30a4\u30ba<\/th><td>2\u20137 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30dc\u30f3\u30c9\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u53ef\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"yellow_no13\">Spray coater(Delta 80RC)<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/spray-coater.jpg\" alt=\"Spray coater(Delta 80RC)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>SUSS(Delta 80RC)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>8\u30a4\u30f3\u30c1\u4ee5\u4e0b\u304c\u53ef\u80fd<br>\n(8\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u4ee5\u5916\u306e\u30b5\u30f3\u30d7\u30eb\u306f\u30018\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u306b\u30ab\u30d7\u30c8\u30f3\u30c6\u30fc\u30d7\u3067\u8cbc\u308a\u4ed8\u3051\u3066\u5857\u5e03\u3092\u884c\u3046)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"yellow_no14\">Mask aligner#3(SUSS, MA8\/BA8)<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/mask-aligner3.jpg\" alt=\"Mask aligner#3(SUSS, MA8\/BA8)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<table>\n\t<tbody>\n\t<tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>SUSS MicroTec MA8\/BA8<\/td>\n\t<\/tr>\n<tr>\n\t\t<th>\u5149\u6e90<\/th><td>\u6c34\u9280\u30e9\u30f3\u30d7<br>(OSRAM HBO 1000W)<\/td>\n\t<\/tr>\n<tr>\n\t\t<th>\u89e3\u50cf\u5ea6<\/th><td>2\u00b5m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>2\/8\u30a4\u30f3\u30c1(\u30db\u30eb\u30c0\u30fc\u6240\u6709\u306e\u3082\u306e)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30de\u30b9\u30af\u30b5\u30a4\u30ba<\/th><td>3\/9\u30a4\u30f3\u30c1(\u30db\u30eb\u30c0\u30fc\u6240\u6709\u3042\u308a\u306e\u3082\u306e)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5c0f1\u30a4\u30f3\u30c1\uff5e\u6700\u59278\u30a4\u30f3\u30c1<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea61\u00b5m(\u516c\u79f0\u5024)<br>i\u7dda\u30d5\u30a3\u30eb\u30bf\u6709\u308a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no31\">Lift-off EQP(LOB8)<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/lift-off-eqp.jpg\" alt=\"Lift-off EQP(LOB8)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ASAP(LOM8-000-12)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>2\uff0c4\uff0c6\uff0c8\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30ec\u30b8\u30b9\u30c8\u9664\u53bb<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":10,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 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