{"id":556,"date":"2022-01-21T10:47:31","date_gmt":"2022-01-21T01:47:31","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=556"},"modified":"2026-01-20T14:33:33","modified_gmt":"2026-01-20T05:33:33","slug":"floor1f","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f","title":{"rendered":"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0"},"content":{"rendered":"<dl class=\"localnav\">\n<dt>\u76ee\u6b21<\/dt>\n<dd>\n<ul>\n<li><a href=\"\/mnc\/facilities\/floor1f\">1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/a><\/li>\n<li><a href=\"\/mnc\/facilities\/floor2f\">2F<\/a><\/li>\n<li><a href=\"\/mnc\/facilities\/floor3f\">3F<\/a><\/li>\n<li><a href=\"\/mnc\/facilities\/nano\">\u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df<\/a><\/li>\n<\/ul>\n<\/dd>\n<\/dl>\n\n\n\n<h2>1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/h2>\n\n\n\n<p class=\"pc-block\">\u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n<div class=\"wp-block-image pc-block\"><form class=\"tooltips\" name=\"form1\"><input name=\"field1\" type=\"text\"><\/form>\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map1-ja.png\" alt=\"1F\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\" usemap=\"#ImageMap\"><\/figure>\n<map name=\"ImageMap\"> \n\t<area alt=\"1 EVG mask aligner\" coords=\"9,31,42,77\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#equipment01-07\" onmouseover=\"disp('EVG mask aligner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"2 Megasonic Cleaner\" coords=\"43,31,82,77\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#equipment06-06\" onmouseover=\"disp('Megasonic Cleaner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"3 EVG Plasma Activator\" coords=\"82,31,120,78\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#equipment06-05\" onmouseover=\"disp('EVG Plasma Activator')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"4 Fume hood\" coords=\"121,30,191,78\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"5 Two-fluid cleaner\" coords=\"169,319,194,361\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment05#equipment05-02\" onmouseover=\"disp('Two-fluid cleaner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"6 Spin Coater\u3001Oven\" coords=\"8,105,44,245\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Spin Coater\u3001Oven')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"7 Laser Lithography System #1\" coords=\"103,157,192,255\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#equipment01-02\" onmouseover=\"disp('Laser Lithography System #1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"8 Mask aligner#1(SUSS, MA6\/BA6)\" coords=\"75,296,113,334\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#equipment01-06\" onmouseover=\"disp('Mask aligner#1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"9 Mask aligner (SUSS) #2\" coords=\"8,291,44,329\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#equipment01-06\" onmouseover=\"disp('Mask aligner#2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"10 HDMS treatment system\" coords=\"134,315,167,343\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment05#equipment05-03\" onmouseover=\"disp('HDMS treatment system')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"11 Spin Coater\" coords=\"31,345,137,372\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Spin Coater')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"13 Spray coater\" coords=\"6,249,42,286\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#yellow_no13\" onmouseover=\"disp('Spray coater')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"14 Mask aligner#3(SUSS, MA8\/BA8)\" coords=\"115,275,173,305\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#yellow_no14\" onmouseover=\"disp('Mask aligner#3')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"1 Fume hood\" coords=\"548,32,588,77\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"1 Fume hood\" coords=\"200,31,433,76\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"2 Thermal oxidation furnace\" coords=\"287,136,316,221\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-19\" onmouseover=\"disp('Thermal oxidation furnace')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"3 UV exposure\" coords=\"495,118,546,140\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment05#equipment05-01\" onmouseover=\"disp('UV exposure')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"4 4-probe resistivity meter\" coords=\"546,118,586,140\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment09#equipment09-01\" onmouseover=\"disp('4-probe resistivity meter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"5 ICP-RIE#3(Pegasus, MPX)\" coords=\"519,152,588,207\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-03\" onmouseover=\"disp('ICP-RIE#3')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"6 Asher for general use\" coords=\"465,211,502,250\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-15\" onmouseover=\"disp('Asher for general use')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"7 Plasma\/ozone TEOS CVD\" coords=\"269,231,300,292\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-06\" onmouseover=\"disp('Plasma\/ozone TEOS CVD')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"8 Plasme TEOS CVD\" coords=\"369,245,423,295\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-01\" onmouseover=\"disp('Plasme TEOS CVD')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"9 ICP-RIE#1(MUC21)\" coords=\"282,292,315,326\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-01\" onmouseover=\"disp('ICP-RIE#1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"10 Ellipsometer(UVISEL)\" coords=\"390,296,420,328\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment07#equipment07-09\" onmouseover=\"disp('Ellipsometer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"11 Plasma-enhanced SiN CVD\" coords=\"391,326,420,371\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-03\" onmouseover=\"disp('Plasma-enhanced SiN CVD ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"12 SiN etcher\" coords=\"286,365,316,394\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-10\" onmouseover=\"disp('SiN etcher')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"13 SiCN Cat-CVD\" coords=\"286,394,315,423\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-05\" onmouseover=\"disp('SiCN Cat-CVD')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"14 CCP-RIE #3\" coords=\"315,393,407,423\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-07\" onmouseover=\"disp('CCP-RIE #3')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"15 CCP-RIE #2\" coords=\"287,424,346,471\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-06\" onmouseover=\"disp('CCP-RIE #2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"16 Dual frequency RIE\" coords=\"347,425,408,472\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-09\" onmouseover=\"disp('Dual frequency RIE')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"17 EVG wafer bonder\uff08EV520)\" coords=\"203,355,234,385\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#equipment06-01\" onmouseover=\"disp('EVG wafer bonder')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"18 Supercritical CO2 drier\" coords=\"201,452,231,484\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment05#equipment05-04\" onmouseover=\"disp('Supercritical CO2 drier')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"19 ICP-RIE#2(MUC-21)\" coords=\"459,277,512,326\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-02\" onmouseover=\"disp('ICP-RIE#2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"20 CCP-RIE #1\" coords=\"460,341,529,375\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-05\" onmouseover=\"disp('CCP-RIE #1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"21 FAB\" coords=\"467,379,521,430\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-04\" onmouseover=\"disp('FAB')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"22 Ion beam milling\" coords=\"534,379,589,432\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment03#equipment03-08\" onmouseover=\"disp('Ion beam milling')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"23 Surface profilometer\" coords=\"598,372,642,396\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment07#equipment07-08\" onmouseover=\"disp('Surface profilometer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"24 Ion implantation\" coords=\"468,463,592,526\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment04#equipment04-01\" onmouseover=\"disp('Ion implantation')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"25 Wafer Bonder\" coords=\"374,136,405,214\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no25\" onmouseover=\"disp('Wafer Bonder')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"26 Wafer Aligner\" coords=\"323,135,368,196\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no26\" onmouseover=\"disp('Wafer Aligner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"27 Plasma cleaner\" coords=\"269,327,302,363\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no27\" onmouseover=\"disp('Plasma cleaner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"28 Plasma cleaner\" coords=\"246,184,282,228\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no28\" onmouseover=\"disp('Plasma cleaner')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"29 Flip chip bonder\" coords=\"643,414,685,483\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no29\" onmouseover=\"disp('Flip chip bonder')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"30 Excimer exposure\" coords=\"246,137,281,181\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment05#main_no30\" onmouseover=\"disp('Excimer exposure')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"31 Lift-off EQP\" coords=\"444,31,480,77\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#main_no31\" onmouseover=\"disp('Lift-off EQP')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"32 Anodic bonding\" coords=\"542,292,586,332\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#main_no32\" onmouseover=\"disp('Anodic bonding')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"1 EB Lithograpy\" coords=\"80,475,193,526\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment01#equipment01-01\" onmouseover=\"disp('EB Lithograpy')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"2 Scanning acoustic microscope\" coords=\"108,378,167,409\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment07#dark_no2\" onmouseover=\"disp('Scanning acoustic microscope')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"3 Contact angle meter\" coords=\"80,408,110,467\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment07#dark_no3\" onmouseover=\"disp('Contact angle meter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"1 High-temp RF magnetron sputter(SSP3000)\" coords=\"593,30,648,78\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-18\" onmouseover=\"disp('High-temp RF magnetron sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"2 DC sputter\" coords=\"649,30,703,78\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('DC sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"3 RF magnetron sputter(ANELVA#2,SPC-350UHV)\" coords=\"726,30,792,78\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-30\" onmouseover=\"disp('RF magnetron sputter\uff08ANELVA#2\uff09')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"4 Facing target RF sputter\" coords=\"646,124,684,155\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-13\" onmouseover=\"disp('Facing target RF sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"5 EB evaporation\" coords=\"684,124,724,156\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-20\" onmouseover=\"disp('EB evaporation')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"6 ECR ion beam sputter\uff08EIS-220\uff09\" coords=\"725,124,791,157\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-16\" onmouseover=\"disp('ECR ion beam sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"7 RF magnetron sputter(ANELVA#1,SPC-350)\" coords=\"660,157,711,189\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-17\" onmouseover=\"disp('RF magnetron sputter\uff08ANELVA#1\uff09')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"8 Facing target DC sputter\" coords=\"712,156,792,188\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-12\" onmouseover=\"disp('Facing target DC sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"9 Wafer bonder (Technofine)\" coords=\"662,216,735,271\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment06#equipment06-02\" onmouseover=\"disp('Wafer bonder')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"10 RF magnetron sputter(Shibaura#2,CFS-4ES)\" coords=\"665,273,717,300\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-10\" onmouseover=\"disp('RF magnetron sputter #2\uff08Shibaura#2\uff09')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"11 ECR sputter\" coords=\"623,336,674,363\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-15\" onmouseover=\"disp('ECR sputter')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"12 RF magnetron sputter(Shibaura#1,CFS-4ES)\" coords=\"675,336,725,363\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#equipment02-09\" onmouseover=\"disp('RF magnetron sputter\uff08Shibaura#1\uff09')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"13 Fume hood\" coords=\"762,285,791,365\" shape=\"rect\" href=\"\/mnc\/facilities\/\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area alt=\"14 AlN Sputtering\" coords=\"759,201,794,262\" shape=\"rect\" href=\"\/mnc\/facilities\/equipment02#metal_no14\" onmouseover=\"disp('AlN Sputtering')\" onmouseout=\"disp('')\" class=\"target\">\n<\/map>\n<\/div>\n<div class=\"wp-block-image sp-block\">\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map1-ja.png\" alt=\"1F\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\"><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-4 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\">\n<h4>\u30a4\u30a8\u30ed\u30fc\u30eb\u30fc\u30e0<\/h4>\n\n\n\n<ul class=\"nolist bg-yellow\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/facilities\/equipment01#equipment01-07\">EVG mask aligner<\/a><\/li>\n\t<li><span>2<\/span> <a href=\"\/mnc\/facilities\/equipment06#equipment06-06\">Megasonic Cleaner<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/facilities\/equipment06#equipment06-05\">EVG Plasma Activator<\/a><\/li>\n\t<li><span>4<\/span> Fume hood<\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/facilities\/equipment05#equipment05-02\">Two-fluid cleaner<\/a><\/li>\n\t<li><span>6<\/span> Spin Coater\u3001Oven<\/li>\n\t<li><span>7<\/span> <a href=\"\/mnc\/facilities\/equipment01#equipment01-02\">Laser Lithography System #1<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/mnc\/facilities\/equipment01#equipment01-06\">Mask aligner#1(SUSS, MA6\/BA6)<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/facilities\/equipment01#equipment01-06\">Mask aligner (SUSS) #2<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/facilities\/equipment05#equipment05-03\">HDMS treatment system<\/a><\/li>\n\t<li><span>11<\/span> Spin Coater<\/li>\n\t<li><span>13<\/span> <a href=\"\/mnc\/facilities\/equipment01#yellow_no13\">Spray coater<\/a><\/li>\n\t<li><span>14<\/span> <a href=\"\/mnc\/facilities\/equipment01#yellow_no14\">Mask aligner#3(SUSS, MA8\/BA8)<\/a><\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<h4>\u30e1\u30a4\u30f3\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/h4>\n\n\n\n<ul class=\"nolist bg-purple\">\n<li><span>1<\/span> Fume hood<\/li>\n\t<li><span>2<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-19\">Thermal oxidation furnace<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/facilities\/equipment05#equipment05-01\">UV exposure<\/a><\/li>\n\t<li><span>4<\/span> <a href=\"\/mnc\/facilities\/equipment09#equipment09-01\">4-probe resistivity meter<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-03\">ICP-RIE#3(Pegasus, MPX)<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-15\">Asher for general use<\/a><\/li>\n\t<li><span>7<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-06\">Plasma\/ozone TEOS CVD<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-01\">Plasme TEOS CVD<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-01\">ICP-RIE#1(MUC21)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/facilities\/equipment07#equipment07-09\">Ellipsometer(UVISEL)<\/a><\/li>\n\t<li><span>11<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-03\">Plasma-enhanced SiN CVD<\/a><\/li>\n\t<li><span>12<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-10\">SiN etcher<\/a><\/li>\n\t<li><span>13<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-05\">SiCN Cat-CVD<\/a><\/li>\n\t<li><span>14<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-07\">CCP-RIE #3<\/a><\/li>\n\t<li><span>15<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-06\">CCP-RIE #2<\/a><\/li>\n\t<li><span>16<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-09\">Dual frequency RIE<\/a><\/li>\n\t<li><span>17<\/span> <a href=\"\/mnc\/facilities\/equipment06#equipment06-01\">EVG wafer bonder\uff08EV520)<\/a><\/li>\n\t<li><span>18<\/span> <a href=\"\/mnc\/facilities\/equipment05#equipment05-04\">Supercritical CO2 drier<\/a><\/li>\n\t<li><span>19<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-02\">ICP-RIE#2(MUC-21)<\/a><\/li>\n\t<li><span>20<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-05\">CCP-RIE #1<\/a><\/li>\n\t<li><span>21<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-04\">FAB<\/a><\/li>\n\t<li><span>22<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-08\">Ion beam milling<\/a><\/li>\n\t<li><span>23<\/span> <a href=\"\/mnc\/facilities\/equipment07#equipment07-08\">Surface profilometer<\/a><\/li>\n\t<li><span>24<\/span> <a href=\"\/mnc\/facilities\/equipment04#equipment04-01\">Ion implantation<\/a><\/li>\n\t<li><span>25<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no25\">Wafer Bonder (EVG540)<\/a><\/li>\n\t<li><span>26<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no26\">Wafer Aligner (EVG SmartView NT)<\/a><\/li>\n\t<li><span>27<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no27\">Plasma cleaner (AQ-500T)<\/a><\/li>\n\t<li><span>28<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no28\">Plasma cleaner (ONTOS)<\/a><\/li>\n\t<li><span>29<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no29\">Flip chip bonder(FC3000W)<\/a><\/li>\n\t<li><span>30<\/span> <a href=\"\/mnc\/facilities\/equipment05#main_no30\">Excimer exposure<\/a><\/li>\n\t<li><span>31<\/span> <a href=\"\/mnc\/facilities\/equipment01#main_no31\">Lift-off EQP(LOB8)<\/a><\/li>\n\t<li><span>32<\/span> <a href=\"\/mnc\/facilities\/equipment06#main_no32\">Anodic bonding<\/a><\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-container-3 wp-block-column\">\n<h4>\u6697\u5ba4<\/h4>\n\n\n\n<ul class=\"nolist bg-blue\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/facilities\/equipment01#equipment01-01\">EB Lithograpy<\/a><\/li>\n\t<li><span>2<\/span> <a href=\"\/mnc\/facilities\/equipment07#dark_no2\">Scanning acoustic microscope (KSI)<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/facilities\/equipment07#dark_no3\">Contact angle meter(Kyowa)<\/a><\/li>\n<\/ul>\n\n\n\n<h4>\u91d1\u5c5e\u84b8\u7740\u5ba4<\/h4>\n\n\n\n<ul class=\"nolist bg-orange\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-18\">High-temp RF magnetron sputter(SSP3000)<\/a><\/li>\n\t<li><span>2<\/span> DC sputter<\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-30\">RF magnetron sputter(ANELVA#2,SPC-350UHV)<\/a><\/li>\n\t<li><span>4<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-13\">Facing target RF sputter<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-20\">EB evaporation<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-16\">ECR ion beam sputter\uff08EIS-220\uff09<\/a><\/li>\n\t<li><span>7<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-17\">RF magnetron sputter(ANELVA#1,SPC-350)<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-12\">Facing target DC sputter<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/facilities\/equipment06#equipment06-02\">Wafer bonder (Technofine)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-10\">RF magnetron sputter(Shibaura#2,CFS-4ES)<\/a><\/li>\n\t<li><span>11<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-15\">ECR sputter<\/a><\/li>\n\t<li><span>12<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-09\">RF magnetron sputter(Shibaura#1,CFS-4ES)<\/a><\/li>\n\t<li><span>13<\/span> Fume hood<\/li>\n\t<li><span>14<\/span> <a href=\"\/mnc\/facilities\/equipment02#metal_no14\">AlN Sputtering#1<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 2F 3F \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 \u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30a4\u30a8\u30ed\u30fc\u30eb\u30fc\u30e0 1 EVG mask aligner 2 Megason [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":1,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"og:description\" content=\"\u76ee\u6b21 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 2F 3F \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 \u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30a4\u30a8\u30ed\u30fc\u30eb\u30fc\u30e0 1 EVG mask aligner 2 Megason [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f\" \/>\n<meta property=\"og:site_name\" content=\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:33:33+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"4\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f\",\"name\":\"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\"},\"datePublished\":\"2022-01-21T01:47:31+00:00\",\"dateModified\":\"2026-01-20T05:33:33+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u30db\u30fc\u30e0\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Facilities\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/\",\"name\":\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"description\":\"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f","og_locale":"ja_JP","og_type":"article","og_title":"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","og_description":"\u76ee\u6b21 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 2F 3F \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u68df 1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 \u753b\u50cf\u5185\u756a\u53f7\u3092\u30af\u30ea\u30c3\u30af\u3059\u308b\u3068\u3001\u8a72\u5f53\u3059\u308b\u88c5\u7f6e\u3092\u78ba\u8a8d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30a4\u30a8\u30ed\u30fc\u30eb\u30fc\u30e0 1 EVG mask aligner 2 Megason [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f","og_site_name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","article_modified_time":"2026-01-20T05:33:33+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"4\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f","url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f","name":"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website"},"datePublished":"2022-01-21T01:47:31+00:00","dateModified":"2026-01-20T05:33:33+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/floor1f#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u30db\u30fc\u30e0","item":"https:\/\/web.tohoku.ac.jp\/mnc"},{"@type":"ListItem","position":2,"name":"Facilities","item":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities"},{"@type":"ListItem","position":3,"name":"1F \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website","url":"https:\/\/web.tohoku.ac.jp\/mnc\/","name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","description":"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/556"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/comments?post=556"}],"version-history":[{"count":62,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/556\/revisions"}],"predecessor-version":[{"id":2396,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/556\/revisions\/2396"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/media?parent=556"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}