{"id":151,"date":"2022-01-12T10:53:52","date_gmt":"2022-01-12T01:53:52","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=151"},"modified":"2026-01-20T14:00:54","modified_gmt":"2026-01-20T05:00:54","slug":"equipment10","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment10","title":{"rendered":"\u6a5f\u68b0\u8a08\u6e2c"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u6a5f\u68b0\u8a08\u6e2c<\/h2>\n\n\n\n<h3 id=\"equipment10-01\">Thin film characterization system<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt.jpg\" alt=\"Thin film characterization system\" class=\"wp-image-2195\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/thin_film_characterization_systemt-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a8\u30ea\u30aa\u30cb\u30af\u30b9\uff08ENT-5\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u8584\u819c\u3001\u6975\u8868\u9762\u3001\u5fae\u5c0f\u9818\u57df\u306e\u786c\u3055\u30fb\u5f3e\u6027\u7387\u306a\u3069\u306e\u6e2c\u5b9a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u03c650 \u00d7 t3.5mm \u4ee5\u4e0b<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>\u8584\u819c\u306e\u786c\u5ea6\u6e2c\u5b9a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u8377\u91cd\u7bc4\u56f2\uff1a\u9ad8\u8377\u91cd\u30e6\u30cb\u30c3\u30c8\uff1a5\u00b5N-2N\u3001\u4f4e\u8377\u91cd\u30e6\u30cb\u30c3\u30c8\uff1a0.5\u00b5N-10 mN\u3001\u5727\u5b50\uff1a\u30d0\u30fc\u30b3\u30d3\u30c3\u30c1\u03b1=65.03\u00b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-02\">High-frequency laser doppler vibrometer<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-4.jpg\" alt=\"High-frequency laser doppler vibrometer\" class=\"wp-image-868\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30dd\u30ea\u30c6\u30c3\u30af\uff08UHF-120\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u6570100 MHz\u9762\u5185\u632f\u52d5\u6e2c\u5b9a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4 inch\uff08\u25a120 mm\u7a0b\u5ea6\u304c\u597d\u307e\u3057\u3044\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>SAW\u7d20\u5b50\u3067\u52b1\u632f\u3055\u308c\u305f\u8868\u9762\u5f3e\u6027\u6ce2\u306e\u6e2c\u5b9a\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u6e2c\u5b9a\u7bc4\u56f2\uff1a2\u20131200 MHz\uff0850\u2013800 MHz\u304c\u597d\u307e\u3057\u3044\uff09\u3001\u5e73\u9762\u5206\u89e3\u80fd\uff1a1 <span class=\"unit_micro\">\u03bc<\/span>m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30ec\u30fc\u30b6\u30fc\uff08532 nm, 5 mW, Class 3R\uff09\u3001\u4f7f\u7528\u6642\u306f\u5b89\u5168\u30e1\u30ac\u30cd\u7740\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-03\">Microsystem Analyzer(MSA-500,MSA-400)<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-4.jpg\" alt=\"Microsystem Analyzer(MSA-500,MSA-400)\" class=\"wp-image-875\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Polytec (MSA-400, MSA-500)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u9762\u5185\u632f\u52d5\u8a08\u6e2c\u3001\u9762\u5916\u632f\u52d5\u8a08\u6e2c\u3001\u8868\u9762\u5f62\u72b6\u8a08\u6e2c<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u5bfe\u7269\u30ec\u30f3\u30ba\u306b\u3088\u308b\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>\u9762\u5916\u632f\u52d5\u306e\u5171\u632f\u5468\u6ce2\u6570\u8a08\u6e2c\u3001\u9762\u5185\u632f\u52d5\u306e\u632f\u52d5\u89b3\u5bdf\u3001\u8868\u9762\u5f62\u72b6\u89b3\u5bdf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30ec\u30fc\u30b6\u30c9\u30c3\u30d7\u30e9\u632f\u52d5\u8a08\u3001\u30b9\u30c8\u30ed\u30dc\u30b9\u30b3\u30fc\u30d7\u30d3\u30c7\u30aa\u9855\u5fae\u93e1\u3001\u767d\u8272\u5149\u5e72\u6e09\u8a08<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-04\">Micro vibration measurement system<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"\u5fae\u5c0f\u632f\u52d5\u8a08\u6e2c\u88c5\u7f6e\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30cd\u30aa\u30a2\u30fc\u30af\uff08MLD-350\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>2\u70b9\u540c\u6642\u9762\u5916\u632f\u52d5\u8a08\u6e2c\u3001\u6700\u59271.5 MHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u592720 mm\uff08\u5bfe\u7269\u89d2\u30fb\u5bfe\u7269\u30ec\u30f3\u30ba\u306b\u3088\u308b\u3002\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>\u9762\u5916\u632f\u52d5\u306e2\u70b9\u540c\u6642\u8a08\u6e2c\u306b\u304a\u3051\u308b\u5dee\u5206\u8a08\u6e2c<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30ec\u30fc\u30b6\u30fc\u30c9\u30c3\u30d7\u30e9\u632f\u52d5\u8a08<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-07\">Tension and compression fatigue tester<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-7.jpg\" alt=\"Tension and compression fatigue tester\" class=\"wp-image-892\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Zwick (Zwickline Z0.5TN)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>\u5727\u7e2e\u5f15\u5f35\u8a66\u9a13<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u592785 \u00d7 50 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>\u5fdc\u529b\u6b6a\u66f2\u7dda\u306e\u53d6\u5f97\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u6700\u5927\u8377\u91cd\uff1a500 N\u3001\u901f\u5ea6\uff1a0.5 <span class=\"unit_micro\">\u03bc<\/span>m\/min\u20132000 mm\/min\u3001\u5206\u89e3\u80fd\uff1a0.083 <span class=\"unit_micro\">\u03bc<\/span>m\u3001\u4f4d\u7f6e\u7cbe\u5ea6\uff1a\u00b12 <span class=\"unit_micro\">\u03bc<\/span>m\u3001\u6e2c\u5b9a\u7cbe\u5ea6\uff1a2 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment10-08\">Bonding tester<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-8.jpg\" alt=\"Bonding tester\" class=\"wp-image-901\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-8.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-8-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>RHESCA (PTR-1101)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30a6\u30a7\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u63a5\u5408\u529b\u7834\u58ca\u8a55\u4fa1\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u63a5\u5408\u9762\u7a4d\u306f5 mm<sup>2<\/sup>\u4ee5\u4e0b\u304c\u671b\u307e\u3057\u3044\uff08\u30b7\u30a7\u30a2\u6700\u5927\u52a0\u91cd100 kg\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>\u63a5\u5408\u9762\u7a4d1 mm<sup>2<\/sup>\u306b\u304a\u3051\u308bAu-Au\u71b1\u5727\u7740\u63a5\u5408\u30fbSi-Si\u76f4\u63a5\u63a5\u5408\u306e\u63a5\u5408\u30b7\u30a7\u30a2\u5f37\u5ea6\u306e\u8a55\u4fa1\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30bb\u30f3\u30b5\u52a0\u91cd\u7bc4\u56f2\uff1a\u30b7\u30a7\u30a2\uff1a100 gf\u2013100 kgf\u3001\u30d7\u30eb\u30fb\u30d7\u30c3\u30b7\u30e5\uff1a20 gf\u201320 kgf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no14\">Vibration Testing Machine(SW2015)<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/sw2015.jpg\" alt=\"Vibration Testing Machine(SW2015)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ASAHI SEISAKUSYO &#8211; SW2015<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Generate vibartion (Sine wave, random wave)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>5 &#8211; 20kHz<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>&lt; 1 Kg<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Energy harvester test<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no15\">Double-Scan High Accuracy Laser Profiler(LT-9500)<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/lt-9500.jpg\" alt=\"Double-Scan High Accuracy Laser Profiler(LT-9500)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Keyence LT-9500 LT-9010<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Wafer warpage measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>&lt; 300 \u00b5m warpage<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Residue stress measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no16\">Laser Displacement Sensor#1(LK-G5000V)<\/h3>\n\n\n\n<div class=\"wp-container-27 wp-block-columns\">\n<div class=\"wp-container-25 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/lk-g5000v.jpg\" alt=\"Laser Displacement Sensor#1(LK-G5000V)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-26 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Keyence_LK-G5000V<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Vibration Energy harvesters evaluation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>Vibration range: 1nm &#8211; 1mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Output power measurement, vibration displacement measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no17\">Laser Displacement Sensor#2(LK-G5000)<\/h3>\n\n\n\n<div class=\"wp-container-30 wp-block-columns\">\n<div class=\"wp-container-28 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/lk-g5000.jpg\" alt=\"Laser Displacement Sensor#2(LK-G5000)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-29 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Keyence_LK-G5000<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Vibration Energy harvesters evaluation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>Vibration range: 1nm &#8211; 1mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Output power measurement, vibration displacement measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d 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