{"id":142,"date":"2022-01-12T10:51:47","date_gmt":"2022-01-12T01:51:47","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=142"},"modified":"2026-01-20T14:15:14","modified_gmt":"2026-01-20T05:15:14","slug":"equipment06","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment06","title":{"rendered":"\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/h2>\n\n\n\n<h3 id=\"equipment06-01\">EVG wafer bonder\uff08EV520)<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/21.jpg\" alt=\"EVG wafer bonder\uff08EV520)\" class=\"wp-image-826\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/21.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/21-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EV\u30b0\u30eb\u30fc\u30d7 (EVG520)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>3500 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6<\/th><td>550 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>10\u2212<sup>2<\/sup>&nbsp;Pa<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>1200 V<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30dc\u30f3\u30c9\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u306f\u672c\u65bd\u8a2d\u5185\u306b\u8a2d\u7f6e\u3057\u3066\u3044\u308bEVG mask aligner\u3067\u53ef\u80fd<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-02\">Wafer bonder (Technofine)<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/09-4.jpg\" alt=\"Wafer bonder (Technofine)\" class=\"wp-image-831\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30c6\u30af\u30ce\u30d5\u30a1\u30a4\u30f3\uff08SG-560\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>10000 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6<\/th><td>350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>5 \u00d7 10\u2212<sup>3<\/sup>&nbsp;Pa<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>\u96fb\u5727\u5370\u52a0\u975e\u5bfe\u5fdc<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-03\">Flip chip bonder #1<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/04-3.jpg\" alt=\"Flip chip bonder #1\" class=\"wp-image-835\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u5b8c\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\uff08MODEL6000\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>5 kgf (49 N)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6<\/th><td>200 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>\u5927\u6c17\u5727\uff08N<sub>2<\/sub>\u30ac\u30b9\u30d5\u30ed\u30fc\u53ef\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>\u96fb\u5727\u5370\u52a0\u4e0d\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-04\">Flip chip bonder#2(M-90-10)<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/07-2.jpg\" alt=\"Flip chip bonder#2(M-90-10)\" class=\"wp-image-838\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Hisol (M-90)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u4e0a\uff1a\u25a110 mm\u3001\u4e0b\uff08\u30b9\u30c6\u30fc\u30b8\uff09\uff1a4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>5.5 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6<\/th><td>350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>\u5927\u6c17\u5727<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>\u96fb\u5727\u5370\u52a0\u4e0d\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-05\">EVG Plasma Activator<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/03-4.jpg\" alt=\"EVG Plasma Activator\" class=\"wp-image-841\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EV\u30b0\u30eb\u30fc\u30d7\uff08EVG810\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>6 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>1 Pa\u7a0b\u5ea6<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u4f4e\u6e29\u76f4\u63a5\u63a5\u5408\u306e\u70ba\u306e\u30b5\u30f3\u30d7\u30eb\u8868\u9762\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-06\">Megasonic Cleaner<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/02-3.jpg\" alt=\"Megasonic Cleaner\" class=\"wp-image-843\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EV\u30b0\u30eb\u30fc\u30d7\uff08EVG301\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>6 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>EVG\u30d7\u30e9\u30ba\u30de\u8868\u9762\u6d3b\u6027\u5316\u88c5\u7f6e\u3067\u306e\u51e6\u7406\u524d\u306b\u30b5\u30f3\u30d7\u30eb\u8868\u9762\u3092\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u6d17\u6d44\u3059\u308b\u7528\u9014\u3001\u30d6\u30e9\u30b7\u306b\u3088\u308b\u30b5\u30f3\u30d7\u30eb\u6d17\u6d44\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-07\">Laser dicer<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/09-5.jpg\" alt=\"Laser dicer\" class=\"wp-image-846\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c\u6a5f<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7279\u5fb4\u30fb\u7528\u9014<\/th><td>\u30ec\u30fc\u30b6\u3092\u7528\u3044\u305f\u30b9\u30c6\u30eb\u30b9\u30c0\u30a4\u30b7\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30ec\u30fc\u30b6\u4ed5\u69d8<br>\uff08\u767a\u632f\u5668\u3001\u6ce2\u9577\u3001\u51fa\u529b\u306a\u3069\uff09<\/th><td>\u30d1\u30eb\u30b9\u30d5\u30a1\u30a4\u30d0\u30ec\u30fc\u30b6\uff08SPI Lasers\u88fd\u3001\u6ce2\u9577\uff1a1064 nm\u3001\u51fa\u529b\uff1a12 W\uff09\u3001\u30d1\u30eb\u30b9\u30b0\u30ea\u30fc\u30f3\u30ec\u30fc\u30b6\uff08\u30e1\u30ac\u30aa\u30d7\u30c8\u88fd\u3001\u6ce2\u9577\uff1a532 nm\u3001\u51fa\u529b\uff1a&gt; 1.2 W (1 kHz\uff09, &nbsp;&gt; 3.5 W (10 kHz)\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u52a0\u5de5\u30b5\u30a4\u30ba<\/th><td>\u6700\u592725 \u00d7 25 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u52a0\u5de5\u5bfe\u8c61\u7269<\/th><td>\u30b7\u30ea\u30b3\u30f3\u3001\u30c6\u30f3\u30d1\u30c3\u30af\u30b9\u3001\u4ed6\uff08\u8981\u76f8\u8ac7\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u8a66\u6599\uff08Si\u7b49\uff09\u5185\u90e8\u306b\u30af\u30e9\u30c3\u30af\u5c64\u3092\u5f62\u6210\u3059\u308b\u3002\u30ec\u30fc\u30b6\u30c0\u30a4\u30b7\u30f3\u30b0\u3060\u3051\u3067\u306f\u30c1\u30c3\u30d7\u5316\u4e0d\u53ef\u3001\u5916\u90e8\u66f2\u3052\u5fdc\u529b\u304c\u5fc5\u8981\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-08\">Dicer<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/09-6.jpg\" alt=\"Dicer\" class=\"wp-image-848\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-6.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-6-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>DISCO (DAD3240)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30a6\u30a8\u30cf\u306e\u5207\u65ad\uff08Si\u3001\u30ac\u30e9\u30b9\u3001\u6c34\u6676\u3001\u30ea\u30c1\u30a6\u30e0\u30ca\u30a4\u30aa\u30d9\u30fc\u30c8\u7b49\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u2300152.4 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30c0\u30a4\u30b7\u30f3\u30b0\u30c6\u30fc\u30d7\u7b49\u3078\u306e\u8cbc\u308a\u4ed8\u3051\u5fc5\u9808<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-09\">Polishing machine(1PM52)<\/h3>\n\n\n\n<div class=\"wp-container-27 wp-block-columns\">\n<div class=\"wp-container-25 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/02-4.jpg\" alt=\"Polishing machine(1PM52)\" class=\"wp-image-853\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-26 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Logistech (PM5)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30a6\u30a7\u30cf\u306e\u7814\u78e8<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23004 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment06-10\">Grinding machine(NVG-200A)<\/h3>\n\n\n\n<div class=\"wp-container-30 wp-block-columns\">\n<div class=\"wp-container-28 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/01-6.jpg\" alt=\"Grinding machine(NVG-200A)\" class=\"wp-image-858\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-6.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-6-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-29 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30ca\u30ce\u30d5\u30a1\u30af\u30bf\u30fc\uff08NVG-200A\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u8a66\u6599\u306e\u8352\u524a\u308a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u56de\u8ee2\u6570\uff1a100\u2013600 rpm\u3001\u52a0\u5de5\u7cbe\u5ea6\uff1a10 <span class=\"unit_micro\">\u03bc<\/span>m<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>100 mm\u3001\u9ad8\u3055\uff1a20 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no25\">Wafer Bonder (EVG540)<\/h3>\n\n\n\n<div class=\"wp-container-33 wp-block-columns\">\n<div class=\"wp-container-31 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/evg540.jpg\" alt=\"Wafer Bonder (EVG540)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-32 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EVG540<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30a6\u30a7\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>8\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u300112\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>60000N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6<\/th><td>550\u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>1E-06 mbar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>3\u03c6200V\uff0c100A<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>12\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf \/ \u6700\u5927\u52a0\u71b1550\u2103 \u3067\u306e\u6700\u5927\u51fa\u529b: 27.1kW<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no26\">Wafer Aligner (EVG SmartView NT)<\/h3>\n\n\n\n<div class=\"wp-container-36 wp-block-columns\">\n<div class=\"wp-container-34 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/evg-smartview-nt.jpg\" alt=\"Wafer Aligner (EVG SmartView NT)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-35 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>EVG SmartViewNT<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30a6\u30a7\u30cf\u30a2\u30e9\u30a4\u30ca\u30fc<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>8\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u300112\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>1\u03c6200V\uff0c16A<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no27\">Plasma cleaner (AQ-500T)<\/h3>\n\n\n\n<div class=\"wp-container-39 wp-block-columns\">\n<div class=\"wp-container-37 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/aq-500t.jpg\" alt=\"Plasma cleaner (AQ-500T)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-38 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>AQ-500T<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30d7\u30e9\u30ba\u30de\u6d3b\u6027\u5316<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>8\u30a4\u30f3\u30c1\u25a1\u4ee5\u5185<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>5Pa<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>300W\u307e\u3067<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30d7\u30e9\u30ba\u30de\u30bd\u30fc\u30b9\nH<sub>2<\/sub>O\uff0cAr\uff0cO<sub>2<\/sub>\uff0cN<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no28\">Plasma cleaner (ONTOS)<\/h3>\n\n\n\n<div class=\"wp-container-42 wp-block-columns\">\n<div class=\"wp-container-40 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/plasma-cleaner_ontos.jpg\" alt=\"Plasma cleaner (ONTOS)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-41 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>OntosTT Stand Alone Atmospheric Plasma Systems<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u3084\u30a6\u30a7\u30cf\u306e\u8868\u9762\u6d3b\u6027\u5316<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>5mm\u25a1\u30c1\u30c3\u30d7\u304b\u308912\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf\u307e\u3067<br>\n\u57fa\u677f\u539a\u307f\u306f20mm\u307e\u3067<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30c1\u30e3\u30f3\u30d0\u771f\u7a7a\u5ea6<\/th><td>\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u5370\u52a0\u96fb\u5727<\/th><td>13.56 MHz\uff0c200W\u307e\u3067<br>\n\uff08\u5165\u529b1\u03c6100V\uff0c10A\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30d7\u30e9\u30ba\u30de\u30bd\u30fc\u30b9\nAr\/H<sub>2<\/sub>\uff0895\/5\uff09\uff0cAr\uff0cO<sub>2<\/sub>\uff0cN<sub>2<\/sub><br>\n\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u5236\u5fa1\u306eX-Y-Z\u30b9\u30c6\u30fc\u30b8\u306b\u3088\u308a\u51e6\u7406<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no29\">Flip chip bonder(FC3000W)<\/h3>\n\n\n\n<div class=\"wp-container-45 wp-block-columns\">\n<div class=\"wp-container-43 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/fc3000w.jpg\" alt=\"Flip chip bonder(FC3000W)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-44 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Toray Engineering Co.,Ltd.(FC3000W)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30d5\u30ea\u30c3\u30d7\u30c1\u30c3\u30d7<br>\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba(\u30c1\u30c3\u30d7)<\/th><td>\u6700\u5c0f\u3000 3L \u00d7  3W<br>\n\u6700\u5927\u300020L \u00d7 20W<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba(\u57fa\u677f)<\/th><td>8\u30a4\u30f3\u30c1\u300112\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u767a\u751f\u529b\uff08\u8377\u91cd\uff09<\/th><td>\u8d85\u4f4e\u5727\u30d8\u30c3\u30c9\uff1a0.098 \uff5e9.8N<br>\n\u71b1\u5727\u7740\u30d8\u30c3\u30c9\uff1a9.8\uff5e490 N<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6(\u30d8\u30c3\u30c9)<\/th><td>\u5ba4\u6e29\uff5e450\u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6(\u30b3\u30f3\u30b9\u30bf\u30f3\u30c8\u30b9\u30c6\u30fc\u30b8)<\/th><td>\u5ba4\u6e29 \uff5e 150\u2103<br>\n\uff0a\u6700\u5927\u52a0\u71b1\u30a8\u30a2\u30ea\u30a2\uff1a12\u30a4\u30f3\u30c1\u30a6\u30a7\u30cf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6700\u5927\u6e29\u5ea6(\u30d1\u30eb\u30b9\u30b9\u30c6\u30fc\u30b8)<\/th><td>\u5ba4\u6e29 \uff5e 400\u2103<br>\n\uff0a\u6700\u5927\u52a0\u71b1\u30a8\u30a2\u30ea\u30a2\uff1a20mm\u25a1<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"main_no32\">Anodic bonding<\/h3>\n\n\n\n<div class=\"wp-container-48 wp-block-columns\">\n<div class=\"wp-container-46 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/anodic-bonding.jpg\" alt=\"Anodic bonding\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-47 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>NEC<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Anodic bonding<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Wafer to wafer bonding<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 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