{"id":133,"date":"2022-01-12T10:39:03","date_gmt":"2022-01-12T01:39:03","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=133"},"modified":"2026-01-20T14:20:23","modified_gmt":"2026-01-20T05:20:23","slug":"equipment03","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03","title":{"rendered":"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/h2>\n\n\n\n<h3 id=\"equipment03-15\">Asher for general use<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2024\/01\/equipment03-15.jpg\" alt=\"Asher for general use\" class=\"wp-image-1922\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment03-15.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment03-15-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59274inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>CF4, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-01\">ICP-RIE#1(MUC21)<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/12-3.jpg\" alt=\"ICP-RIE#1(MUC21)\" class=\"wp-image-910\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/12-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/12-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>SPP\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30ba\uff08MUC21\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30b2\u30fc\u30c8\u96fb\u6975\u5f62\u6210<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>SF<sub>6<\/sub>, C<sub>4<\/sub>F<sub>8<\/sub>, HBr, Cl<sub>2<\/sub>, Ar, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si, SiO<sub>2<\/sub>, resist<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>150 nm\/min (Poly-Si)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>10<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\uff1a\u8a98\u5c0e\u7d50\u5408\u578b<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-02\">ICP-RIE#2(MUC-21)<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/23.jpg\" alt=\"ICP-RIE#2(MUC-21)\" class=\"wp-image-911\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/23.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/23-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u4f4f\u53cb\u7cbe\u5bc6\u5de5\u696d\uff08MUC-21 ASE-SRE\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4Si\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>SF<sub>6<\/sub>, C<sub>4<\/sub>F<sub>8<\/sub>, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si, SiO<sub>2<\/sub>, positive resist<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23004 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>1.5\u20137.5 <span class=\"unit_micro\">\u03bc<\/span>m\/min (Si)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>50\u2013250 (photoresist)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\uff1a\u8a98\u5c0e\u7d50\u5408\u578b\u3001ICP power\uff1a\u6700\u59271000 W\u3001bias power\uff1a\u6700\u5927100 W<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-03\">ICP-RIE#3(Pegasus, MPX)<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/09-7.jpg\" alt=\"ICP-RIE#3(Pegasus, MPX)\" class=\"wp-image-916\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/09-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u4f4f\u53cb\u7cbe\u5bc6\u5de5\u696d\uff08MPX-ASE\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30ca\u30ce\u30ae\u30e3\u30c3\u30d7\u4f5c\u88fd\uff0c\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>SF<sub>6<\/sub>, C<sub>4<\/sub>F<sub>8<\/sub>, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si, SiO<sub>2<\/sub>, positive resist<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23004 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>0.7\u201324 <span class=\"unit_micro\">\u03bc<\/span>m\/min (Si)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>12\u2013260 (photoresist)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\uff1a\u8a98\u5c0e\u7d50\u5408\u578b\u3001ICP power\uff1a\u6700\u59272600 W\u3001bias power\uff1a\u6700\u5927180 W<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-04\">FAB<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/26.jpg\" alt=\"FAB\" class=\"wp-image-917\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/26.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/26-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u834f\u539f\u88fd\u4f5c\u6240\uff08FAB-60 ML\u578b\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u9ad8\u901f\u539f\u5b50\u7dda\u306b\u3088\u308b\u9ad8\u7cbe\u5ea6\u5782\u76f4\u52a0\u5de5<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>SF<sub>6<\/sub>, O<sub>2<\/sub>, CHF<sub>3<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Metal, Si, etc.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>34 nm\/min (Si)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>1:1.5 &nbsp;(photoresist)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-05\">CCP-RIE #1<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/25.jpg\" alt=\"CCP-RIE #1\" class=\"wp-image-918\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/25.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/25-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ANELVA (L-201D-L)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Metal and dielectric material etching<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>SF<sub>6<\/sub>, CF<sub>4<\/sub>, Ar, O<sub>2<\/sub>, CHF<sub>3<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>No limitation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23003 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>70 nm\/min (SiO<sub>2<\/sub>), 10 nm\/min (Pt)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>1:2\u20133 (photoresist:SiO<sub>2<\/sub>)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u7b49\uff09<\/th><td>\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\uff1aCCP\uff08\u5e73\u884c\u5e73\u677f\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-06\">CCP-RIE #2<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/19.jpg\" alt=\"CCP-RIE #2\" class=\"wp-image-919\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/19.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/19-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ANELVA (L-201D-L)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u534a\u5c0e\u4f53\u3001MEMS\u7b49\u30b5\u30f3\u30d7\u30eb\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, N<sub>2<\/sub>, O<sub>2<\/sub>, Cl<sub>2<\/sub>, BCl<sub>3<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>\u534a\u5c0e\u4f53\u3001MEMS\u7b49\u30b5\u30f3\u30d7\u30eb<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>3 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>RF &lt; 100 W<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-07\">CCP-RIE #3<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/18.jpg\" alt=\"CCP-RIE #3\" class=\"wp-image-920\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/18.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/18-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ANELVA (L-201D-L)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Al, W, SiO<sub>2<\/sub>&nbsp;etching<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>BCl<sub>3<\/sub>, Cl<sub>2<\/sub>, O<sub>2<\/sub>, Ar, H<sub>2<\/sub>, CF<sub>4<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Al, W, Si, SiO<sub>2<\/sub>, resist<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>100 nm\/min (SiO<sub>2<\/sub>)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>1:5<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\uff1aCCP<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-08\">Ion beam milling<\/h3>\n\n\n\n<div class=\"wp-container-27 wp-block-columns\">\n<div class=\"wp-container-25 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/27.jpg\" alt=\"Ion beam milling\" class=\"wp-image-921\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/27.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/27-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-26 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u4f2f\u6771\u682a\u5f0f\u4f1a\u793e\uff08IBE-KDC 75\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>RIE\u88c5\u7f6e\u3067\u5bfe\u5fdc\u3067\u304d\u306a\u3044\u6750\u6599\uff08Pt, etc.\uff09\u306e\u5fae\u7d30\u52a0\u5de5<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>20 mm, 3 inch, 4 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>\u6709\u5bb3\u7269\u8cea\uff08Pb, As, etc.\uff09\u4ee5\u5916\u3001\u4f4e\u84b8\u6c17\u5727\u7269\u8cea\uff08Zn, etc.\uff09\u4ee5\u5916<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>Pt 30 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u30ab\u30a6\u30d5\u30de\u30f3\u578b\u30d7\u30e9\u30ba\u30de\u767a\u751f\u88c5\u7f6e<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-09\">Dual frequency RIE<\/h3>\n\n\n\n<div class=\"wp-container-30 wp-block-columns\">\n<div class=\"wp-container-28 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/20.jpg\" alt=\"Dual frequency RIE\" class=\"wp-image-922\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/20.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/20-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-29 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ANELVA (L-211D)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\u30b3\u30f3\u30bf\u30af\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>C<sub>4<\/sub>F<sub>8<\/sub>, Ar, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si\u57fa\u677f<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>300 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>1:10<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u4e8c\u5468\u6ce2\u52b1\u8d77<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-10\">SiN etcher<\/h3>\n\n\n\n<div class=\"wp-container-33 wp-block-columns\">\n<div class=\"wp-container-31 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/16.jpg\" alt=\"SiN etcher\" class=\"wp-image-923\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/16.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/16-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-32 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30b5\u30e0\u30b3\uff08RIE-10NR\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>LOCOS\u306eSiN\u30a8\u30c3\u30c1\u30f3\u30b0\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>CF<sub>4<\/sub>, H<sub>2<\/sub>, O<sub>2<\/sub>, SF<sub>6<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si\u57fa\u677f<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>100 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>1:10<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6\uff08\u30d7\u30e9\u30ba\u30de\u52b1\u8d77\u65b9\u5f0f\u3001\u96fb\u6e90\u51fa\u529b\u7b49\uff09<\/th><td>\u5e73\u884c\u5e73\u677f\u578b<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-13\">Isotropic Si etcher<\/h3>\n\n\n\n<div class=\"wp-container-36 wp-block-columns\">\n<div class=\"wp-container-34 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/05-8.jpg\" alt=\"Isotropic Si etcher\" class=\"wp-image-926\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-8.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-8-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-35 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>Si\u306e\u9078\u629e\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>XeF<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u6750\u6599<\/th><td>Si, SiO<sub>2<\/sub>, positive resist, metal<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8<\/th><td>\u88ab\u52a0\u5de5\u6750\u6599\u306e\u9762\u7a4d\u3067\u5909\u5316\u3059\u308b<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9078\u629e\u6bd4<\/th><td>10000 (SiO<sub>2<\/sub>)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment03-14\">YAG Laser<\/h3>\n\n\n\n<div class=\"wp-container-39 wp-block-columns\">\n<div class=\"wp-container-37 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/01-9.jpg\" alt=\"YAG Laser\" class=\"wp-image-927\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-9.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-9-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-38 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>NEC (Nd:YAG Laser SL 115G)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7279\u5fb4\u30fb\u7528\u9014<\/th><td>\u30c9\u30e9\u30a4\u30d7\u30ed\u30bb\u30b9\uff06\u5c40\u6240\u7684\u52a0\u5de5\u3001\u4f5c\u88fd\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u306e\u5206\u96e2\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u3001SMA\u306a\u3069\u306e\u5207\u65ad\u3084\u6eb6\u63a5\u30e1\u30bf\u30eb\u30ef\u30a4\u30e4\u4e0a\u306e\u76ae\u819c\u306e\u9078\u629e\u9664\u53bb\u3001PZT\u306e\u30ec\u30fc\u30b6\u652f\u63f4\u30a8\u30c3\u30c1\u30f3\u30b0<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30ec\u30fc\u30b6\u30fc\u4ed5\u69d8\uff08\u767a\u632f\u5668\u3001\u6ce2\u9577\u3001\u51fa\u529b\u306a\u3069\uff09<\/th><td>Nd:YAG\u30ec\u30fc\u30b6\uff08Q\u30b9\u30a4\u30c3\u30c1\u4f7f\u7528\u3001\u6ce2\u9577\uff1a1064 nm\u3001\u51fa\u529b\uff1a100 W\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u52a0\u5de5\u30b5\u30a4\u30ba<\/th><td>50 mm \u00d7 50 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u52a0\u5de5\u5bfe\u8c61\u7269<\/th><td>\u30b7\u30ea\u30b3\u30f3\u3001\u30ac\u30e9\u30b9\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u3001SMA\u3001PZT\u3001\u4ed6\uff08\u8981\u76f8\u8ac7\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u52a0\u5de5\u7cbe\u5ea6\uff1a30\u201340 <span class=\"unit_micro\">\u03bc<\/span>m\u7a0b\u5ea6\u3001\u96fb\u6d41\u7bc4\u56f2\uff1a24\u201326 A\uff08\u30b7\u30ea\u30b3\u30f3\uff09\u300140\u201342 A\uff08\u30ac\u30e9\u30b9\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 A [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":13,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"og:description\" content=\"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 A [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\" \/>\n<meta property=\"og:site_name\" content=\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:20:23+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"6\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\",\"name\":\"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\"},\"datePublished\":\"2022-01-12T01:39:03+00:00\",\"dateModified\":\"2026-01-20T05:20:23+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u30db\u30fc\u30e0\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Facilities\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Film processing\/etching\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/\",\"name\":\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"description\":\"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03","og_locale":"ja_JP","og_type":"article","og_title":"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","og_description":"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 A [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03","og_site_name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","article_modified_time":"2026-01-20T05:20:23+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"6\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03","url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03","name":"\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website"},"datePublished":"2022-01-12T01:39:03+00:00","dateModified":"2026-01-20T05:20:23+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u30db\u30fc\u30e0","item":"https:\/\/web.tohoku.ac.jp\/mnc"},{"@type":"ListItem","position":2,"name":"Facilities","item":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities"},{"@type":"ListItem","position":3,"name":"Film processing\/etching"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website","url":"https:\/\/web.tohoku.ac.jp\/mnc\/","name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","description":"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/133"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/comments?post=133"}],"version-history":[{"count":67,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/133\/revisions"}],"predecessor-version":[{"id":2380,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/133\/revisions\/2380"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/media?parent=133"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}