{"id":130,"date":"2022-01-12T10:37:26","date_gmt":"2022-01-12T01:37:26","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=130"},"modified":"2026-01-20T14:22:19","modified_gmt":"2026-01-20T05:22:19","slug":"equipment02","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02","title":{"rendered":"\u6210\u819c\u30fb\u819c\u5806\u7a4d"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>\u76ee\u6b21<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/equipment01\">\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment02\">\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment03\">\u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment04\">\u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment05\">\u8868\u9762\u51e6\u7406<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment06\">\u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u5408<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment07\">\u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment08\">\u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment09\">\u96fb\u6c17\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment10\">\u6a5f\u68b0\u8a08\u6e2c<\/a><\/li><li><a href=\"\/mnc\/facilities\/equipment11\">\u305d\u306e\u4ed6<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>\u6210\u819c\u30fb\u819c\u5806\u7a4d<\/h2>\n\n\n\n<h3 id=\"equipment02-29\">2inch RF magnetron sputter(Ulvac)<\/h3>\n\n\n\n<div class=\"wp-container-3 wp-block-columns\">\n<div class=\"wp-container-1 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"360\" src=\"\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-29.jpg\" alt=\"2inch RF magnetron sputter(Ulvac)\" class=\"wp-image-1940\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-29.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-29-470x353.jpg 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-2 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a2\u30eb\u30d0\u30c3\u30af<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>Maximum 500\u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-01\">Plasme TEOS CVD<\/h3>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/11-1.jpg\" alt=\"Plasme TEOS CVD\" class=\"wp-image-822\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/11-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/11-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30b5\u30e0\u30b3\uff08PD-100ST\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>PE-CVD<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>SiO<sub>2<\/sub>, SiOC<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>80\u2013350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>\u7d0480 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59276 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-03\">Plasma-enhanced SiN CVD<\/h3>\n\n\n\n<div class=\"wp-container-9 wp-block-columns\">\n<div class=\"wp-container-7 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/14.jpg\" alt=\"Plasma-enhanced SiN CVD\" class=\"wp-image-825\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/14.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/14-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30b5\u30e0\u30b3\uff08PD-220NL\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>\u30d7\u30e9\u30ba\u30deCVD\uff08PE-CVD\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>SiN, SiO<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>200\u2013350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>80 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-05\">SiCN Cat-CVD<\/h3>\n\n\n\n<div class=\"wp-container-12 wp-block-columns\">\n<div class=\"wp-container-10 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/17.jpg\" alt=\"SiCN Cat-CVD\" class=\"wp-image-834\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/17.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/17-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-11 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>W\u30ef\u30a4\u30e4\u71b1CVD<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>SiCN\uff08\u30ac\u30b9\u30bd\u30fc\u30b9\uff1aHMDS\uff0bNH<sub>3<\/sub>\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>150\u2013300 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>2.5\u201350 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch, \u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u89e6\u5a92\u30d5\u30a3\u30e9\u30e1\u30f3\u30c8\uff1a\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08\u23000.5 mm\uff09\u3001\u30d5\u30a3\u30e9\u30e1\u30f3\u30c8\u6e29\u5ea6\uff1a1600\u20131900 \u2103\u3001\u71b1\u906e\u65ad\u677f\u6709<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-06\">Plasma\/ozone TEOS CVD<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/10-3.jpg\" alt=\"Plasma\/ozone TEOS CVD\" class=\"wp-image-836\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>YOUTEC (21-0266SA)<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>PE-CVD<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>SiO<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>200\u2013350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>\u7d04300 nm\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59278 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-07\">Plasma CNT-CVD<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/01-5.jpg\" alt=\"Plasma CNT-CVD\" class=\"wp-image-840\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>PE-CVD<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>CNT<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>650\u2013700 \u2103\uff08\u653e\u5c04\u6e29\u5ea6\u8a08\u306b\u3088\u308b\u8a08\u6e2c\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>1 nm\u3001Fe\u4e0a\u30672 <span class=\"unit_micro\">\u03bc<\/span>m\/min<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u7d0450 mm\u306e\u89d2\u7db2\u306b\u8f09\u308b\u30b5\u30a4\u30ba<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u6210\u819c\u6761\u4ef6\u4f8b\uff1a600 V\u306eDC\u30d7\u30e9\u30ba\u30de\u3001\u30a2\u30bb\u30c1\u30ec\u30f310 Pa\u3001\u6c34\u7d20100 Pa<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-08\">Plasma diamond CVD(AX3030)<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/07-3.jpg\" alt=\"Plasma diamond CVD(AX3030)\" class=\"wp-image-845\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30bb\u30ad\u30c6\u30af\u30ce\u30c8\u30ed\u30f3\uff08AX5200\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>MPECVD<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>Graphene nano walls, diamond<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013400 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>Low<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>10 \u00d7 10 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>Microwave power: 650 W, Gas: H<sub>2<\/sub>, CH<sub>4<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-09\">RF magnetron sputter(Shibaura#1,CFS-4ES)<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/12.jpg\" alt=\"RF magnetron sputter(Shibaura#1,CFS-4ES)\" class=\"wp-image-850\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/12.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/12-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30b7\u30d0\u30a6\u30e9\u30e1\u30ab\u30c8\u30ed\u30cb\u30af\u30b9\uff08CFS-4ES\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>\u91d1\u5c5e\u3001\u975e\u91d1\u5c5e\u5bfe\u5fdc<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u8a66\u6599<\/th><td>\u30b9\u30d1\u30c3\u30bf\u8010\u6027\u306e\u3042\u308b\u3001\u304b\u3064\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3057\u306a\u3044\u8a66\u6599<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59274 inch \u00d7 2\u679a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013300 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, O<sub>2<\/sub>, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u6700\u5927300 W\u30013\u30bf\u30fc\u30b2\u30c3\u30c8\u8a2d\u7f6e\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-10\">RF magnetron Sputter(Shibaura#2,CFS-4ES)<\/h3>\n\n\n\n<div class=\"wp-container-27 wp-block-columns\">\n<div class=\"wp-container-25 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/10-4.jpg\" alt=\"RF magnetron Sputter(Shibaura#2,CFS-4ES)\" class=\"wp-image-852\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/10-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-26 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u829d\u6d66\u30a8\u30ec\u30c6\u30c3\u30af(CFS\uff0d4ES-232)\n<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>\u7d14\u91d1\u5c5e\u306e\u307f\uff08\u78c1\u6027\u4f53\u4ee5\u5916\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u8a66\u6599<\/th><td>\u30b9\u30d1\u30c3\u30bf\u8010\u6027\u306e\u3042\u308b\uff0c\u304b\u3064\uff0c\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3057\u306a\u3044\u8a66\u6599<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59274 inch \u00d7 2\u679a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>\u5ba4\u6e29<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>3\u30bf\u30fc\u30b2\u30c3\u30c8\u8a2d\u7f6e\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-12\">Facing target DC sputter<\/h3>\n\n\n\n<div class=\"wp-container-30 wp-block-columns\">\n<div class=\"wp-container-28 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/08-4.jpg\" alt=\"Facing target DC sputter\" class=\"wp-image-862\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-29 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u5927\u962a\u771f\u7a7a\u6a5f\u5668\u88fd\u4f5c\u6240\uff08FTS-R3S\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>Fe, Co, Ni<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u8a66\u6599<\/th><td>\u30b9\u30d1\u30c3\u30bf\u8010\u6027\u306e\u3042\u308b\uff0c\u304b\u3064\uff0c\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3057\u306a\u3044\u8a66\u6599<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm \u00d7 4\u679a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013400 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, Kr, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30ea\u30d5\u30c8\u30aa\u30d5\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-13\">Facing target RF sputter<\/h3>\n\n\n\n<div class=\"wp-container-33 wp-block-columns\">\n<div class=\"wp-container-31 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/04-5.jpg\" alt=\"Facing target RF sputter\" class=\"wp-image-863\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-32 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u5927\u962a\u771f\u7a7a\uff08FTS-1CL\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>\u5404\u7a2e\u91d1\u5c5e<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013700 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u6709\u6a5f\u7269NG<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-15\">ECR sputter<\/h3>\n\n\n\n<div class=\"wp-container-36 wp-block-columns\">\n<div class=\"wp-container-34 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/11-3.jpg\" alt=\"ECR Sputter\" class=\"wp-image-867\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/11-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/11-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-35 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>JSW\u30a2\u30d5\u30c6\u30a3\uff08AFTEX EC-2300\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>AlN\u306e\u307f<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u8a66\u6599<\/th><td>\u30b9\u30d1\u30c3\u30bf\u8010\u6027\u306e\u3042\u308b\u3001\u304b\u3064\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3057\u306a\u3044\u8a66\u6599<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4 inch, \u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013300 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar + N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30ea\u30d5\u30c8\u30aa\u30d5\u4e0d\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-16\">ECR ion beam sputter\uff08EIS-220\uff09<\/h3>\n\n\n\n<div class=\"wp-container-39 wp-block-columns\">\n<div class=\"wp-container-37 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/06-3.jpg\" alt=\"ECR ion beam sputter\uff08EIS-220\uff09\" class=\"wp-image-870\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-38 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a8\u30ea\u30aa\u30cb\u30af\u30b9\uff08EIS-220\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>\u534a\u5c0e\u4f53\u3001MEMS\u7528\u6750\u6599\u7b49<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59273 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013350 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u6709\u6a5f\u7269OK\u3001\u30ea\u30d5\u30c8\u30aa\u30d5\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-17\">RF magnetron sputter(ANELVA#1,SPC-350)<\/h3>\n\n\n\n<div class=\"wp-container-42 wp-block-columns\">\n<div class=\"wp-container-40 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/07-5.jpg\" alt=\"RF magnetron sputter(ANELVA#1,SPC-350)\" class=\"wp-image-874\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-41 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a2\u30cd\u30eb\u30d0\uff08SPC-350\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>Metal, Si, SiO<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u57fa\u677f<\/th><td>\u30b9\u30d1\u30c3\u30bf\u8010\u6027\u306e\u3042\u308b\u3001\u304b\u3064\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3057\u306a\u3044\u8a66\u6599<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013400 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, O<sub>2<\/sub>, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u6709\u6a5f\u7269NG\u3001\u30ea\u30d5\u30c8\u30aa\u30d5\u4e0d\u53ef\u3001\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u53ef\u3001\u30ed\u30fc\u30c9\u30ed\u30c3\u30af\u5ba4\u6709\u30013\u30bf\u30fc\u30b2\u30c3\u30c8\u8a2d\u7f6e\u53ef<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-18\">High-temp RF magnetron sputter(SSP3000)<\/h3>\n\n\n\n<div class=\"wp-container-45 wp-block-columns\">\n<div class=\"wp-container-43 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/01-7.jpg\" alt=\"High-temp RF magnetron sputter(SSP3000)\" class=\"wp-image-878\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-44 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u83c5\u88fd\u4f5c\u6240\uff08SSP3000\uff09<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>\u91d1\u5c5e<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59272 inch \u00d7 2\u679a<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>RT\u2013600 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, N<sub>2<\/sub>, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-19\">Thermal oxidation furnace<\/h3>\n\n\n\n<div class=\"wp-container-48 wp-block-columns\">\n<div class=\"wp-container-46 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/03-7.jpg\" alt=\"Thermal oxidation furnace\" class=\"wp-image-881\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-47 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u81ea\u4f5c<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>SiO<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>1000 \u2103\u7a0b\u5ea6<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>Si\u306e\u30a6\u30a7\u30c3\u30c8\u304a\u3088\u3073\u30c9\u30e9\u30a4\u9178\u5316<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u30ac\u30b9\u7a2e\uff1aO<sub>2<\/sub>, H<sub>2<\/sub>, N<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u4e3b\u3068\u3057\u3066\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u304a\u3088\u3073LOCOS\u30d7\u30ed\u30bb\u30b9\u7528<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-20\">EB evaporation<\/h3>\n\n\n\n<div class=\"wp-container-51 wp-block-columns\">\n<div class=\"wp-container-49 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/05-5.jpg\" alt=\"EB evaporation\" class=\"wp-image-884\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-50 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>ANELVA (EGP-230)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm,&nbsp;\u23004 inch, etc.<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>\u30ea\u30d5\u30c8\u30aa\u30d5\u7528\u306e\u6210\u819c\u306a\u3069<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u771f\u7a7a\u5ea610\u2212<sup>6<\/sup>&nbsp;Torr\u7a0b\u5ea6\u3067\u6210\u819c\u304c\u53ef\u80fd\u3002\u91d1\u5c5e\u819c\u3001\u7d76\u7e01\u819c\u304c\u6210\u819c\u53ef\u80fd\u3002\u30c1\u30bf\u30f3\u3001\u30a2\u30eb\u30df\u306f\u5171\u540c\u5229\u7528\u3060\u304c\u3001\u305d\u306e\u4ed6\u306e\u6750\u6599\u306f\u539f\u6599\u3001\u30cf\u30fc\u30b9\u30e9\u30a4\u30ca\u3092\u5404\u81ea\u3067\u7528\u610f\u3059\u308b\u3002\u30cb\u30c3\u30b1\u30eb\u306a\u3069\u306e\u78c1\u6027\u4f53\u306f\u6210\u819c\u4e0d\u53ef\u3002\u6c34\u6676\u767a\u632f\u5f0f\u819c\u539a\u8a08\u306b\u3088\u308a\u819c\u539a\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u53ef\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30de\u30cb\u30e5\u30a2\u30eb\u88c5\u7f6e\u306b\u3064\u304d\u3001\u30e6\u30fc\u30b6\u9593\u306e\u30aa\u30da\u30c8\u30ec\u306f\u7981\u6b62\u3002\u30af\u30e9\u30a4\u30aa\u30dd\u30f3\u30d7\u5185\u306e\u30a2\u30d6\u30be\u30fc\u30d0\u306b\u306f\u5bff\u547d\u304c\u3042\u308b\u305f\u3081\u3001\u7d42\u591c\u9023\u7d9a\u7a3c\u50cd\u306f\u7981\u6b62\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-21\">Electroplating #1(2401)<\/h3>\n\n\n\n<div class=\"wp-container-54 wp-block-columns\">\n<div class=\"wp-container-52 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"360\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/17e3b3b54b9655346675efce9afd52e2.jpg\" alt=\"Electroplating #1(2401)\" class=\"wp-image-970\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/17e3b3b54b9655346675efce9afd52e2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/17e3b3b54b9655346675efce9afd52e2-470x353.jpg 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-53 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>KEITHLEY\uff082401\u76f4\u6d41\u96fb\u6d41\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6301\u53c2\u3059\u308b\u30d3\u30fc\u30ab\u30fc\u3001\u6eb6\u6db2\u69fd\u30b5\u30a4\u30ba\u3001\u3081\u3063\u304d\u6db2\u306e\u91cf\u306b\u3088\u308b\u3002\u4ed8\u5c5e\u54c1\u306e\u7bc4\u56f2\u3067\u306f20 \u00d7 20 mm\u304c\u6a19\u6e96\u3002<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>\u4e3b\u306b\u76f4\u6d41\u96fb\u6d41\u5236\u5fa1\u306b\u3088\u308b\u3081\u3063\u304d\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u30e1\u30c3\u30ad\u6db2\u306f\u5404\u81ea\u6e96\u5099\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-22\">Electroplating #2(HAB-151A)<\/h3>\n\n\n\n<div class=\"wp-container-57 wp-block-columns\">\n<div class=\"wp-container-55 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/13-1.jpg\" alt=\"Electroplating #2(HAB-151A)\" class=\"wp-image-886\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/13-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/13-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-56 wp-block-column\">\n<table>\n\t<tbody>\n        <tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u5317\u6597\u96fb\u5de5\uff08HAB-151 \u30dd\u30c6\u30f3\u30b7\u30e7\u30b9\u30bf\u30c3\u30c8\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6301\u53c2\u3059\u308b\u30d3\u30fc\u30ab\u30fc\u3001\u6eb6\u6db2\u69fd\u30b5\u30a4\u30ba\u3001\u3081\u3063\u304d\u6db2\u306e\u91cf\u306b\u3088\u308b\u3002\u4ed8\u5c5e\u54c1\u306e\u7bc4\u56f2\u3067\u306f20 \u00d7 20 mm\u304c\u6a19\u6e96\u3002<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>\u4e3b\u306b\u9178\u5316\u9084\u5143\u96fb\u4f4d\u306e\u6e2c\u5b9a\u3084\u4e09\u96fb\u6975\u5f0f\u3081\u3063\u304d\u306a\u3069\u3002\u96fb\u4f4d\u5236\u5fa1\u306b\u3088\u308b\u96fb\u6c17\u5316\u5b66\u5b9f\u9a13\u3092\u884c\u3046\u88c5\u7f6e\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u3081\u3063\u304d\u6db2\u306f\u5404\u81ea\u6e96\u5099\u3002\u7a92\u7d20\u30ac\u30b9\u96f0\u56f2\u6c17\u306e\u5b9f\u9a13\u3092\u884c\u3046\u305f\u3081\u306e\u4ed8\u5c5e\u88c5\u7f6e\u6709\u3002<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-23\">MBE<\/h3>\n\n\n\n<div class=\"wp-container-60 wp-block-columns\">\n<div class=\"wp-container-58 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/07-7.jpg\" alt=\"MBE\" class=\"wp-image-896\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/07-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-59 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Riber (Riber MBE 32 system)<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>MBE<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>GaN, AlN, InN<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>900 \u2103<\/td>\n\t<\/tr>\n\t\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>100 nm\/h<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u23003 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-24\">Palylene evaporator<\/h3>\n\n\n\n<div class=\"wp-container-63 wp-block-columns\">\n<div class=\"wp-container-61 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/03-9.jpg\" alt=\"Palylene evaporator\" class=\"wp-image-899\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-9.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-9-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-62 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Specialty Coating System (PDS2010)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927120 \u00d7 120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>\u30d1\u30ea\u30ec\u30f3\u306e\u84b8\u7740<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>\u6210\u819c\u5727\u529b\uff1a3 Pa\u7a0b\u5ea6<br>\n\u6210\u819c\u6e29\u5ea6\uff1aRT<br>\n\u6210\u819c\u901f\u5ea6\uff1a3 <span class=\"unit_micro\">\u03bc<\/span>m\/h<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-25\">PLD<\/h3>\n\n\n\n<div class=\"wp-container-66 wp-block-columns\">\n<div class=\"wp-container-64 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2022\/02\/05-7.jpg\" alt=\"PLD\" class=\"wp-image-903\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-65 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30d1\u30b9\u30ab\u30eb<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u25a120 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014\uff08\u7279\u5fb4\uff09<\/th><td>\u9178\u5316\u7269\u8584\u819c\u306e\u5806\u7a4d<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-26\">ALD<\/h3>\n\n\n\n<div class=\"wp-container-69 wp-block-columns\">\n<div class=\"wp-container-67 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"323\" src=\"\/mnc\/wp-content\/uploads\/2022\/09\/equipment02-26.jpg\" alt=\"ALD\" class=\"wp-image-1694\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/09\/equipment02-26.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/09\/equipment02-26-470x316.jpg 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-68 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>Cambridge NanoTech (Savannah S100)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>Thermal ALD (Atomic Layer Deposition)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>Al<sub>2<\/sub>O<sub>3<\/sub> (TMA + H<sub>2<\/sub>O)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>100\u2103\u2013220\u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>0.11 nm\/cycle<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u5927\u23004 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-30\">RF magnetron sputter(ANELVA#2,SPC-350UHV)<\/h3>\n\n\n\n<div class=\"wp-container-72 wp-block-columns\">\n<div class=\"wp-container-70 wp-block-column\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2025\/04\/rf_magnetron_sputter.jpg\" alt=\"RF magnetron sputter(ANELVA#2,SPC-350UHV)\" class=\"wp-image-2206\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/rf_magnetron_sputter.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/rf_magnetron_sputter-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-71 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a2\u30cd\u30eb\u30d0\uff08SPH-350\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>AlN\u3001ScAlN<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5c0e\u5165\u53ef\u80fd\u57fa\u677f<\/th><td>\u30b7\u30ea\u30b3\u30f3\u3001\u30ac\u30e9\u30b9\u57fa\u677f\u3000\uff08\u30ec\u30b8\u30b9\u30c8\u3001\u30dd\u30ea\u30de\u30fc\u7b49\u306f\u7981\u6b62\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>2cm\u25a1<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>200\u00b0C<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>\u30a2\u30eb\u30b4\u30f3\u3001\u7a92\u7d20<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td>\u540c\u6642\u306b\u3044\u304f\u3064\u8a66\u6599\u3092\u30ed\u30fc\u30c9\u53ef\u80fd<\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment02-27\">Sputter machine for Pb based complex oxide(SPF-210H)<\/h3>\n\n\n\n<div class=\"wp-container-75 wp-block-columns\">\n<div class=\"wp-container-73 wp-block-column\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-27.jpg\" alt=\"Sputter machine for Pb based complex oxide(SPF-210H)\" class=\"wp-image-1907\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-27.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment02-27-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-74 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>\u30a2\u30cd\u30eb\u30d0\uff08SPF-210H\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7a2e\u985e<\/th><td>RF\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>\u6700\u59272cm\u89d2<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u53ef\u80fd\u6750\u6599<\/th><td>PZT, PMN-PT<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u6e29\u5ea6<\/th><td>Maximum 600 \u2103<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u6210\u819c\u30ec\u30fc\u30c8<\/th><td>400\u2013550 nm\/h<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9<\/th><td>Ar, O<sub>2<\/sub><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td>\u88c5\u7f6e\u5229\u7528\u306b\u306f\u7530\u4e2d\u79c0\u6cbb\u7814\u88c5\u7f6e\u7ba1\u7406\u8005\u306b\u76f8\u8ac7\u304c\u5fc5\u8981\u3067\u3059\u3002<\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"metal_no14\">AlN Sputtering#1<\/h3>\n\n\n\n<div class=\"wp-container-78 wp-block-columns\">\n<div class=\"wp-container-76 wp-block-column\">\n<figure class=\"wp-block-image size-large\"><img src=\"\/mnc\/wp-content\/uploads\/floor_img\/ain-sputtering1.jpg\" alt=\"AlN Sputtering#1\"\/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-77 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>\u30e1\u30fc\u30ab\u30fc\u540d\uff08\u578b\u5f0f\uff09<\/th><td>AMS &#8211; AM2012<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u7528\u9014<\/th><td>AlN sputtering<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u30b5\u30f3\u30d7\u30eb\u30b5\u30a4\u30ba<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u9069\u7528\u4f8b<\/th><td>Sputteirng AlN film<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u4e3b\u306a\u4ed5\u69d8<\/th><td>Thickness:  &gt; 10nm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u305d\u306e\u4ed6<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>\u5099\u8003<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u5408 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u6210\u819c\u30fb\u819c\u5806\u7a4d 2in [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":12,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"og:description\" content=\"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u5408 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u6210\u819c\u30fb\u819c\u5806\u7a4d 2in [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\" \/>\n<meta property=\"og:site_name\" content=\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:22:19+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"11\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\",\"name\":\"\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\"},\"datePublished\":\"2022-01-12T01:37:26+00:00\",\"dateModified\":\"2026-01-20T05:22:19+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u30db\u30fc\u30e0\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Facilities\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Film formation\/deposition\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/\",\"name\":\"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\",\"description\":\"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02","og_locale":"ja_JP","og_type":"article","og_title":"\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","og_description":"\u76ee\u6b21 \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u9732\u5149\u30fb\u63cf\u753b\u88c5\u7f6e \u6210\u819c\u30fb\u819c\u5806\u7a4d \u819c\u52a0\u5de5\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0 \u5408\u6210\u3001\u71b1\u51e6\u7406\u3001\u30c9\u30fc\u30d4\u30f3\u30b0 \u8868\u9762\u51e6\u7406 \u63a5\u5408\u30fb\u7814\u78e8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u5408 \u5f62\u72b6\u30fb\u5f62\u614b\u89b3\u5bdf\u3001\u5206\u6790 \u8a66\u6599\u4f5c\u88fd\u88c5\u7f6e \u96fb\u6c17\u8a08\u6e2c \u6a5f\u68b0\u8a08\u6e2c \u305d\u306e\u4ed6 \u6210\u819c\u30fb\u819c\u5806\u7a4d 2in [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02","og_site_name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","article_modified_time":"2026-01-20T05:22:19+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"11\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02","url":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02","name":"\u6210\u819c\u30fb\u819c\u5806\u7a4d | \u8a2d\u5099\u30fb\u88c5\u7f6e | \u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website"},"datePublished":"2022-01-12T01:37:26+00:00","dateModified":"2026-01-20T05:22:19+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u30db\u30fc\u30e0","item":"https:\/\/web.tohoku.ac.jp\/mnc"},{"@type":"ListItem","position":2,"name":"Facilities","item":"https:\/\/web.tohoku.ac.jp\/mnc\/facilities"},{"@type":"ListItem","position":3,"name":"Film formation\/deposition"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/#website","url":"https:\/\/web.tohoku.ac.jp\/mnc\/","name":"\u6771\u5317\u5927\u5b66 \u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc","description":"\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u9644\u5c5e\u30b9\u30de\u30fc\u30c8\u30b7\u30b9\u30c6\u30e0\u8d85\u96c6\u7a4d\u5316\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u306f\u3001\u5e73\u62107\u5e74\u5ea6\u653f\u5e9c\u88dc\u6b63\u4e88\u7b97\u306b\u3088\u308b\u300c\u5927\u5b66\u9662\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u72ec\u5275\u7684\u7814\u7a76\u958b\u767a\u63a8\u9032\u7d4c\u8cbb\u300d\u3067\u767a\u8db3\u3057\u305f\u65bd\u8a2d\u3067\u3059\u3002","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/mnc\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/130"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/comments?post=130"}],"version-history":[{"count":92,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/130\/revisions"}],"predecessor-version":[{"id":2382,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/130\/revisions\/2382"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-json\/wp\/v2\/media?parent=130"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}