{"id":566,"date":"2022-01-21T10:55:11","date_gmt":"2022-01-21T01:55:11","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=566"},"modified":"2026-01-20T14:27:19","modified_gmt":"2026-01-20T05:27:19","slug":"nano","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano","title":{"rendered":"Nanomachining Facility"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/floor1f\">1F Cleanroom<\/a><\/li><li><a href=\"\/mnc\/facilities\/floor2f\">2F<\/a><\/li><li><a href=\"\/mnc\/facilities\/floor3f\">3F<\/a><\/li><li><a href=\"\/mnc\/facilities\/nano\">Nanomachining Facility<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Nanomachining Facility<\/h2>\n\n\n\n<div class=\"wp-container-6 wp-block-columns\">\n<div class=\"wp-container-4 wp-block-column\">\n<p class=\"pc-block\">You can check the corresponding device by clicking the number in the image.<\/p>\n<div class=\"wp-block-image pc-block\">\n<form name=\"form1\" class=\"tooltips\">\n<input type=\"text\" name=\"field1\">\n<\/form>\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map4-en.png\" alt=\"Nano-Machining building\" usemap=\"#ImageMap\"><\/figure>\n<map name=\"ImageMap\">\n\t<area shape=\"rect\" coords=\"701,373,782,453\" href=\"\/mnc\/facilities\/equipment02#equipment02-07\" alt=\"1 Plasma CNT-CVD\" onmouseover=\"disp(' Plasma CNT-CVD ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"484,156,644,252\" href=\"\/mnc\/facilities\/equipment07#equipment07-17\" alt=\"2 UHV-STM &amp; AFM\" onmouseover=\"disp(' UHV-STM &amp; AFM ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"402,6,507,109\" href=\"\/mnc\/facilities\/equipment07#equipment07-06\" alt=\"3 ESCA\" onmouseover=\"disp(' ESCA ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"430,260,570,343\" href=\"\/mnc\/facilities\/equipment07#equipment07-16\" alt=\"4 SPM (Shimazu, 9500J2)\" onmouseover=\"disp('SPM(Shimazu) ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"432,509,569,591\" href=\"\/mnc\/facilities\/equipment07#equipment07-15\" alt=\"5 Olympus SPM\" onmouseover=\"disp('Olympus SPM ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"204,510,363,618\" href=\"\/mnc\/facilities\/equipment10#equipment10-04\" alt=\"6  Micro vibration measurement system\" onmouseover=\"disp('Micro vibration measurement system')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"56,293,120,372\" href=\"\/mnc\/facilities\/equipment01#equipment01-04\" alt=\"10 Simple photo-mask maker(MM605AT)\" onmouseover=\"disp('Simple photo-mask maker')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"18,458,179,565\" href=\"\/mnc\/facilities\/equipment02#equipment02-29\" alt=\"11 2inch RF magnetron sputter(Ulvac)\" onmouseover=\"disp('2inch RF magnetron sputter')\" onmouseout=\"disp('')\" class=\"target\">\n<\/map>\n<\/div>\n<div class=\"wp-block-image sp-block\">\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map4-en.png\" alt=\"Nano-Machining building\"><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-container-5 wp-block-column\">\n<ul class=\"nolist bg-yellow\">\n\t<li><span>1<\/span><a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-07\">Plasma CNT-CVD<\/a><\/li>\n\t<li><span>2<\/span><a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-17\">UHV-STM &amp; AFM<\/a><\/li>\n\t<li><span>3<\/span><a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-06\">ESCA<\/a><\/li>\n\t<li><span>4<\/span><a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-16\">SPM (Shimazu, 9500J2)<\/a><\/li>\n\t<li><span>5<\/span><a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-15\">Olympus SPM<\/a><\/li>\n\t<li><span>6<\/span><a href=\"\/mnc\/en\/facilities\/equipment10#equipment10-04\">Micro vibration measurement system<\/a><\/li>\n\t<li><span>10<\/span><a href=\"\/mnc\/en\/facilities\/equipment01#equipment01-04\">Simple photo-mask maker(MM605AT)<\/a><\/li>\n\t<li><span>11<\/span><a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-29\">2inch RF magnetron sputter(Ulvac)<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents 1F Cleanroom 2F 3F Nanomachining Facility Nanomachining Facility You can check the correspon [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"og:description\" content=\"table of contents 1F Cleanroom 2F 3F Nanomachining Facility Nanomachining Facility You can check the correspon [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano\" \/>\n<meta property=\"og:site_name\" content=\"Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:27:19+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano\",\"name\":\"Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center\",\"isPartOf\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/#website\"},\"datePublished\":\"2022-01-21T01:55:11+00:00\",\"dateModified\":\"2026-01-20T05:27:19+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[[\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano\"]]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"HOME\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Facilities\",\"item\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Nanomachining Facility\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/#website\",\"url\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/\",\"name\":\"Tohoku University Smart System Super Integration Research Center\",\"description\":\"Venture Business Laboratory (VBL), the predecessor of Smart System Super Integration Research Center (SIRC), was established by a fund for creative research projects in the FY 1995 Supplementary Budget of the Japanese government.\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano","og_locale":"en_US","og_type":"article","og_title":"Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center","og_description":"table of contents 1F Cleanroom 2F 3F Nanomachining Facility Nanomachining Facility You can check the correspon [&hellip;]","og_url":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano","og_site_name":"Tohoku University Smart System Super Integration Research Center","article_modified_time":"2026-01-20T05:27:19+00:00","og_image":[{"width":1200,"height":630,"url":"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano","url":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano","name":"Nanomachining Facility | Facilities | Tohoku University Smart System Super Integration Research Center","isPartOf":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/#website"},"datePublished":"2022-01-21T01:55:11+00:00","dateModified":"2026-01-20T05:27:19+00:00","breadcrumb":{"@id":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":[["https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano"]]}]},{"@type":"BreadcrumbList","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/nano#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"HOME","item":"https:\/\/web.tohoku.ac.jp\/mnc\/en"},{"@type":"ListItem","position":2,"name":"Facilities","item":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities"},{"@type":"ListItem","position":3,"name":"Nanomachining Facility"}]},{"@type":"WebSite","@id":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/#website","url":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/","name":"Tohoku University Smart System Super Integration Research Center","description":"Venture Business Laboratory (VBL), the predecessor of Smart System Super Integration Research Center (SIRC), was established by a fund for creative research projects in the FY 1995 Supplementary Budget of the Japanese government.","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"}]}},"_links":{"self":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/pages\/566"}],"collection":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/comments?post=566"}],"version-history":[{"count":27,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/pages\/566\/revisions"}],"predecessor-version":[{"id":2387,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/pages\/566\/revisions\/2387"}],"up":[{"embeddable":true,"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/pages\/12"}],"wp:attachment":[{"href":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/wp-json\/wp\/v2\/media?parent=566"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}