{"id":558,"date":"2022-01-21T10:50:55","date_gmt":"2022-01-21T01:50:55","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=558"},"modified":"2026-01-20T14:30:39","modified_gmt":"2026-01-20T05:30:39","slug":"floor2f","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/floor2f","title":{"rendered":"2F"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"\/mnc\/facilities\/floor1f\">1F Cleanroom<\/a><\/li><li><a href=\"\/mnc\/facilities\/floor2f\">2F<\/a><\/li><li><a href=\"\/mnc\/facilities\/floor3f\">3F<\/a><\/li><li><a href=\"\/mnc\/facilities\/nano\">Nanomachining Facility<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>2F<\/h2>\n\n\n\n<p class=\"pc-block\">You can check the corresponding device by clicking the number in the image.<\/p>\n<div class=\"wp-block-image pc-block\">\n<form name=\"form1\" class=\"tooltips\">\n<input type=\"text\" name=\"field1\">\n<\/form>\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map2-en.png\" alt=\"2F\" usemap=\"#ImageMap\"><\/figure>\n<map name=\"ImageMap\">\n\t<area shape=\"rect\" coords=\"8,197,36,248\" href=\"\/mnc\/facilities\/equipment11#equipment11-05\" alt=\"1 UV exposure\" onmouseover=\"disp('UV exposure')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"7,273,37,322\" href=\"\/mnc\/facilities\/equipment02#equipment02-24\" alt=\"2 Palylene evaporator\" onmouseover=\"disp('Palylene evaporator')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"72,46,104,76\" href=\"\/mnc\/facilities\/equipment06#equipment06-04\" alt=\"3 Flip chip bonder #2\" onmouseover=\"disp('Flip chip bonder #2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"71,85,96,124\" href=\"\/mnc\/facilities\/equipment09#equipment09-09\" alt=\"4 Wire bonder #1\" onmouseover=\"disp('Wire bonder #1')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"114,60,158,104\" href=\"\/mnc\/facilities\/equipment06#equipment06-08\" alt=\"5 Dicer\" onmouseover=\"disp('Dicer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"170,74,199,127\" href=\"\/mnc\/facilities\/\" alt=\"6 Fume hood\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"166,152,198,189\" href=\"\/mnc\/facilities\/\" alt=\"7 Spin Coater\" onmouseover=\"disp('Spin Coater')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"170,191,200,251\" href=\"\/mnc\/facilities\/\" alt=\"8 Fume hood\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"138,252,170,280\" href=\"\/mnc\/facilities\/equipment02#equipment02-21\" alt=\"9 Electroplating #1(2401), #2(HAB-151A)\" onmouseover=\"disp('Electroplating #1, #2')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"7,95,38,136\" href=\"\/mnc\/facilities\/equipment09#equipment09-10\" alt=\"10 Wire bonder#2(HB16)\" onmouseover=\"disp('Wire bonder#2')\" onmouseout=\"disp('')\" class=\"target\">\n\n\t<area shape=\"rect\" coords=\"207,241,240,277\" href=\"\/mnc\/facilities\/equipment03#equipment03-13\" alt=\"4 Isotropic Si etcher\" onmouseover=\"disp('Isotropic Si etcher')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"296,41,352,72\" href=\"\/mnc\/facilities\/equipment07#equipment07-18\" alt=\"5 Thermal Decomposition Spectroscopy\" onmouseover=\"disp('Thermal Decomposition Spectroscopy')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"332,88,399,159\" href=\"\/mnc\/facilities\/equipment02#equipment02-27\" alt=\"6 Sputter machine for Pb based complex oxide(SPF-210H)\" onmouseover=\"disp('Sputter machine for Pb based complex oxide')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"300,186,343,225\" href=\"\/mnc\/facilities\/equipment02#equipment02-08\" alt=\"7 Plasma diamond CVD(AX3030)\" onmouseover=\"disp('Plasma diamond CVD ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"343,257,396,291\" href=\"\/mnc\/facilities\/equipment02#equipment02-26\" alt=\"8 ALD\" onmouseover=\"disp('ALD')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"284,298,343,324\" href=\"\/mnc\/facilities\/equipment09#equipment09-04\" alt=\"9 14GHZ Network Analyzer(E5063A)\" onmouseover=\"disp('14GHZ Network Analyzer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"360,39,401,87\" href=\"\/mnc\/facilities\/equipment11#opt_no10\" alt=\"10 Laser Processing Equipment\" onmouseover=\"disp('Laser Processing Equipment')\" onmouseout=\"disp('')\" class=\"target\">\n\t\n\t<area shape=\"rect\" coords=\"407,40,449,123\" href=\"\/mnc\/facilities\/equipment07#equipment07-02\" alt=\"1 SEM\" onmouseover=\"disp(' SEM ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"407,128,449,171\" href=\"\/mnc\/facilities\/equipment08#equipment08-01\" alt=\"2 FIB\" onmouseover=\"disp('FIB')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"407,172,451,220\" href=\"\/mnc\/facilities\/equipment07#equipment07-10\" alt=\"3 Ultraviolet spectroscopic ellipsometer(M-2000D-Tm)\" onmouseover=\"disp('Ultraviolet spectroscopic ellipsometer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"483,40,512,105\" href=\"\/mnc\/facilities\/equipment08#equipment08-02\" alt=\"4 Ion coater\" onmouseover=\"disp('Ion coater')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"483,127,516,160\" href=\"\/mnc\/facilities\/equipment08#equipment08-03\" alt=\"5 SEM sample Polisher\" onmouseover=\"disp('SEM sample Polisher')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"482,159,516,193\" href=\"\/mnc\/facilities\/equipment08#equipment08-04\" alt=\"6 SEM sample Ion milling\" onmouseover=\"disp('SEM sample Ion milling')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"407,220,446,264\" href=\"\/mnc\/facilities\/equipment07#equipment07-19\" alt=\"7 TG\/DTA\" onmouseover=\"disp('TG\/DTA')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"470,246,526,272\" href=\"\/mnc\/facilities\/equipment07#equipment07-12\" alt=\"8 UV\/Vis\/IR spectrometer\" onmouseover=\"disp('UV\/Vis\/IR spectrometer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"529,39,589,91\" href=\"\/mnc\/facilities\/equipment07#equipment07-20\" alt=\"9 XRD#2(D8 ADVANCE)\" onmouseover=\"disp(' XRD#2 ')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"543,121,589,149\" href=\"\/mnc\/facilities\/equipment10#equipment10-03\" alt=\"10 Microsystem Analyzer(MSA-500)\" onmouseover=\"disp('Microsystem Analyzer(MSA-500)')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"544,148,589,178\" href=\"\/mnc\/facilities\/equipment10#equipment10-03\" alt=\"11 Microsystem Analyzer(MSA-400)\" onmouseover=\"disp('Microsystem Analyzer(MSA-400)')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"546,198,591,226\" href=\"\/mnc\/facilities\/equipment10#equipment10-02\" alt=\"12 High-frequency laser doppler vibrometer\" onmouseover=\"disp('High-frequency laser doppler vibrometer')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"544,230,589,279\" href=\"\/mnc\/facilities\/equipment10#equipment10-01\" alt=\"13 Thin film characterization system\" onmouseover=\"disp('Thin film characterization system')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"477,290,570,322\" href=\"\/mnc\/facilities\/equipment07#equipment07-11\" alt=\"14 FT-IR\" onmouseover=\"disp('FT-IR')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"499,216,527,247\" href=\"\/mnc\/facilities\/equipment07#analysis_no15\" alt=\"15 3D Laser Scanning Microscope(VK-X3000\/X3050)\" onmouseover=\"disp('3D Laser Scanning Microscope')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"471,216,497,246\" href=\"\/mnc\/facilities\/equipment07#analysis_no16\" alt=\"16 AFM(Nano Wizard NSK)\" onmouseover=\"disp(' AFM ')\" onmouseout=\"disp('')\" class=\"target\">\n\n\t<area shape=\"rect\" coords=\"601,72,632,135\" href=\"\/mnc\/facilities\/equipment03#equipment03-14\" alt=\"1 YAG Laser\" onmouseover=\"disp('YAG Laser')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"601,135,632,181\" href=\"\/mnc\/facilities\/\" alt=\"2 VIM, Fluorescence microscope\" onmouseover=\"disp('VIM, Fluorescence microscope')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"600,242,630,313\" href=\"\/mnc\/facilities\/\" alt=\"3 \u30c9\u30e9\u30d5\u30c8\" onmouseover=\"disp('Fume hood')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"649,39,724,96\" href=\"\/mnc\/facilities\/equipment02#equipment02-25\" alt=\"4 PLD\" onmouseover=\"disp('PLD')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"754,49,785,82\" href=\"\/mnc\/facilities\/equipment09#equipment09-02\" alt=\"5 Hall effect measurement\" onmouseover=\"disp('Hall effect measurement')\" onmouseout=\"disp('')\" class=\"target\">\n\t<area shape=\"rect\" coords=\"676,131,770,281\" href=\"\/mnc\/facilities\/equipment02#equipment02-23\" alt=\"6 MBE\" onmouseover=\"disp('MBE')\" onmouseout=\"disp('')\" class=\"target\">\n<\/map>\n<\/div>\n<div class=\"wp-block-image sp-block\">\n<figure class=\"aligncenter size-full\"><img src=\"\/mnc\/wp-content\/uploads\/2026\/01\/building-map2-en.png\" alt=\"2F\"><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-container-8 wp-block-columns\">\n<div class=\"wp-container-5 wp-block-column\">\n<h4>Assembly test room<\/h4>\n\n\n\n<ul class=\"nolist bg-yellow\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/en\/facilities\/equipment11#equipment11-05\">UV exposure<\/a><\/li>\n\t<li><span>2<\/span> <a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-24\">Palylene evaporator<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/en\/facilities\/equipment06#equipment06-04\">Flip chip bonder#2(M-90-10)<\/a><\/li>\n\t<li><span>4<\/span> <a href=\"\/mnc\/en\/facilities\/equipment09#equipment09-09\">Wire bonder#1(L026-343)<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/en\/facilities\/equipment06#equipment06-08\">Dicer<\/a><\/li>\n\t<li><span>6<\/span> Fume hood<\/li>\n\t<li><span>7<\/span> Spin Coater<\/li>\n\t<li><span>8<\/span> Fume hood<\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-21\">Electroplating #1(2401), #2(HAB-151A)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/facilities\/equipment09#equipment09-10\">Wire bonder#2(HB16)<\/a><\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-container-6 wp-block-column\">\n<h4>Optical measurement room<\/h4>\n\n\n\n<ul class=\"nolist bg-blue\">\n\t<li><span>4<\/span> <a href=\"\/mnc\/facilities\/equipment03#equipment03-13\">Isotropic Si etcher<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/facilities\/equipment07#equipment07-18\">Thermal Decomposition Spectroscopy<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-27\">Sputter machine for Pb based complex oxide(SPF-210H)<\/a><\/li>\n\t<li><span>7<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-08\">Plasma diamond CVD(AX3030)<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/mnc\/facilities\/equipment02#equipment02-26\">ALD<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/facilities\/equipment09#equipment09-04\">14GHZ Network Analyzer(E5063A)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/facilities\/equipment11#opt_no10\">Laser Processing Equipment<\/a><\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-container-7 wp-block-column\">\n<h4>Analysis room<\/h4>\n\n\n\n<ul class=\"nolist bg-purple\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-02\">SEM<\/a><\/li>\n\t<li><span>2<\/span> <a href=\"\/mnc\/en\/facilities\/equipment08#equipment08-01\">FIB<\/a><\/li>\n\t<li><span>3<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-10\">Ultraviolet spectroscopic ellipsometer(M-2000D-Tm)<\/a><\/li>\n\t<li><span>4<\/span> <a href=\"\/mnc\/en\/facilities\/equipment08#equipment08-02\">Ion coater<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/en\/facilities\/equipment08#equipment08-03\">SEM sample Polisher<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/mnc\/en\/facilities\/equipment08#equipment08-04\">SEM sample Ion milling<\/a><\/li>\n\t<li><span>7<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-19\">TG\/DTA<\/a><\/li>\n\t<li><span>8<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-12\">UV\/Vis\/IR spectrometer<\/a><\/li>\n\t<li><span>9<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-20\">XRD#2(D8 ADVANCE)<\/a><\/li>\n\t<li><span>10<\/span> <a href=\"\/mnc\/en\/facilities\/equipment10#equipment10-03\">Microsystem Analyzer(MSA-500)<\/a><\/li>\n\t<li><span>11<\/span> <a href=\"\/mnc\/en\/facilities\/equipment10#equipment10-03\">Microsystem Analyzer(MSA-400)<\/a><\/li>\n\t<li><span>12<\/span> <a href=\"\/mnc\/en\/facilities\/equipment10#equipment10-02\">High-frequency laser doppler vibrometer<\/a><\/li>\n\t<li><span>13<\/span> <a href=\"\/mnc\/en\/facilities\/equipment10#equipment10-01\">Thin film characterization system<\/a><\/li>\n\t<li><span>14<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#equipment07-11\">FT-IR<\/a><\/li>\n\t<li><span>15<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#analysis_no15\">3D Laser Scanning Microscope(VK-X3000\/X3050)<\/a><\/li>\n\t<li><span>16<\/span> <a href=\"\/mnc\/en\/facilities\/equipment07#analysis_no16\">AFM(Nano Wizard NSK)<\/a><\/li>\n<\/ul>\n\n\n\n<h4>Laser fabrication room<\/h4>\n\n\n\n<ul class=\"nolist bg-orange\">\n\t<li><span>1<\/span> <a href=\"\/mnc\/en\/facilities\/equipment03#equipment03-14\">YAG Laser<\/a><\/li>\n\t<li><span>2<\/span> VIM, Fluorescence microscope<\/li>\n\t<li><span>3<\/span> Fume hood<\/li>\n\t<li><span>4<\/span> <a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-25\">PLD<\/a><\/li>\n\t<li><span>5<\/span> <a href=\"\/mnc\/en\/facilities\/equipment09#equipment09-02\">Hall effect measurement<\/a><\/li>\n\t<li><span>6<\/span> <a href=\"\/mnc\/en\/facilities\/equipment02#equipment02-23\">MBE<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents 1F Cleanroom 2F 3F Nanomachining Facility 2F You can check the corresponding device by click [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":2,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>2F | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/floor2f\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"2F | Facilities | Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"og:description\" content=\"table of contents 1F Cleanroom 2F 3F Nanomachining Facility 2F You can check the corresponding device by click [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/floor2f\" \/>\n<meta property=\"og:site_name\" content=\"Tohoku University Smart System Super Integration Research Center\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-20T05:30:39+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/03\/ogp.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1200\" \/>\n\t<meta property=\"og:image:height\" content=\"630\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" 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