{"id":327,"date":"2022-01-18T13:03:56","date_gmt":"2022-01-18T04:03:56","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=327"},"modified":"2026-01-20T14:09:42","modified_gmt":"2026-01-20T05:09:42","slug":"equipment08","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/equipment08","title":{"rendered":"Sample preparation equipment"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment01\">Lithography\/exposure\/drawing equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\">Film formation\/deposition<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\">Film processing\/etching<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment04\">Synthesis, heat treatment, doping<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\">Surface treatment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment06\">Bonding, polishing, packaging<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment07\">Shape\/morphology observation, analysis<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment08\">Sample preparation equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment09\">Electrical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment10\">Mechanical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment11\">Others<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Sample preparation equipment<\/h2>\n\n\n\n<h3 id=\"equipment08-01\">FIB<\/h3>\n\n\n\n<div class=\"wp-container-15 wp-block-columns\">\n<div class=\"wp-container-13 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-7.jpg\" alt=\"FIB\" class=\"wp-image-871\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-7.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-7-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-14 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Hitachi High-Tech (SMI500)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Fine processing by local etching\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u25a120 mm\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Cross-section sample preparation for SEM observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Resolution: 12 nm, carbon deposition possible\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment08-02\">Ion coater<\/h3>\n\n\n\n<div class=\"wp-container-18 wp-block-columns\">\n<div class=\"wp-container-16 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-4.jpg\" alt=\"Ion coater\" class=\"wp-image-873\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-17 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Hitachi Science Systems (E-1030)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Materials that can be deposited<\/th><td>Au, Pt-Pd<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>ProcessGas<\/th><td>Ar<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Deposition temperature<\/th><td>Room temperature\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>SEMCharge-up prevention film during SEM observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment08-03\">SEM sample Polisher<\/h3>\n\n\n\n<div class=\"wp-container-21 wp-block-columns\">\n<div class=\"wp-container-19 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-6.jpg\" alt=\"SEM sample Polisher\" class=\"wp-image-877\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-6.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-6-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-20 wp-block-column\">\n<tdmaximum \u25a120=\"\" mm=\"\" <=\"\" td=\"\">\n\t<\/tdmaximum><table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>LEICA (EM TXP)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Mainly for SEM observation section sample preparation\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th>\n<td>Maximum \u25a120 mm<\/td><\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Sample cutting with a diamond blade is also possible.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment08-04\">SEM sample Ion milling<\/h3>\n\n\n\n<div class=\"wp-container-24 wp-block-columns\">\n<div class=\"wp-container-22 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-8.jpg\" alt=\"SEM sample Ion milling\" class=\"wp-image-879\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-8.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-8-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-23 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>LEICA (EM TIC 3X)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Cross-section sample preparation mainly for SEM observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u25a120 mm\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Sample surface milling by rotary stage Is also possible.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":18,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Sample preparation equipment | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/equipment08\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" 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