{"id":145,"date":"2022-01-12T10:52:33","date_gmt":"2022-01-12T01:52:33","guid":{"rendered":"https:\/\/web.tohoku.ac.jp\/mnc\/?page_id=145"},"modified":"2026-01-20T14:12:38","modified_gmt":"2026-01-20T05:12:38","slug":"equipment07","status":"publish","type":"page","link":"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/equipment07","title":{"rendered":"Shape\/morphology observation, analysis"},"content":{"rendered":"<dl class=\"localnav\">\n\t<dt>table of contents<\/dt>\n\t<dd><ul><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment01\">Lithography\/exposure\/drawing equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment02\">Film formation\/deposition<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment03\">Film processing\/etching<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment04\">Synthesis, heat treatment, doping<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment05\">Surface treatment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment06\">Cutting, polishing, bonding<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment07\">Shape\/morphology observation, analysis<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment08\">Sample preparation equipment<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment09\">Electrical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment10\">Mechanical measurement<\/a><\/li><li><a href=\"https:\/\/web.tohoku.ac.jp\/mnc\/facilities\/equipment11\">Others<\/a><\/li><\/ul><\/dd>\n<\/dl>\n\n\n\n<h2>Shape\/morphology observation, analysis<\/h2>\n\n\n\n<h3 id=\"equipment07-18\">Thermal Decomposition Spectroscopy<\/h3>\n\n\n\n<div class=\"wp-container-75 wp-block-columns\">\n<div class=\"wp-container-73 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-18.jpg\" alt=\"Thermal Decomposition Spectroscopy\" class=\"wp-image-1932\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-18.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-18-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-74 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>ESCO (WA1000)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Temperature rise desorption gas analysis on silicon or glass substrates<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>pplication example<\/th><td>Amount of H<sub>2<\/sub>O adsorbed on SiO<sub>2<\/sub> and desorption temperature analysis, Amount of H+ adsorbed on Si and desorption temperature analysis<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>1 \u00d7 1 cm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>No organic materials accepted, no organically contaminated samples accepted<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td>Contamination control is required. Consult with the person in charge of equipment management (Shuji Tanaka Laboratory) before use.<\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-19\">TG\/DTA<\/h3>\n\n\n\n<div class=\"wp-container-78 wp-block-columns\">\n<div class=\"wp-container-76 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-19.jpg\" alt=\"TG\/DTA\" class=\"wp-image-1933\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-19.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2024\/01\/equipment07-19-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-77 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>SII (TG\/DTA7300)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum sample volume 200mg or the amount that can be contained in the container<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Measuring temperature range: RT to 1500\u2103, TG measuring range: \u00b1400 mg, TG sensitivity: 0.2 \u03bcg, DTA measuring range: \u00b11000 \u03bcV, DTA sensitivity: 0.06 \u03bcV<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-02\">SEM<\/h3>\n\n\n\n<div class=\"wp-container-81 wp-block-columns\">\n<div class=\"wp-container-79 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-2.jpg\" alt=\"SEM\" class=\"wp-image-781\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-80 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>SEM: Hitachi High-Tech (SU-70), EDX: Oxford (AZtec Energy X-Max)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Observation of fine structure of sample\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23006 inch\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Observation of fine shape on the order of nm, element analysis by EDX\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Electron gun: ZrO\/W Shotkey emission type electron gun, acceleration voltage: 0.5\u201330 kV\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-04\">IR inspection camera<\/h3>\n\n\n\n<div class=\"wp-container-84 wp-block-columns\">\n<div class=\"wp-container-82 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-3.jpg\" alt=\"IR inspection camera\" class=\"wp-image-785\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/01-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-83 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)\uff09<\/th><td>Moritex (IRise)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Internal inspection of sample<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23008 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Evaluation of joint interface of joint sample<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Evaluation of joint interface of joint sample<\/th><td>Monitor magnification: 33\u20131760 times<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Other<\/th><td>The entire wafer can be evaluated collectively by combining images.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-06\">ESCA<\/h3>\n\n\n\n<div class=\"wp-container-87 wp-block-columns\">\n<div class=\"wp-container-85 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-2.jpg\" alt=\"ESCA\" class=\"wp-image-787\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-86 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>ULVAC PHI (ESCA1600)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Element analysis of sample surface<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Sample surface composition analysis, chemical bond state evaluation\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>X-ray source: Mg, Al (not monochrome)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Depth direction analysis possible by Ar etching, Auger electron spectroscopy Measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-08\">Surface profilometer<\/h3>\n\n\n\n<div class=\"wp-container-90 wp-block-columns\">\n<div class=\"wp-container-88 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-1.jpg\" alt=\"Surface profilometer\" class=\"wp-image-805\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-1.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-1-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-89 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Kosaka Laboratory (ET200)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Sample surface shape measurement (line analysis)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>\u2300160 mm \u00d7 Thickness 48 mm\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Si after etching Wafer shape measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Height resolution: 0.1 nm, Lateral resolution: 0.1 <span class=\"unit_micro\">\u03bc<\/span>m\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-09\">Ellipsometer(UVISEL)<\/h3>\n\n\n\n<div class=\"wp-container-93 wp-block-columns\">\n<div class=\"wp-container-91 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/13.jpg\" alt=\"Ellipsometer(UVISEL)\" class=\"wp-image-806\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/13.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/13-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-92 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>HORIBA JOBIN YVON (UVISEL-LT)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Film thickness analysis, optical constants (n, k) analysis, in-plane distribution measurement\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23008 inch\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measuring the film thickness and refractive index of the<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Wavelength: 260\u20132100 nm, [Light source] Xe lamp (75 W)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Other<\/th><td>Supports wavelengths from ultraviolet to near infrared. Automatic in-plane distribution measurement with an electric stage.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-10\">Ultraviolet spectroscopic ellipsometer(M-2000D-Tm)<\/h3>\n\n\n\n<div class=\"wp-container-96 wp-block-columns\">\n<div class=\"wp-container-94 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-3.jpg\" alt=\"Ultraviolet spectroscopic ellipsometer(M-2000D-Tm)\" class=\"wp-image-807\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/08-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-95 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>J.A. Woollam (M-2000D)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Measurement of thin film thickness and optical constant<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u25a15 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measurement of film thickness of<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Measurement wavelength range: 193\u20131000 nm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-11\">FT-IR<\/h3>\n\n\n\n<div class=\"wp-container-99 wp-block-columns\">\n<div class=\"wp-container-97 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-3.jpg\" alt=\"FT-IR\" class=\"wp-image-813\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/03-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-98 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Japan Spectroscopy (main unit: FT \/ IR-6300, microscopic part: IRT-7000)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Infrared spectroscopic measurement of sample<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>\u23004 inch (depending on the measurement method)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Film quality analysis of thin film\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Transmission, reflection, ATR, RAS, measurement in vacuum state, microscopic measurement possible\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n\n\n\n<p><\/p>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-12\">UV\/Vis\/IR spectrometer<\/h3>\n\n\n\n<div class=\"wp-container-102 wp-block-columns\">\n<div class=\"wp-container-100 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-2.jpg\" alt=\"UV\/Vis\/IR spectrometer\" class=\"wp-image-814\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-2.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/06-2-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-101 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Jasco (V-570)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use<\/th><td>Measurement of sample absorbance<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23002 inch\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measurement of absorbance of thin film<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main Specifications<\/th><td>Measurement wavelength range: 190\u20132500 nm, target sample: solid, liquid, measurement method: transmission measurement, reflection measurement\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-14\">XRD#1(D8 ADVANCE)<\/h3>\n\n\n\n<div class=\"wp-container-105 wp-block-columns\">\n<div class=\"wp-container-103 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/XRD.jpg\" alt=\"XRD#1(D8 ADVANCE)\" class=\"wp-image-967\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-104 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Bruker (D8 ADVANCE)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Sample crystal structure evaluation, \u03b8\/2\u03b8 measurement, Rocking curve measurement, pole diagram measurement, residual stress measurement, etc.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Maximum \u23002 inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Two-dimensional X-ray diffraction pattern can be acquired by a two-dimensional detector.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-15\">Olympus SPM<\/h3>\n\n\n\n<div class=\"wp-container-108 wp-block-columns\">\n<div class=\"wp-container-106 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-3.jpg\" alt=\"Olympus SPM\" class=\"wp-image-851\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-3.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/05-3-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-107 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Olympus (NV-2000)\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Acquisition of surface shape image and conductive image of minute area\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>\u230020 mm or less is recommended\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Observation of the metal film surface.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Data is retrieved using an MO drive, and files are also in a special format.\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-16\">SPM (Shimazu, 9500J2)<\/h3>\n\n\n\n<div class=\"wp-container-111 wp-block-columns\">\n<div class=\"wp-container-109 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-4.jpg\" alt=\"SPM (Shimazu, 9500J2)\" class=\"wp-image-854\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-4.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/04-4-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-110 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Shimadzu Corporation (SPM9500-J2)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Use (features)<\/th><td>Acquisition of surface shape images and conductive images of minute regions\n<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Within \u230015 mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Observation of the metal film surface.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>The operation is unstable because the control board is out of order and cannot be repaired.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-17\">UHV-STM &amp; AFM<\/h3>\n\n\n\n<div class=\"wp-container-114 wp-block-columns\">\n<div class=\"wp-container-112 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-5.jpg\" alt=\"UHV-STM &amp; AFM\" class=\"wp-image-857\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-5.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/02-5-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-113 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>JEOL (JSTM-4500XT)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Surface shape measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>About 2 \u00d7 5mm<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application example<\/th><td>Measurement with atomic resolution \uff08STM\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>The operation of the device requires considerable knowledge and training.<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"equipment07-20\">XRD#2(D8 ADVANCE)<\/h3>\n\n\n\n<div class=\"wp-container-117 wp-block-columns\">\n<div class=\"wp-container-115 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"640\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/XRD_D8-ADVANCE.jpg\" alt=\"XRD#2(D8 ADVANCE)\" class=\"wp-image-2201\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/XRD_D8-ADVANCE.jpg 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2025\/04\/XRD_D8-ADVANCE-353x470.jpg 353w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-116 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Bruker (D8 ADVANCE)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Purpose<\/th><td>Evaluation of sample crystal structure, \u03b8\/2\u03b8 measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Maximum Rated Output<\/th><td>3kW (Maximum tube voltage, tube current: 60kV &#8211; 60mA)<\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"dark_no2\">Scanning acoustic microscope (KSI)<\/h3>\n\n\n\n<div class=\"wp-container-120 wp-block-columns\">\n<div class=\"wp-container-118 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/scanning-acoustic-microscope.jpg\" alt=\"Scanning acoustic microscope (KSI)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-119 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>KSI(V-8A)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Bonding interface observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>soak in water<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Within 12inch square<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"dark_no3\">Contact angle meter(Kyowa)<\/h3>\n\n\n\n<div class=\"wp-container-123 wp-block-columns\">\n<div class=\"wp-container-121 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/contact-angle-meter.jpg\" alt=\"Contact angle meter(Kyowa)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-122 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Kyowa(MCA-3\/J)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Contact angle measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>High-speed camera<br>\nFrame rate: 60fps<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>Within 20mm square<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"analysis_no15\">3D Laser Scanning Microscope(VK-X3000\/X3050)<\/h3>\n\n\n\n<div class=\"wp-container-126 wp-block-columns\">\n<div class=\"wp-container-124 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/vk-x3000x3050.jpg\" alt=\"3D Laser Scanning Microscope(VK-X3000\/X3050)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-125 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Keyence &#8211; VK-X3000<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>3D surface observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>3D observation, thin film thickness, roughness measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"analysis_no16\">AFM(Nano Wizard NSK)<\/h3>\n\n\n\n<div class=\"wp-container-129 wp-block-columns\">\n<div class=\"wp-container-127 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/nano-wizard-nsk.jpg\" alt=\"AFM(Nano Wizard NSK)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-128 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>JPK instrument\uff08Nano Wizard NSK\uff09<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Surface observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Main specifications<\/th><td>Contact mode, intermittent mode, phase correction<\/td><\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Conductive needle available<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no9\">Contact angle meter(DMe201)<\/h3>\n\n\n\n<div class=\"wp-container-132 wp-block-columns\">\n<div class=\"wp-container-130 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" width=\"480\" height=\"340\" src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage.png\" alt=\"Contact angle meter(DMe201)\" class=\"wp-image-962\" srcset=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage.png 480w, https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/2022\/02\/noimage-470x333.png 470w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-131 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>Kyowa &#8211; DMe201<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Contact angle measurement<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td>Surface tension<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no10\">Microscope(KH-7700)<\/h3>\n\n\n\n<div class=\"wp-container-135 wp-block-columns\">\n<div class=\"wp-container-133 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/kh-7700.jpg\" alt=\"Microscope(KH-7700)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-134 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>HiROX KH-7700<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Surface observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no11\">Table top SEM(JCM-500)<\/h3>\n\n\n\n<div class=\"wp-container-138 wp-block-columns\">\n<div class=\"wp-container-136 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/jcm-500.jpg\" alt=\"Table top SEM(JCM-500)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-137 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>JEOL Neoscope-N JCM-500<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Application<\/th><td>Surface observation<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Sample size<\/th><td>4inch<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no12\">Gas Chromatograph#1(GC-14B)<\/h3>\n\n\n\n<div class=\"wp-container-141 wp-block-columns\">\n<div class=\"wp-container-139 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/gc-14b.jpg\" alt=\"Gas Chromatograph#1(GC-14B)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-140 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>SHIMADZU(GC-14B)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>\n\n\n\n<h3 id=\"experiment_no13\">Gas Chromatograph#2(GC-2014AF)<\/h3>\n\n\n\n<div class=\"wp-container-144 wp-block-columns\">\n<div class=\"wp-container-142 wp-block-column\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large\"><img src=\"https:\/\/web.tohoku.ac.jp\/mnc\/wp-content\/uploads\/floor_img\/gc-2014af.jpg\" alt=\"Gas Chromatograph#2(GC-2014AF)\"\/><\/figure><\/div><\/div>\n\n\n\n<div class=\"wp-container-143 wp-block-column\">\n<table>\n\t<tbody><tr>\n\t\t<th>Manufacturer name (model)<\/th><td>SHIMADZU(GC-2014AF)<\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Others<\/th><td><\/td>\n\t<\/tr>\n\t<tr>\n\t\t<th>Remarks<\/th><td><\/td>\n\t<\/tr>\n<\/tbody><\/table>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>table of contents Lithography\/exposure\/drawing equipment Film formation\/deposition Film processing\/etching Syn [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":12,"menu_order":17,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v20.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Shape\/morphology observation, analysis | Facilities | Tohoku University Smart System Super Integration Research Center<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.tohoku.ac.jp\/mnc\/en\/facilities\/equipment07\" 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